Differential pressure sensor assembly

Patent metadata

Field	Value
Publication number	US-9638597-B2
Application number	US-201414495095-A
Country	US
Kind code	B2
Filing date	Sep 24, 2014
Priority date	Sep 24, 2014
Publication date	May 2, 2017
Grant date	May 2, 2017

Abstract

A differential pressure sensor assembly includes a transducer having a first sensing surface and a second sensing surface. The second sensing surface is contained in a cavity. An Integrated Circuit (IC) is hermetically coupled to the transducer. The IC has a first aperture aligned to the cavity. A lead frame is coupled to the IC. The lead frame has a second aperture aligned to the first aperture of the IC. A package encapsulates the transducer, the IC and the lead frame. The package has a third aperture exposed to the first sensing surface. The package includes a molding compound providing a hermetic seal between the third aperture of the package and the first aperture of the IC. The molding compound is separated from the transducer by an encroachment distance.

First claim

What is claimed is:

1. A differential pressure sensor assembly comprising:
a transducer having a first sensing surface and a second sensing surface, the second sensing surface contained in a cavity;
an Integrated Circuit (IC) hermetically coupled to the transducer, the IC having a first aperture aligned to the cavity;
a lead frame coupled to the IC, the lead frame having a second aperture aligned to the first aperture of the IC; and
a package encapsulating the transducer, the IC and the lead frame, the package having a third aperture exposed to the first sensing surface, the package including a molding compound providing a hermetic seal between the third aperture of the package and the first aperture of the IC, and the molding compound separated from the transducer by an encroachment distance.

2. The assembly of claim 1 wherein the transducer is a piezo-resistive pressure transducer.

3. The assembly of claim 1 wherein the transducer is wire bonded to the IC to form an electrical communication path therebetween.

4. The assembly of claim 1 wherein the IC is hermetically coupled to the transducer with a seal proximal to the cavity of the transducer, and the transducer communicates electrically with the IC through metallic bumps.

5. The assembly of claim 1 wherein a first gel coating covers the first sensing surface of the transducer, and the first gel coating is configured to provide a moisture barrier and to transmit a pressure from the third aperture of the package to the first sensing surface of the transducer.

6. The assembly of claim 5 wherein a first diameter of the first aperture of the IC is equal to a second diameter of the second aperture of the lead frame, a second gel coating covers the second sensing surface of the transducer, and the second gel coating is configured to provide a moisture barrier and to transmit a pressure from the second aperture of the lead frame to the second sensing surface of the transducer.

7. The assembly of claim 1 wherein the first aperture of the IC is circular.

8. A differential pressure sensor system comprising:
a package encapsulating a piezo-resistive transducer (PRT), an Integrated Circuit (IC) and a lead frame, the PRT having a first sensing surface and a second sensing surface, the second sensing surface contained in a cavity, the IC hermetically coupled to the PRT, the IC having a first aperture aligned to the cavity, the lead frame coupled to the IC, the lead frame having a second aperture aligned to the first aperture of the IC, the package having a third aperture exposed to the first sensing surface, the package including a molding compound providing a hermetic seal between the third aperture of the package and the first aperture of the IC, and the molding compound separated from the transducer by an encroachment distance; and
a Printed Circuit Board (PCB) coupled to the package, the PCB having a fourth aperture aligned to the second aperture of the lead frame, and the PCB providing electrical communication between the IC and a device configured to receive pressure measurements from the PRT.

9. The system of claim 8 wherein the fourth aperture of the PCB is equal to or larger than the second aperture of the lead frame and the second aperture of the lead frame is larger than the first aperture of the IC.

10. The system of claim 9 wherein the first aperture of the IC is circular and has a first diameter of 5 microns to 2 millimeters, inclusive.

11. The system of claim 9 wherein the second aperture of the lead frame is circular and has a second diameter of 200 microns to 2 millimeters, inclusive.

12. The system of claim 8 wherein each of the second aperture of the lead frame and the first aperture of the IC are circular with a same diameter, and the second sensing surface of the PRT is covered with a gel coating.

13. The system of claim 8 wherein the encroachment distance is about 200 microns.

14. A method for manufacturing a differential pressure sensor assembly comprising:
attaching an Integrated Circuit (IC) to a lead frame including aligning a first aperture of the IC with a second aperture of the lead frame;
wire bonding the IC to the lead frame;
overmolding the IC and the lead frame with a molding compound in a package, wherein the molding compound provides a hermetic seal between a third aperture of the package and the first aperture of the IC, the molding compound being separated from the transducer by an encroachment distance;
hermetically attaching a transducer to the IC;
electrically connecting the transducer to the IC; and
coating at least one of two sensing surfaces of the transducer with a gel coating configured to provide a moisture barrier and to transmit a pressure therethrough.

15. The method of claim 14 wherein overmolding is performed with a transfer molding process.

16. The method of claim 15 wherein the transfer molding process is a Film-Assisted Molding process.

17. The method of claim 14 further comprising attaching the package to a Printed Circuit Board (PCB) including aligning a fourth aperture of the PCB to the second aperture of the lead frame and providing, by the PCB, an electrical communication between the IC and a device configured to receive pressure measurements from the transducer.

18. The method of claim 14 wherein attaching the transducer to the IC includes wire bonding the transducer to the IC.

19. The method of claim 14 wherein attaching the transducer to the IC includes attaching the transducer to the IC with a seal proximal to the cavity of the transducer, and electrically coupling the transducer to the IC through metallic bumps.

20. The method of claim 14 further comprising forming the first aperture of the IC with a Deep Reactive-Ion Etching process.

Assignees

• Hooper Stephen R
• Frear Darrel R
• Speight Thomas C
• Nxp Usa Inc

Inventors

• Hooper Stephen R
• Frear Darrel R
• Speight Thomas C

Classifications

• H10W90/752

  between stacked chips · CPC title

• H10W74/10

  characterised by their shape or disposition · CPC title

• G01L9/0052 Primary

  of piezoresistive elements (circuits therefor G01L9/06) · CPC title

• G01L13/025

  using diaphragms · CPC title

• G01L19/04

  Means for compensating for effects of changes of temperature {, i.e. other than electric compensation} · CPC title