Angular velocity sensor with flexible parts providing different rigidities

Patent metadata

Field	Value
Publication number	US-9631927-B2
Application number	US-201414550838-A
Country	US
Kind code	B2
Filing date	Nov 21, 2014
Priority date	May 29, 2012
Publication date	Apr 25, 2017
Grant date	Apr 25, 2017

Abstract

Disclosed herein is an angular velocity sensor. The angular velocity sensor according to an embodiment of the present invention is configured to include a mass body, a first frame disposed at an outer side of the mass body so as to be spaced apart from the mass body, a first flexible part connecting the mass body to the first frame in an X-axis direction, a second flexible part connecting the mass body with the first frame in a Y-axis direction, a second frame disposed at an outer side of the first frame so as to be spaced apart from the first frame, a third flexible part connecting the first frame with the second frame in an X-axis direction, and a fourth flexible part connecting the first frame with the second frame in a Y-axis direction.

First claim

What is claimed is:

1. An angular velocity sensor, comprising:
a mass body;
a first frame disposed around the mass body;
a first flexible part connecting the mass body with the first frame in a first axis direction;
a second flexible part connecting the mass body with the first frame in a second axis direction that is orthogonal to the first axis direction;
a second frame disposed around the first frame;
a third flexible part connecting the first frame with the second frame in the first axis direction; and
a fourth flexible part connecting the first frame with the second frame in the second axis direction,
wherein the first flexible part and the second flexible part are respectively configured to provide a first rigidity resisting rotation of the mass body with respect to the first frame relative to the first axis direction, and to provide a second rigidity resisting rotation of the mass body with respect to the first frame relative to the second axis direction, respectively, the first rigidity being greater than the second rigidity, and
wherein the third flexible part and the fourth flexible part are respectively configured to provide a third rigidity resisting rotation of the first frame with respect to the second frame relative to the second axis direction, and to provide a fourth rigidity resisting rotation of the first frame with respect to the second frame relative to the first axis direction, respectively, the third rigidity being greater than the fourth rigidity.

2. The angular velocity sensor of claim 1 , wherein, in response to the mass body rotating with respect to the first frame relative to the second axis direction, bending stress is generated in the first flexible part and torsion stress is generated in the second flexible part.

3. The angular velocity sensor of claim 1 , wherein, in response to the first frame rotating with respect to the second frame relative to the first axis direction, torsion stress is generated in the third flexible part and bending stress is generated in the fourth flexible part.

4. The angular velocity sensor of claim 1 , wherein the second flexible part is disposed at a higher position than a center of gravity of the mass body based on a third axis direction that is orthogonal to the first axis direction and the second axis direction.

5. The angular velocity sensor of claim 1 , wherein the second flexible part is disposed at a position corresponding to a center of gravity of the mass body based on the second axis direction.

6. The angular velocity sensor as set forth in claim 1 , wherein the first flexible part connects two sides or one side of the mass body and the first frame with each other.

7. The angular velocity sensor of claim 1 , wherein the second flexible part connects two sides or one side of the mass body and the first frame with each other.

8. The angular velocity sensor of claim 1 , wherein the third flexible part connects two sides or one side of the first frame and the second frame with each other.

9. The angular velocity sensor of claim 1 , wherein the fourth flexible part connects two sides or one side of the first frame and the second frame with each other.

10. The angular velocity sensor of claim 1 , further comprising:
a sensing unit disposed in the first flexible part and configured to sense displacement of the mass body.

11. The angular velocity sensor of claim 10 , wherein the sensing unit is configured to sense a displacement generated when the mass body rotates relative to the second axis direction.

12. The angular velocity sensor of claim 1 , further comprising:
a driving unit disposed in the fourth flexible part and configured to drive the first frame.

13. The angular velocity sensor of claim 12 , wherein the driving unit is configured to be driven to rotate the first frame relative to the first axis direction.

14. The angular velocity sensor of claim 1 , wherein:
a width of the first flexible part in the second axis direction is larger than a thickness of the first flexible part in a third axis direction, the third axis direction being orthogonal to the first axis direction and the second axis direction;
a thickness of the second flexible part in the third axis direction is larger than a width of the second flexible part in the first axis direction;
a thickness of the third flexible part in the third axis direction is larger than a width of the third flexible part in the second axis direction; and
a width of the fourth flexible part in the first axis direction is larger than a thickness of the fourth flexible part in the third axis direction.

Assignees

• Samsung Electro Mech

Inventors

• Kim Jong Woon
• Lee Jung Won
• Shin Seung Joo
• Jeung Won Kyu

Classifications

• G01C19/16

  Suspensions; Bearings · CPC title

• G01C19/5705 Primary

  using masses driven in reciprocating rotary motion about an axis · CPC title

• G01P15/09 Primary

  by piezoelectric pick-up · CPC title