Scan mirrors for laser radar

Patent metadata

Field	Value
Publication number	US-9638799-B2
Application number	US-201313840658-A
Country	US
Kind code	B2
Filing date	Mar 15, 2013
Priority date	Nov 21, 2012
Publication date	May 2, 2017
Grant date	May 2, 2017

Abstract

Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.

First claim

We claim:

1. A beam pointing system, comprising:
a first rotational stage configured to provide a rotation about a first axis;
a second rotational stage coupled to the first rotational stage, and configured to provide a rotation about a second axis that is not parallel to the first axis;
a rotatable optical element coupled to the second rotational stage;
an optical system situated to provide a probe beam to the rotatable optical element; and
a stationary optical system configured to be stationary with respect to rotations of the first rotational stage and the second rotational stage, wherein the stationary optical system includes a laser source configured to produce the probe beam and deliver the probe beam to the optical system situated to provide the probe beam to the rotatable optical element.

2. The beam pointing system of claim 1 , wherein the first axis is an azimuthal axis and the second axis is an elevational axis, or the first axis is an elevational axis and the second axis is an azimuthal axis.

3. The beam pointing system of claim 1 , wherein the rotatable optical element is situated to receive the probe beam from the optical system along a propagation axis parallel to the second axis.

4. The beam pointing system of claim 3 , wherein the rotatable optical element has a planar reflective surface situated to receive the probe beam so that the probe beam is directed to a target location based on a first rotation angle and a second rotation angle associated with the first rotational stage and the second rotational stage, respectively.

5. The beam pointing system of claim 4 , wherein the rotatable optical element is a pentaprism.

6. The beam pointing surface of claim 4 , wherein the rotatable optical element is an air pentaprism.

7. The beam pointing system of claim 3 , wherein the rotatable optical element is situated to receive the probe beam from the optical system along an axis parallel to the first axis.

8. The beam pointing system of claim 7 , wherein the rotatable optical element has a planar reflective surface situated to receive the probe beam so that the probe beam is directed to a target location based on a first rotation angle and a second rotation angle associated with the first rotational stage and the second rotational stage, respectively.

9. The beam pointing system of claim 7 , wherein the optical system is configured so as to be stationary with respect to rotations of the first and second rotational stages.

10. The beam pointing system of claim 9 , wherein the optical system includes a photodetector configured to receive a portion of the probe beam returned from a target.

11. The beam pointing system of claim 10 , further comprising a camera secured so as to be rotatable about the first axis so as to image a target field of view.

12. The beam pointing system of claim 10 , further comprising a beam splitter and a camera, wherein the beam splitter is situated so that the camera and the probe beam are associated with a common axis.

13. The beam pointing system of claim 3 , wherein the rotatable optical element optical is situated to receive the probe beam from the optical system along an axis parallel to the second axis.

14. The beam pointing system of claim 13 , wherein the optical system situated to provide the probe beam to the rotatable optical element is coupled to the first rotational stage.

15. The beam pointing system of claim 14 , further comprising an optical fiber coupled to the optical system so as to deliver a measurement beam to the optical system, and the optical system is configured to produce a probe beam and a reference beam based on the measurement beam.

16. The beam pointing system of claim 14 , wherein the first rotational stage and the second rotational stage include respective encoders, and further comprising a signal processor coupled to the encoders and configured to determine a pointing direction of the probe beam based on encoder signals.

17. The beam pointing system of claim 16 , wherein the optical system includes at least one optical element that is translatable to adjust a focus distance of the probe beam.

18. The beam pointing system of claim 17 , wherein the optical system includes a corner cube and an objective lens, wherein the translatable optical element is a corner cube situated so as to vary a propagation distance associated with the objective lens.

19. The beam pointing system of claim 18 , wherein the optical system is configured to produce the reference beam based on a portion of the measurement beam directed to the corner cube.

20. The beam pointing system of claim 19 , wherein the optical system is configured to produce the reference beam based on a portion of the measurement beam directed to translatable optical element configured to adjust the focus distance of the probe beam.

21. The beam pointing system of claim 20 , wherein the optical system is configured to couple a portion of the probe beam returned from a target and the reference beam into an optical fiber.

22. The beam pointing system of claim 21 , further comprising a camera coupled so as to be rotatable about the second axis, and configured to image at least a portion of a target.

23. The beam pointing system of claim 22 , wherein the measurement beam includes beams associated with a plurality of laser sources.

24. The beam pointing system of claim 21 , wherein the first axis is an azimuthal axis and the second axis is an elevational axis.

25. The beam pointing system of claim 11 , wherein the rotatable optical element is a pentaprism.

26. The beam pointing system of claim 11 , wherein the rotatable optical element is an air pentaprism.

27. The beam pointing system of claim 11 , wherein the rotatable optical element is a plane reflector.

28. A method for manufacturing a structure, comprising:
producing the structure based on design information;
obtaining shape information of the structure by scanning the structure with a probe beam using the beam pointing apparatus of claim 1 ; and
comparing the obtained shape information with the design information.

29. The method for manufacturing the structure according to claim 28 , further comprising reprocessing the structure based on the comparison.

30. The method for manufacturing the structure according to claim 29 , wherein reprocessing the structure includes reproducing the structure.

31. The beam pointing system of claim 1 , wherein the optical system situated to provide the probe beam to the rotatable optical element is coupled to the first rotational stage and includes at least one optical element that focuses the probe beam.

32. The beam pointing system of claim 31 , wherein the optical system situated to provide the probe beam to the rotatable optical element includes at least one optical element that is movable to adjust a focus distance of the probe beam.

33. The beam pointing system of claim 32 , wherein the at least one moveable optical element of the optical system situated to provide the probe beam to the rotatable optical element is a translatable corner cube, and the optical system situated to provide the probe beam to the rotatable optical element further comprises an objective lens, wherein the translatable corner cube is situated to vary a propagation distance associated wi

Assignees

• Nikon Corp
• Nikon Metrology Nv

Inventors

• Goodwin Eric Peter
• Smith Daniel G
• Cooper Alexander
• Rezk Mina A
• Slotwinski Anthony R
• Hedges Thomas M

Classifications

• G01S17/34

  using transmission of continuous, frequency-modulated waves while heterodyning the received signal, or a signal derived therefrom, with a locally-generated signal related to the contemporaneously transmitted signal · CPC title

• G02B26/108

  having one or more prisms as scanning elements · CPC title

• Y02B10/30

  Wind power · CPC title

• G01S7/4818

  using optical fibres · CPC title

• G01S7/4817

  relating to scanning · CPC title