Nanoscale sensors for intracellular and other applications

Patent metadata

Field	Value
Publication number	US-9638717-B2
Application number	US-201314396542-A
Country	US
Kind code	B2
Filing date	May 2, 2013
Priority date	May 3, 2012
Publication date	May 2, 2017
Grant date	May 2, 2017

Abstract

The present invention generally relates to nanoscale wires for use in sensors and other applications. In various embodiments, a probe comprising a nanotube (or other nanoscale wire) is provided that can be directly inserted into a cell to determine a property of the cell, e.g., an electrical property. In some cases, only the tip of the nanoscale wire is inserted into the cell; this tip may be very small relative to the cell, allowing for very precise study. In some aspects, the tip of the probe is held by a holding member positioned on a substrate, e.g., at an angle, which makes it easier for the probe to be inserted into the cell. The nanoscale wire may also be connected to electrodes and/or form part of a transistor, such that a property of the nanoscale wire, and thus of the cell, may be determined. Such probes may also be useful for studying other samples besides cells. Other aspects of the invention are generally directed to methods of making or using such probes, kits involving such probes, devices involving such probes, or the like.

First claim

What is claimed is:

1. An article, comprising:
a non-carbon nanotube, having an interior, positioned such that the interior of the nanotube is in fluidic communication with a cell interior, and
a holding member supporting at least a portion of the non-carbon nanotube, wherein the holding member supports only one end of the non-carbon nanotube,
wherein at least a portion of the non-carbon nanotube defines a gate of a field effect transistor.

2. The article of claim 1 , further comprising:
a substrate,
wherein the holding member is positioned on the substrate, and
wherein the non-carbon nanotube is supported on only one end by the holding member;
a first electrode in electrical communication with the non-carbon nanotube; and
a second electrode in electrical communication with the non-carbon nanotube.

3. The article of claim 2 , wherein the substrate comprises silicon.

4. The article of claim 2 , wherein the holding member holds the non-carbon nanotube at an angle away from the substrate.

5. The article of claim 1 , wherein the holding member comprises a polymer and/or a photoresist.

6. The article of claim 1 , wherein the non-carbon nanotube comprises a semiconductor.

7. The article of claim 6 , wherein the non-carbon nanotube comprises silicon.

8. The article of claim 2 , wherein the first electrode comprises chromium and/or palladium, and/or copper.

9. The article of claim 2 , wherein the first electrode comprises a first metal and a second metal different from the first metal.

10. The article of claim 1 , wherein the non-carbon nanotube has a free portion and a held portion, wherein the holding member physically contacts the non-carbon nanotube at the held portion.

11. The article of claim 10 , wherein the held portion forms less than about 50% of the non-carbon nanotube.

Assignees

• Harvard College

Inventors

• Lieber Charles M
• Gao Ruixuan
• Strehle Steffen
• Duan Xiaojie
• Tian Bozhi
• Cohen-Karni Itzhaq
• Xie Ping
• Qing Quan

Classifications

• H10P14/40

  of conductive or resistive materials · CPC title

• G01R1/06705

  Apparatus for holding or moving single probes (for moving multiple probe heads or ICs under test G01R31/2886) · CPC title

• H01L29/413

  Electricity · mapped topic

• G01N27/4146 Primary

  involving nanosized elements, e.g. nanotubes, nanowires · CPC title

• G01R1/06755

  Material aspects · CPC title