Showerhead assembly and substrate processing apparatus
US-2024042463-A1 · Feb 8, 2024 · US
US9636699B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9636699-B2 |
| Application number | US-201514842182-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 1, 2015 |
| Priority date | Mar 13, 2013 |
| Publication date | May 2, 2017 |
| Grant date | May 2, 2017 |
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A dispenser, configured to dispense material on a substrate, includes a dispensing unit having a housing with a chamber, a piston disposed in the chamber and axially movable within the chamber, and a nozzle coupled to the housing. The nozzle has an orifice co-axial with the chamber of the housing. The dispenser further includes an actuator coupled to the dispensing unit and configured to drive the up- and down movement of the piston, and a compliant assembly coupled to the actuator and the piston. The compliant assembly is configured to permit limited relative travel between the actuator and the piston. A method of dispensing is further disclosed.
Opening claim text (preview).
What is claimed is: 1. A method of operating a dispenser to dispense material on a substrate, the dispenser comprising a dispensing unit including a housing having a chamber, a piston disposed in the chamber and axially movable within the chamber, and a nozzle coupled to the housing, the nozzle having an orifice co-axial with the chamber of the housing, an actuator coupled to the dispensing unit and configured to drive the up- and down movement of the piston, and a compliant assembly separate from the actuator, the method comprising: permitting limited relative travel between the actuator and the piston wherein the compliant assembly is secured to the piston and to the actuator assembly to provide reciprocating axial movement of the piston in response to the actuator, the compliant assembly including a flexure housing secured to the lever arm of the actuator and coupled to the piston to permit limited relative travel between the actuator and the piston during operation. 2. The method of claim 1 , further comprising biasing a length of the compliant assembly to an extended position. 3. The method of claim 1 , wherein the actuator is a piezoelectric actuator assembly. 4. The method of claim 1 , wherein the actuator is a voice coil motor. 5. The method of claim 1 , wherein the piston stops when a tip of the piston engages a seat, the method further comprising permitting further travel of the actuator subsequent to the engagement of the piston against the seat. 6. The method of claim 1 , wherein the piston stops when a feature of the piston engages a stop, the method further comprising permitting further travel of the actuator subsequent to the engagement of the piston against the stop. 7. The method of claim 1 , further comprising varying a stiffness of compliance as a function of relative motion between the actuator and the piston. 8. The method of claim 1 , further comprising sensing a position of the actuator. 9. The method of claim 8 , further comprising sensing a position of the piston. 10. The method of claim 8 , further comprising controlling the actuator by providing a feed-forward adaptive routine to utilize sensor data from the sensor and the feed-forward adaptive routine to control motion of the actuator to achieve a desired actuator motion profile. 11. The method of claim 1 , further comprising sensing a position of the piston. 12. The method of claim 11 , further comprising controlling the actuator by providing a feed-forward adaptive routine to utilize sensor data from the sensor and the feed-forward adaptive routine to control motion of the actuator to achieve a desired actuator motion profile.
of the piston type (G01F11/04 takes precedence) · CPC title
characterised by flow controlling means, e.g. valves, located proximate the outlet (B05C5/0258, B05C5/0275 take precedence; supply valves upstream the coating head B05C11/1036) · CPC title
specially designed for conducting intermittent application of small quantities, e.g. drops, of coating material (B05C5/0225, B05C11/1026 take precedence) · CPC title
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