Vertical light emitting diode with photonic nanostructures and method of fabrication thereof

Patent metadata

Field	Value
Publication number	US-9647183-B2
Application number	US-201514927723-A
Country	US
Kind code	B2
Filing date	Oct 30, 2015
Priority date	Dec 27, 2012
Publication date	May 9, 2017
Grant date	May 9, 2017

Abstract

There is provided a method of fabricating a vertical light emitting diode which includes forming a light emitting diode structure. Forming the light emitting diode structure includes: forming a first material layer of a first conductivity type, forming a second material layer of a second conductivity type, forming a light emitting layer between the first material layer and the second material layer, and forming a plurality of generally ordered photonic nanostructures at a surface of the first material layer through which light generated from the light emitting layer is emitted for enhancing light extraction efficiency of the vertical light emitting diode. In particular, forming a plurality of generally ordered photonic nanostructures includes forming a self-assembled template including generally ordered nanoparticles on the surface of the first material layer to function as a mask for forming the photonic nanostructures at said surface of the first material layer. There is also provided a vertical light emitting diode with the self-assembly derived ordered nanoparticles.

First claim

The invention claimed is:

1. A vertical light emitting diode comprising:
a light emitting diode structure including:
a first material layer of a first conductivity type;
a second material layer of a second conductivity type; and
a light emitting layer disposed in between the first material layer and the second material layer;

wherein the first material layer has a first surface facing the light emitting layer disposed in between the first material layer and the second material layer and a second surface opposite the first surface, and wherein the second surface of the first material layer has a plurality of generally ordered photonic nanostructures formed thereat through which light generated by the light emitting layer is emitted for enhancing light extraction efficiency of the vertical light emitting diode.

2. The vertical light emitting diode according to claim 1 , further comprises a first electrode formed on the second material layer, and a second electrode formed on the first material layer, wherein the first and second electrodes are configured to receive a bias voltage for providing power to the light emitting layer to generate light.

3. The vertical light emitting diode according to claim 1 , wherein the first material layer is selected from a group consisting of an n-type GaN, an n-type AlGaN, and an n-type InAlGaN, the second material is selected from a group consisting of a p-type GaN, a p-type AlGaN, and a p-type InAlGaN, and the light emitting layer comprises one or more quantum wells of indium gallium nitride and gallium nitride (InGaN/GaN) heterostructures.

Assignees

• Agency Science Tech & Res

Inventors

• Krishnamoorthy Sivashankar
• Manippady Krishna Kumar
• Bin Dolmanan Surani
• Lin Kaixin Vivian
• Teo Siew Lang
• Tripathy Sudhiranjan

Classifications

• H01L33/58 Primary

  Electricity · mapped topic

• H01L33/32

  Electricity · mapped topic

• H01L33/06

  Electricity · mapped topic

• H01L2933/0083

  Electricity · mapped topic

• H01L33/10

  Electricity · mapped topic