Method for producing an electronic component and electronic component

Patent metadata

Field	Value
Publication number	US-9647186-B2
Application number	US-201414163240-A
Country	US
Kind code	B2
Filing date	Jan 24, 2014
Priority date	Jan 30, 2008
Publication date	May 9, 2017
Grant date	May 9, 2017

Abstract

A method for producing an electronic component comprising barrier layers for the encapsulation of the component comprises, in particular, the following steps: providing a substrate with at least one functional layer, applying at least one first barrier layer on the functional layer via plasma enhanced atomic layer deposition (PEALD), and applying at least one second barrier layer on the functional layer by means of plasma-enhanced chemical vapor deposition (PECVD), where the at least one first barrier layer is applied at a temperature of less than 100° C.

First claim

The invention claimed is:

1. A method for producing an electronic component comprising barrier layers for the encapsulation of the component, comprising:
providing a substrate with at least one functional layer;
applying at least one first barrier layer on the functional layer via plasma enhanced atomic layer deposition (PEALD); and
applying at least one second barrier layer on the functional layer by means of plasma-enhanced chemical vapor deposition (PECVD);
wherein the at least one first barrier layer is applied at a temperature of less than 100° C.

2. The method as claimed in claim 1 , wherein the at least one first barrier layer is applied at a temperature of less than 80° C.

3. The method as claimed in claim 1 , further comprising:
applying a protective layer on the first and second barrier layers.

4. The method as claimed in claim 3 , wherein the protective layer has a spray coating.

5. The method as claimed in claim 1 , further comprising:
applying a first electrode on the substrate and applying a second electrode on the at least one functional layer while providing the substrate with the at least one functional layer;
wherein the at least one functional layer comprises an organic functional layer and wherein the at least one first barrier layer is applied on the second electrode.

6. The method as claimed in claim 1 , wherein at least one of the at least one first barrier layer and the at least one second barrier layer comprises one of an oxide, a nitride and an oxynitride.

7. The method as claimed in claim 1 , wherein a layer sequence composed of at least two layers comprising different materials is applied as the second barrier layer.

8. The method as claimed in claim 7 , wherein the at least two layers comprising different materials comprise a layer comprising an oxide and a layer comprising a nitride.

9. The method as claimed in claim 7 , wherein the first and second barrier layers are applied alternately one on top of another.

10. The method as claimed claim 1 , wherein at least one of at least one further first barrier layer and at least one further second barrier layer is applied.

11. The method as claimed in claim 1 , wherein the second barrier layer is applied before the first barrier layer.

12. The method as claimed in claim 1 , wherein the at least one first barrier layer and the at least one second barrier layer are applied at a temperature of less than 100° C.

13. The method as claimed in claim 1 , wherein the at least one first barrier layer has a thickness of greater than or equal to 10 nm and less than or equal to 30 nm.

14. The method as claimed in claim 1 , wherein the at least one second barrier layer has a thickness of greater than or equal to 100 nm and less than or equal to 1000 nm.

15. The method as claimed in claim 1 , wherein the electronic component comprises at least one of an organic light emitting diode (OLED) and a solar cell.

Assignees

• Schmid Christian
• Schlenker Tilman
• Zull Heribert
• Paetzold Ralph
• Klein Markus
• Heuser Karsten
• Osram Oled Gmbh

Inventors

• Schmid Christian
• Schlenker Tilman
• Zull Heribert
• Paetzold Ralph
• Klein Markus
• Heuser Karsten

Classifications

• H10P14/6342

  Liquid deposition, e.g. spin-coating, sol-gel techniques or spray coating · CPC title

• H10P14/6336

  in the presence of a plasma [PECVD] · CPC title

• H10W74/121

  by multiple encapsulations, e.g. by a thin protective coating and a thick encapsulation · CPC title

• H10W74/47

  comprising organic materials, e.g. plastics or resins · CPC title

• H10W74/10

  characterised by their shape or disposition · CPC title