Transport system and transport method
US-2016071754-A1 · Mar 10, 2016 · US
US9633879B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9633879-B2 |
| Application number | US-201414277125-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 14, 2014 |
| Priority date | May 14, 2014 |
| Publication date | Apr 25, 2017 |
| Grant date | Apr 25, 2017 |
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A storage system in a ceiling space includes overhead traveling vehicles and a traveling route for the same, a shuttle carriage configured to transport goods to and from processing devices and a traveling route for the same, an OHT port to and from which the overhead traveling vehicles and the shuttle carriage both transport goods, and buffers that are provided in the ceiling space above the processing device and are for the placement of goods by the shuttle carriage. The traveling route for the shuttle carriage enables delivery and reception of goods by the shuttle carriage between the load port of the processing devices, the buffers, and the OHT port.
Opening claim text (preview).
What is claimed is: 1. A storage system in a ceiling space for using overhead traveling vehicles to transport goods to processing devices that have a load port, the system comprising: a traveling route for the overhead traveling vehicles; a shuttle carriage configured to transport goods to and from the processing devices; a traveling route for the shuttle carriage that includes a first portion of the traveling route for the shuttle carriage and a second portion of the traveling route for the shuttle carriage that are connected via a connection portion such that the traveling route for the shuttle carriage is a U-shaped or substantially U-shaped traveling route; a first OHT port configured to enable the overhead traveling vehicles and the shuttle carriage to transport goods to and from the first OHT port; and buffers that are provided in a ceiling space directly above the processing devices in an up-down direction such that the buffers overlap the processing devices in the up-down direction, the buffers being configured to enable placement of goods by the shuttle carriage; wherein the second portion of the traveling route for the shuttle carriage is configured to enable delivery and reception of goods by the shuttle carriage between the load port of the processing devices, the buffers, and the first OHT port; the first portion of the traveling route for the shuttle carriage, the second portion of the traveling route for the shuttle carriage, and the traveling route for the overhead traveling vehicles are arranged parallel or substantially parallel to each other and a row of the processing devices; the buffers are arranged between the first portion of the traveling route for the shuttle carriage and the second portion of the traveling route for the shuttle carriage; the first OHT port is arranged in a ceiling space between the traveling route for the overhead traveling vehicles and the second portion of the traveling route for the shuttle carriage; and the second portion of the traveling route for the shuttle carriage is arranged between the first OHT port and the buffers. 2. The storage system in a ceiling space according to claim 1 , further comprising a second OHT port; wherein the traveling route for the overhead traveling vehicles is configured to pass through the ceiling space directly above the processing devices; the second OHT port is provided in the ceiling space directly above the processing devices; and the traveling route for the shuttle carriage extends from a region directly above the load port to the ceiling space directly above the processing devices via the connection portion. 3. The storage system in a ceiling space according to claim 1 , further comprising a second OHT port; wherein the load port is provided on a passageway side of a front surface of the processing devices; the first OHT port is on the passageway side relative to the load port and the second OHT port is on the processing device side that is provided in the ceiling space directly above the processing devices; the traveling route for the overhead traveling vehicles includes a traveling route directly above the passageway configured to transport goods to and from the first OHT port on the passageway side and a traveling route directly above the processing devices configured to transport goods to and from the second OHT port on the processing device side; the traveling route for the shuttle carriage includes the second portion of the traveling route for the shuttle carriage configured to transport goods to and from the load port and the first OHT port on the passageway side; and the first portion of the traveling route for the shuttle carriage is configured to transport goods to and from the buffers and the second OHT port on the processing device side, and the connection portion. 4. The storage system in a ceiling space according to claim 1 , wherein the shuttle carriage and the overhead traveling vehicles have a same structure, and a connection portion configured to connect the traveling route for the overhead traveling vehicles and the traveling route for the shuttle carriage is provided. 5. The storage system in a ceiling space according to claim 1 , wherein the overhead traveling vehicles travel along the traveling route for the overhead traveling vehicles in one direction; and the shuttle carriage travels back and forth along the first portion of the traveling route for the shuttle carriage and the second portion of the traveling route for the shuttle carriage via the connection portion. 6. The storage system in a ceiling space according to claim 1 , further comprising a second OHT port; wherein the first OHT port is included in a first set of OHT ports; the second OHT port is included in a second set of OHT ports; and the second set of OHT ports is arranged in a ceiling space that is directly above a rear portion of one of the processing devices and between a first portion of the traveling route for the overhead traveling vehicles and the first portion of the traveling route for the shuttle carriage. 7. The storage system in a ceiling space according to claim 6 , wherein the buffers include at least two rows of buffers. 8. The storage system in a ceiling space according to claim 1 , wherein the buffers include at least two rows of buffers. 9. A storage method for goods in a ceiling space, in which a storage system in a ceiling space includes a traveling route for overhead traveling vehicles, a shuttle carriage configured to transport goods to and from the processing devices, a traveling route for the shuttle carriage that includes a first portion of the traveling route for the shuttle carriage and a second portion of the traveling route for the shuttle carriage that are connected via a connection portion such that the traveling route for the shuttle carriage is a U-shaped or substantially U-shaped traveling route, a first OHT port configured to enable the overhead traveling vehicles and the shuttle carriage to transport goods to and from the first OHT port, buffers that are provided in a ceiling space directly above the processing devices in an up-down direction such that the buffers overlap the processing devices in the up-down direction, the buffers being configured to enable placement of goods by the shuttle carriage, wherein the second portion of the traveling route for the shuttle carriage is configured to enable delivery and reception of goods by the shuttle carriage between the load port of the processing devices, the buffers, and the first OHT port, the first portion of the traveling route for the shuttle carriage, the second portion of the traveling route for the shuttle carriage, and the traveling route for the overhead traveling vehicles are arranged parallel or substantially parallel to each other and a row of the processing devices, the buffers are arranged between the first portion of the traveling route for the shuttle carriage and the second portion of the traveling route for the shuttle carriage, the first OHT port is arranged in a ceiling space between the traveling route for the overhead traveling vehicles and the second portion of the traveling route for the shuttle carriage, and the second portion of the traveling route for the shuttle carriage is arranged between the first OHT port and the buffers, the method comprising the steps of: transporting goods to and from the first OHT port using the overhead traveling vehicles; transporting goods between the first OHT port, the buffers, and the load port using the shuttle carriage; and storing goods in the buffers using the shuttle carriage.
Storage means · CPC title
Overhead conveying · CPC title
Wafer cassette · CPC title
with access from above · CPC title
Electricity · mapped topic
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