Method and manufacturing system

Patent metadata

Field	Value
Publication number	US-9630927-B2
Application number	US-201414157567-A
Country	US
Kind code	B2
Filing date	Jan 17, 2014
Priority date	Jan 17, 2014
Publication date	Apr 25, 2017
Grant date	Apr 25, 2017

Abstract

A method is provided. The method includes: assigning a buffer to a first wafer lot comprising a plurality of wafers according to a first trigger event associated with an equipment; and assigning a transporter to a second wafer lot comprising a plurality of wafers according to a second trigger event associated with the equipment.

First claim

What is claimed is:

1. A method performed by a controller of a wafer-manufacturing system, the method comprising:
receiving real-time data associated with processing, by a tool, a second wafer lot having at least two wafers that is in the tool;
in response to a trigger event, causing a first transporter to transport a first wafer lot from a first stocker to a buffer; and
in response to completion of the processing of the second wafer lot:
causing a second transporter to transfer the second wafer lot out of the tool, and
causing the first transporter to transfer the first wafer lot from the buffer to the tool;

wherein the trigger event is a first predetermined amount of time before the tool will start to process the last wafer in the second wafer lot, and
at a second predetermined amount of time before the completion of the processing of the second wafer lot, causing the second transporter to move to a position close to the tool to wait for the second wafer lot, wherein the first predetermined amount of time is different from the second predetermined amount of time.

2. The method of claim 1 , wherein the trigger event is the tool starting to process a last wafer in the second wafer lot.

3. The method of claim 1 , wherein the trigger event is a predetermined amount of time before the tool will start to process the last wafer in the second wafer lot.

4. The method of claim 1 , wherein the causing of the second transporter to transfer the second wafer lot out of the tool includes causing the second transporter to transfer the second wafer lot to a second stocker.

5. The method of claim 1 , wherein the predetermined amount of time is a first predetermined amount of time, and wherein the method further comprises:
at a second predetermined amount of time before the completion of the processing of the second wafer lot, causing the second transporter to move to a position close to the tool to wait for the second wafer lot.

6. The method of claim 1 , wherein each of the first and second transporters comprises an overhead hoist transporter, and the buffer comprises a near tool buffer, an overhead buffer, a mini stocker, or an active load port.

7. A method performed by a wafer-manufacturing system, the method comprising:
processing, by a tool, a second wafer lot that is in the tool;
in response to a trigger event, transferring by a first transporter a first wafer lot having at least two wafers from a first stocker to a buffer; and
in response to completion of the processing of the second wafer lot:
transferring, by a second transporter, the second wafer lot out of the tool; and
transferring, by the first transporter, the first wafer lot from the buffer to the tool;

wherein the trigger event is a first predetermined amount of time before the tool will start to process the last wafer in the second wafer lot; and
at a second predetermined amount of time before the completion of the processing of the second wafer lot, the second transporter moving to a position close to the tool to wait for the second wafer lot, wherein the first predetermined amount of time is different from the second predetermined amount of time.

8. The method of claim 7 , wherein the trigger event is the tool starting to process a last wafer in the second wafer lot.

9. The method of claim 7 , wherein the trigger event is a predetermined amount of time before the tool will start to process the last wafer in the second wafer lot.

10. The method of claim 7 , wherein the second transporter transferring the second wafer lot out of the tool includes the second transporter to transferring the second wafer lot to a second stocker.

11. The method of claim 7 , wherein the predetermined amount of time is a first predetermined amount of time, and wherein the method further comprises:
at a second predetermined amount of time before the completion of the processing of the second wafer lot, moving the second transporter to a position close to the tool to wait for the second wafer lot.

12. The method of claim 7 , wherein each of the first and second transporters comprises an overhead hoist transporter, and the buffer comprises a near tool buffer, an overhead buffer, a mini stocker, or an active load port.

13. A manufacturing system comprising:
a tool configured to process a second wafer lot having at least two wafers that is in the tool;
a buffer;
a first transporter;
a second transporter; and
a controller configured to:
in response to a trigger event, cause the first transporter to transport a first wafer lot from a first stocker to a buffer; and
in response to completion of the processing of the second wafer lot,
(i) cause the second transporter to transfer the second wafer lot out of the tool, and
(ii) cause the first transporter to transfer the first wafer lot from the buffer to the tool; wherein the trigger event is a first predetermined amount of time before the tool will start to process the last wafer in the second wafer lot; and

at a second predetermined amount of time before the completion of the processing of the second wafer lot, cause the second transporter to move to a position close to the tool to wait for the second wafer lot, wherein the first predetermined amount of time is different from the second predetermined amount of time.

14. The system of claim 13 , wherein the trigger event is the tool starting to process a last wafer in the second wafer lot.

15. The system of claim 13 , wherein the trigger event is a predetermined amount of time before the tool will start to process the last wafer in the second wafer lot.

16. The system of claim 13 , wherein the second transporter transferring the second wafer lot out of the tool includes the second transporter transferring the second wafer lot to a second stocker.

17. The system of claim 13 , wherein the predetermined amount of time is a first predetermined amount of time, and wherein the controller is configured to, at a second predetermined amount of time before the completion of the processing of the second wafer lot, cause the second transporter to move to a position close to the tool to wait for the second wafer lot.

18. The system of claim 13 , wherein each of the first and second transporters comprises an overhead hoist transporter, and the buffer comprises a near tool buffer, an overhead buffer, a mini stocker, or an active load port.

Assignees

• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Huang Wei-Pin
• Chien Wen-Chi
• Cheng bing-yuan
• Lee Feng-Ning
• Wang Wei-Cheng

Classifications

• C07D401/12

  linked by a chain containing hetero atoms as chain links · CPC title

• C07D417/14

  containing three or more hetero rings · CPC title

• C07D513/04

  Ortho-condensed systems · CPC title

• C07D417/12

  linked by a chain containing hetero atoms as chain links · CPC title

• C07D401/10

  linked by a carbon chain containing aromatic rings · CPC title