Method and apparatus for slice and view sample imaging
US-9218940-B1 · Dec 22, 2015 · US
Slide part and surface processing methods of the same
US9636737B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9636737-B2 |
| Application number | US-201113008639-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 18, 2011 |
| Priority date | Feb 1, 2010 |
| Publication date | May 2, 2017 |
| Grant date | May 2, 2017 |
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- Title
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Abstract
Official abstract text for this publication.
A slide part has a surface structure in which there are at least two periodic structures among a first periodic structure with a period of 10 nm to 100 nm inclusive and a depth of 5 nm to 50 nm inclusive, a second periodic structure with a period of 100 nm to 1000 nm inclusive and a depth of 20 nm to 500 nm inclusive, and a third periodic structure with a period of 1000 nm to 10000 nm inclusive and a depth of 100 nm to 3000 nm inclusive, in which one of the at least two periodic structures is formed on the other periodic structure.
First claim
Opening claim text (preview).
What is claimed is: 1. A slide part comprising a surface structure in which a second periodic structure with a period of 100 nm to 1000 nm inclusive and a depth of 20 nm to 500 nm inclusive is formed on a third periodic structure with a period of 1000 nm to 10000 nm inclusive and a depth of 100 nm to 3000 nm inclusive, wherein at least one of the second periodic structure and the third periodic structure is a ripple structure. 2. The slide part according to claim 1 , wherein the surface structure is resistant to occurrence of transfer particles according to adhesion of a workpiece to the slide part during processing in a lubricated environment. 3. The slide part according to claim 1 , wherein the ripple structure of the at least one of the second periodic structure and the third periodic structure is a linearly-extending ripple structure having lines extending in a direction orthogonal to a slide direction of the slide part. 4. The slide part according to claim 2 , wherein the ripple structure of the at least one of the second periodic structure and the third periodic structure is a linearly-extending ripple structure having lines extending in a direction orthogonal to a slide direction of the slide part. 5. The slide part according to claim 1 , wherein the at least one of the second periodic structure and the third periodic structure is formed by irradiation of a gas cluster ion beam. 6. The slide part according to claim 2 , wherein the at least one of the second periodic structure and the third periodic structure is formed by irradiation of a gas cluster ion beam. 7. The slide part according to claim 3 , wherein the at least one of the second periodic structure and the third periodic structure is formed by irradiation of a gas cluster ion beam. 8. The slide part according to claim 4 , wherein the at least one of the second periodic structure and the third periodic structure is formed by irradiation of a gas cluster ion beam. 9. The slide part according to claim 1 , wherein the surface structure is formed on at least an edge of the slide part. 10. The slide part according to claim 2 , wherein the surface structure is formed on at least an edge of the slide part. 11. The slide part according to claim 3 , wherein the surface structure is formed on at least an edge of the slide part. 12. The slide part according to claim 4 , wherein the surface structure is formed on at least an edge of the slide part. 13. The slide part according to claim 5 , wherein the surface structure is formed on at least an edge of the slide part. 14. The slide part according to claim 6 , wherein the surface structure is formed on at least an edge of the slide part. 15. The slide part according to claim 7 , wherein the surface structure is formed on at least an edge of the slide part. 16. The slide part according to claim 8 , wherein the surface structure is formed on at least an edge of the slide part.
Assignees
Inventors
Classifications
- H01J37/3056Primary
for microworking, e. g. etching of gratings or trimming of electrical components · CPC title
including variation in thickness · CPC title
Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.] · CPC title
having variation in thickness · CPC title
Wrinkled, creased, crinkled or creped · CPC title
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- What does patent US9636737B2 cover?
- A slide part has a surface structure in which there are at least two periodic structures among a first periodic structure with a period of 10 nm to 100 nm inclusive and a depth of 5 nm to 50 nm inclusive, a second periodic structure with a period of 100 nm to 1000 nm inclusive and a depth of 20 nm to 500 nm inclusive, and a third periodic structure with a period of 1000 nm to 10000 nm inclusive…
- Who is the assignee on this patent?
- Sato Akinobu, Suzuki Akiko, Kawano Takeshi, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification H01J37/3056. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue May 02 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).