Terahertz wave detection device, camera, imaging device, and measuring device

Patent metadata

Field	Value
Publication number	US-9638582-B2
Application number	US-201414184578-A
Country	US
Kind code	B2
Filing date	Feb 19, 2014
Priority date	Feb 21, 2013
Publication date	May 2, 2017
Grant date	May 2, 2017

Abstract

A terahertz wave detection device which includes an absorption portion which absorbs a terahertz wave and generates heat and a conversion portion which converts the heat generated by the absorption portion into an electric signal, wherein the absorption portion includes a dielectric layer, a plurality of metal structures which are provided on one surface of the dielectric layer and are arranged to be separated from one another by an interval having a predetermined length; and a metal layer which is provided on the other surface of the dielectric layer, and wherein the interval is shorter than a wavelength of the terahertz wave which is absorbed by the absorption portion.

First claim

What is claimed is:

1. A terahertz wave detection device comprising:
an absorption portion configured to absorb a terahertz wave and generate heat; and
a conversion portion configured to convert the heat generated by the absorption portion into an electric signal,
wherein the absorption portion includes:
a dielectric layer;
a plurality of metal structures which are provided on a first surface of the dielectric layer and are arranged to be separated from one another by an interval having a predetermined length; and
a metal layer which is provided on a second surface of the dielectric layer, and

wherein the predetermined length of the interval between the plurality of metal structures is shorter than a wavelength of the terahertz wave which is absorbed by the absorption portion.

2. The terahertz wave detection device according to claim 1 ,
wherein a sheet resistance of the metal structures and a sheet resistance of the metal layer are 10 Ω/□or less.

3. A camera comprising:
a terahertz wave generation portion configured to generate a terahertz wave;
the terahertz wave detection device according to claim 2 , wherein the terahertz wave detection device is configured to detect the terahertz wave which is emitted from the terahertz wave generation portion and transmitted through an object, or the terahertz wave which is reflected by the object; and
a storage portion configured to store a detection result of the terahertz wave detection device.

4. An imaging device comprising:
a terahertz wave generation portion configured to generate a terahertz wave;
the terahertz wave detection device according to claim 2 , wherein the terahertz wave detection device is configured to detect the terahertz wave which is emitted from the terahertz wave generation portion and transmitted through an object, or the terahertz wave which is reflected by the object; and
an image forming portion configured to generate an image of the object based on a detection result of the terahertz wave detection device.

5. The terahertz wave detection device according to claim 1 , wherein the conversion portion is a pyroelectric sensor.

6. A camera comprising:
a terahertz wave generation portion configured to generate a terahertz wave;
the terahertz wave detection device according to claim 5 , wherein the terahertz wave detection device is configured to detect the terahertz wave which is emitted from the terahertz wave generation portion and transmitted through an object, or the terahertz wave which is reflected by the object; and
a storage portion configured to store a detection result of the terahertz wave detection device.

7. An imaging device comprising:
a terahertz wave generation portion configured to generate a terahertz wave;
the terahertz wave detection device according to claim 5 , wherein the terahertz wave detection device is configured to detect the terahertz wave which is emitted from the terahertz wave generation portion and transmitted through an object, or the terahertz wave which is reflected by the object; and
an image forming portion configured to generate an image of the object based on a detection result of the terahertz wave detection device.

8. A camera comprising:
a terahertz wave generation portion configured to generate a terahertz wave;
the terahertz wave detection device according to claim 1 , wherein the terahertz wave detection device is configured to detect the terahertz wave which is emitted from the terahertz wave generation portion and transmitted through an object, or the terahertz wave which is reflected by the object; and
a storage portion configured to store a detection result of the terahertz wave detection device.

9. An imaging device comprising:
a terahertz wave generation portion configured to generate a terahertz wave;
the terahertz wave detection device according to claim 1 , wherein the terahertz wave detection device is configured to detect the terahertz wave which is emitted from the terahertz wave generation portion and transmitted through an object, or the terahertz wave which is reflected by the object; and
an image forming portion configured to generate an image of the object based on a detection result of the terahertz wave detection device.

10. A terahertz wave detection device comprising:
an absorption portion configured to absorb a terahertz wave, configured to generate heat, and includes a metamaterial; and
a conversion portion configured to convert the heat generated by the absorption portion into an electric signal,
wherein the absorption portion includes:
a dielectric layer
a plurality of metal structures which are provided on a first surface of the dielectric layer and are arranged to be separated from one another by an interval having a predetermined length: and
a metal laver which is provided on a second surface of the dielectric laver, and

wherein the predetermined length of the interval between the plurality of metal structures is shorter than a wavelength of the terahertz wave which is absorbed by the absorption portion.

11. A camera comprising:
a terahertz wave generation portion configured to generate a terahertz wave;
the terahertz wave detection device according to claim 10 , wherein the terahertz wave detection device is configured to detect the terahertz wave which is emitted from the terahertz wave generation portion and transmitted through an object, or the terahertz wave which is reflected by the object; and
a storage portion configured to store a detection result of the terahertz wave detection device.

12. An imaging device comprising:
a terahertz wave generation portion configured to generate a terahertz wave;
the terahertz wave detection device according to claim 10 , wherein the terahertz wave detection device is configured to detect the terahertz wave which is emitted from the terahertz wave generation portion and transmitted through an object, or the terahertz wave which is reflected by the object; and
an image forming portion configured to generate an image of the object based on a detection result of the terahertz wave detection device.

Assignees

• Seiko Epson Corp

Inventors

• Tomioka Hiroto

Classifications

• G01J5/34

  using capacitors, e.g. pyroelectric capacitors · CPC title

• G01J3/42 Primary

  Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry (beam switching arrangements G01J3/08) · CPC title

• G01J5/10 Primary

  using electric radiation detectors · CPC title

• G01J5/0853

  having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid · CPC title

• G01J2005/0077

  Imaging · CPC title