Method for producing a pressure sensor and corresponding sensor

Patent metadata

Field	Value
Publication number	US-9643836-B2
Application number	US-201314383092-A
Country	US
Kind code	B2
Filing date	Mar 6, 2013
Priority date	Mar 6, 2012
Publication date	May 9, 2017
Grant date	May 9, 2017

Abstract

The invention relates to a method for producing a pressure sensor, comprising the following steps: assembling a support substrate with a deformable membrane on which strain gauges have been deposited, wherein the deformable membrane comprises a thinned area at the center thereof, the support substrate is disposed on top of the deformable membrane, the support substrate comprises an upper surface and a lower surface in contact with the deformable membrane, and the support substrate also comprises lateral recesses arranged on top of the strain gauges and a central recess arranged on top of the thinned area of the membrane, so as to obtain a micromechanical structure; and, once the assembly has been obtained, depositing, in a single step, at least one conductive material on the upper surface of the support and in the lateral recesses of the support, said conductive material extending into the recesses in order to be in contact with the strain gauges so as to form electrical contacts in contact with the strain gauges.

First claim

The invention claimed is:

1. A manufacturing method of a pressure sensor comprising the following steps:
providing a support substrate comprising an upper surface, a lower surface, a lateral recesses and a central recess;
providing a deformable membrane comprising strain gauges, a thinned zone in its centre;
assembling the support substrate with the deformable membrane for obtaining a micromechanical structure wherein the support substrate is arranged above the deformable membrane, the lower surface of the support substrate is in contact with the deformable membrane, the lateral recesses of the support substrate are arranged above the strain gauges and the central recess of the support substrate is arranged above the thinned zone of the deformable membrane;
and after said assembling of the support substrate with the deformable membrane, the method further comprising the step of forming electrical contacts in a single step of depositing at least one conductive material on the upper surface of the support substrate and in the lateral recesses of the substrate support, the conductive material extending into the recesses ( 11 ), wherein said depositing comprises placing the at least one conductive material in physical contact with the strain gauges ( 30 ) to form electrical contacts linked to the strain gauges.

2. The method according to claim 1 , comprising a step of forming several electrical contacts executed by photolithography associated with a 3D hot laminating technique or coating by pulverisation of surfaces of strong topology.

3. The method according to claim 1 , wherein the conductive material(s) are selected from the following group: ultradoped polysilicon, Au, Ag, Ni, Pt, TiW, Cu, Pd, Al, Ti, TiN.

4. The method according to claim 1 , wherein the membrane is made of silicon and:
the support is made of glass, the assembly (E 1 ) consisting of a anodic sealing; or
the support is made of silicon, the assembly consisting of sealing by means of a molecular or atomic bond with or without intermediate layer, or by brazing.

5. The method according to claim 1 , wherein the membrane is formed from a substrate constituted by a monocrystalline silicon including Silicon on Sapphire (SOS), Silicon on Insulator (SOI), Porous Silicon on Insulator (PSOI), SiC on Insulator (SiCOI) and SiC.

6. The method according to claim 1 , comprising a step consisting of:
integrating the support into a casing comprising electrical contacts made of conductive material; the support being integrated into the casing by means of connectors formed on the support.

7. The method according to claim 6 , wherein integration of the support into the casing is completed by a thermo-compression method.

8. The method according to claim 7 , wherein the method of thermo compression is executed at a temperature between 250° C. and 500° C., typically 320° C. with pressure between 10 MPa and 200 MPa, typically 50 MPa.

9. The method according to claim 6 , wherein the electrical contacts of the casing are made of material selected from the following group: ultradoped polysilicon, Au, Ag, Ni, Pt, TiW, Cu, Pd, Al, Ti, TiN.

10. The method according to claim 1 , wherein integration of the support substrate into a casing is executed by means of the technique of the flipped chip.

11. A pressure sensor obtained by a method according to claim 1 .

Assignees

• Auxitrol Sa
• Centre Nat De La Rech Scient (Cnrs)

Inventors

• Brida Sebastiano
• Le Neal Jean-Francois

Classifications

• G01L9/0055

  bonded on a diaphragm · CPC title

• B81C1/00182

  Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer · CPC title

• G01L19/147

  Details about the mounting of the sensor to support or covering means · CPC title

• B81B2203/0127

  Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function · CPC title

• Y10T29/49888

  Subsequently coating · CPC title