Lithographic method
US-2016147161-A1 · May 26, 2016 · US
US9629231B1 · US · B1
| Field | Value |
|---|---|
| Publication number | US-9629231-B1 |
| Application number | US-201615051782-A |
| Country | US |
| Kind code | B1 |
| Filing date | Feb 24, 2016 |
| Priority date | Feb 24, 2016 |
| Publication date | Apr 18, 2017 |
| Grant date | Apr 18, 2017 |
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A method for achieving independent control of multiple beams in close proximity to one another, such as in a multi-pass accelerator where coaxial beams are at different energies, but moving on a common axis, and need to be split into spatially separated beams for efficient recirculation transport. The method for independent control includes placing a magnet arrangement in the path of the barely separated beams with the magnet arrangement including at least two multipole magnets spaced closely together and having a multipole distribution including at least one odd multipole and one even multipole. The magnetic fields are then tuned to cancel out for a first of the barely separated beams to allow independent control of the second beam with common magnets. The magnetic fields may be tuned to cancel out either the dipole component or tuned to cancel out the quadrupole component in order to independently control the separate beams.
Opening claim text (preview).
What is claimed is: 1. A method of independently controlling multiple, barely separated beams in a common transport pipe, comprising: providing a magnet arrangement including at least two multipole magnets spaced closely together and having a multipole distribution including at least one odd multipole and one even multipole; placing the closely spaced multipole magnets in the path of the barely separated beams; and tuning the magnetic fields to cancel out a first of the barely separated beams to enable independent control of the second beam with common magnets. 2. The method of claim 1 further comprising tuning the magnetic fields to cancel out the dipole component. 3. The method of claim 1 further comprising tuning the magnetic fields to cancel out the quadrupole component.
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