Sensing circuit of a micro-electromechanical sensor
US-2024345125-A1 · Oct 17, 2024 · US
US9628920B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9628920-B2 |
| Application number | US-201414516306-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 16, 2014 |
| Priority date | Oct 16, 2014 |
| Publication date | Apr 18, 2017 |
| Grant date | Apr 18, 2017 |
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In accordance with an embodiment of the present invention, a method of operating a voltage generator includes providing a bypass switch to bypass a ripple filter coupled to a power converter. A coupling capacitor includes a first plate and a second plate. The first plate is coupled to a control node of the bypass switch. A bypass control signal is received. The control node of the bypass switch is toggled between a first voltage to a second voltage different from the first voltage by toggling the second plate of the coupling capacitor based on the bypass control signal.
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What is claimed is: 1. A method of operating a voltage generator comprising: providing a bypass switch to bypass a ripple filter coupled to a power converter; providing a coupling capacitor comprising a first plate and a second plate, the first plate coupled to a control node of the bypass switch; receiving a bypass control signal; toggling the control node of the bypass switch between a first voltage to a second voltage different from the first voltage by toggling the second plate of the coupling capacitor based on the bypass control signal; and providing a coupling transistor comprising a first input/output coupled to a first output of the power converter, and a control node coupled to a second output of the power converter, wherein the second output is a voltage from an intermediate node within the power converter, and wherein a difference between a voltage at the first output and the voltage at the second output is always less than or equal to a maximum voltage of the bypass control signal. 2. The method of claim 1 , wherein the second voltage is lower than the first voltage. 3. The method of claim 1 , wherein the second voltage is higher than the first voltage. 4. The method of claim 1 , wherein toggling the control node of the bypass switch comprises toggling the control node of the bypass switch from the first voltage to the second voltage if the bypass control signal indicates enabling the bypass switch. 5. The method of claim 1 , wherein toggling the control node of the bypass switch comprises switching the control node of the bypass switch to the first voltage if the bypass control signal indicates disabling the bypass switch. 6. The method of claim 1 , further comprising: charging a MEMS device coupled to an output of the ripple filter through the bypass switch. 7. The method of claim 6 , wherein after charging the MEMS device, receiving a bypass control signal indicating to disable the bypass switch, and setting the control node of the bypass switch to the first voltage. 8. The method of claim 1 , wherein the toggling the control node of the bypass switch from the first voltage to the second voltage turns on the bypass switch. 9. The method of claim 1 , wherein the coupling transistor further comprises a second input/output, wherein the second input/output is coupled to the first plate of the coupling capacitor. 10. The method of claim 9 , wherein the power converter comprises a multi-stage charge pump circuit, wherein the first output of the power converter is an output voltage of the multi-stage charge pump circuit, and wherein the second output of the power converter is an output voltage of an intermediate stage of the multi-stage charge pump circuit to a control node of the coupling transistor. 11. The method of claim 10 , wherein the multi-stage charge pump circuit comprises a plurality of n-wells and p-wells or n-wells and n-wells isolated by low doped regions of a substrate. 12. The method of claim 9 , wherein toggling the control node of the bypass switch comprises: applying the first voltage at the first input/output; and toggling the control node of the coupling transistor between the first voltage and the second voltage, wherein the control node of the coupling transistor is at the first voltage when the second plate is at a first voltage level, and wherein the control node of the coupling transistor is at the second voltage when the second plate is at a second voltage level. 13. The method of claim 1 , wherein the coupling capacitor comprises a metal capacitor. 14. The method of claim 13 , wherein the metal capacitor is a lateral capacitor, wherein the first plate and the second plate are part of a same metal level. 15. The method of claim 1 , further comprising: reading configuration bits stored in a non-volatile memory comprising eFuses before generating. 16. The method of claim 1 , wherein the bypass switch is configured to operate at low voltages. 17. A voltage generator comprising: a multi-stage charge pump circuit comprising a high voltage output node to output a high voltage, an intermediate voltage output node to output an intermediate voltage, and an input node to receive a standard voltage; a ripple filter coupled between the high voltage output node of the multi-stage charge pump circuit and an output node of the voltage generator; a bypass switch coupled to the ripple filter, the bypass switch coupled between the high voltage output node of the multi-stage charge pump circuit and the output node of the voltage generator; a coupling transistor comprising a first input/output coupled to the high voltage output node and a control node coupled to the intermediate voltage output node, wherein a difference between a voltage at the high voltage output node and the voltage at the intermediate voltage output node is always less than or equal to the standard voltage; and a capacitive coupling circuit to enable and disable the bypass switch, the capacitive coupling circuit being coupled to the multi-stage charge pump circuit in a high voltage regime, and configured to receive a bypass control signal in a low voltage regime. 18. The voltage generator of claim 17 , wherein the capacitive coupling circuit and the bypass switch comprise low voltage devices configured to operate at voltages less than 3.6V. 19. The voltage generator of claim 17 , wherein all components in the multi-stage charge pump circuit, the ripple filter, the bypass switch, and the capacitive coupling circuit are standard CMOS compatible standard voltage components. 20. The voltage generator of claim 17 , wherein the capacitive coupling circuit comprises a coupling capacitor coupled to a control node of the bypass switch. 21. The voltage generator of claim 20 , wherein the coupling capacitor comprises a metal capacitor. 22. The voltage generator of claim 21 , wherein the metal capacitor comprises a first metal line and a second metal line disposed in a same metallization level. 23. The voltage generator of claim 17 , wherein the multi-stage charge pump circuit comprises metal capacitors. 24. The voltage generator of claim 17 , wherein the multi-stage charge pump circuit comprises a Dickson charge pump. 25. The voltage generator of claim 17 , wherein the coupling transistor further comprises a second input/output coupled to a control node of the bypass switch; and a coupling capacitor coupled to the control node of the bypass switch. 26. The voltage generator of claim 25 , wherein the ripple filter, the bypass switch, and the coupling transistor comprise standard CMOS devices. 27. An electronic device comprising: a voltage generator configured to output a voltage higher than a supply voltage at an output node, wherein all devices in the voltage generator comprise standard CMOS devices, and wherein the voltage generator comprises a coupling transistor comprising an input/output node and a control node, a power converter circuit comprising a high voltage output node coupled to the input/output node and an intermediate voltage output node coupled to the control node, a bypass switch coupled between the high voltage output node of the power converter circuit and the output node of the voltage generator, and a capacitive coupling circuit comprising a coupling capacitor to enable and disable the bypass switch, the capacitive coupling circuit being coupled t
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