Chemical mechanical polishing composition for polishing a sapphire surface and methods of using same

Patent metadata

Field	Value
Publication number	US-9633831-B2
Application number	US-201313975890-A
Country	US
Kind code	B2
Filing date	Aug 26, 2013
Priority date	Aug 26, 2013
Publication date	Apr 25, 2017
Grant date	Apr 25, 2017

Abstract

A method of polishing a sapphire substrate is provided, comprising: providing a substrate having an exposed sapphire surface; providing a chemical mechanical polishing slurry, wherein the chemical mechanical polishing slurry comprises, as initial components: colloidal silica abrasive, wherein the colloidal silica abrasive has a negative surface charge; and, wherein the colloidal silica abrasive exhibits a multimodal particle size distribution with a first particle size maximum between 2 and 25 nm; and, a second particle size maximum between 75 and 200 nm; optionally, a biocide; optionally, a nonionic defoaming agent; and, optionally, a pH adjuster. A chemical mechanical polishing composition for polishing an exposed sapphire surface is also provided.

First claim

We claim:

1. A method of polishing a sapphire substrate, comprising:
providing a substrate having an exposed sapphire surface;
providing a chemical mechanical polishing slurry, wherein the chemical mechanical polishing slurry has a pH of 9 to 10 and wherein the chemical mechanical polishing slurry consists of:
deionized water; 10 to 30 wt % of a colloidal silica abrasive; wherein the colloidal silica abrasive has a negative surface charge; wherein the colloidal silica abrasive is a mixture of a first population of colloidal silica particles having an average particle size of 14 to 16 nm and a second population of colloidal silica particles having an average particle size of 95 to 105 nm; wherein the colloidal silica abrasive contains 1 to 25 wt % of the first population of colloidal silica particles;
0.0001 to 1 wt % of a biocide, wherein the biocide is hydrogen peroxide;
0.45 to 1.05 wt % of a nonionic defoaming agent, wherein the nonionic defoaming agent is a silicon based defoamer; and,
optionally, a pH adjuster;

providing a chemical mechanical polishing pad;
creating dynamic contact at an interface between the chemical mechanical polishing pad and the substrate; and
dispensing the chemical mechanical polishing slurry onto the chemical mechanical polishing pad at or near the interface between the chemical mechanical polishing pad and the substrate;
wherein at least some sapphire is removed from the exposed sapphire surface of the substrate and wherein the chemical mechanical polishing slurry exhibits a sapphire removal rate of ≧20,000 Å/hr with a platen speed of 120 revolutions per minute, a carrier speed of 120 revolutions per minute, a chemical mechanical polishing slurry flow rate of 400 ml/min, a nominal down force of 34.3 kPa on a 300 mm polishing machine; and, wherein the chemical mechanical polishing pad is a polyurethane impregnated non-woven polishing pad.

2. The method of polishing a sapphire substrate according to claim 1 , wherein the silicon based defoamer is a polydimethylsiloxane based defoamer.

Assignees

• Rohm & Haas Elect Materials Cmp Holdings Inc
• Nitta Haas Inc

Inventors

• Bulick Allen S
• Nishizawa Hideaki
• Moriyama Kazuki
• Yoshida Koichi
• Ezawa Shunji
• Arumugam Selvanathan

Classifications

• H10P90/123

  by grinding or lapping · CPC title

• H10P90/18

  by shaping · CPC title

• H10P14/2921

  being crystalline insulating materials · CPC title

• H10P90/126 Primary

  by chemical etching · CPC title

• H10P50/00

  Etching of wafers, substrates or parts of devices · CPC title