Nanoelectromechanical antifuse and related systems

Patent metadata

Field	Value
Publication number	US-9628086-B2
Application number	US-201414542343-A
Country	US
Kind code	B2
Filing date	Nov 14, 2014
Priority date	Nov 14, 2013
Publication date	Apr 18, 2017
Grant date	Apr 18, 2017

Abstract

An antifuse apparatus can include a cantilever extending from a first electrode portion to terminate in a distal end. A second electrode portion can be spaced apart from the cantilever by an air gap. In response to a program voltage across the first and second electrode portions, the cantilever can be adapted to move from an unprogrammed condition, corresponding to an open circuit condition where the cantilever is spaced apart from the second electrode portion, to at least one permanent programmed condition, corresponding to a short circuit condition between the first and second electrode portions where the cantilever engages the second electrode portion.

First claim

What is claimed is:

1. An antifuse apparatus comprising:
a cantilever extending from a first electrode portion to terminate in a distal end;
a second electrode portion spaced apart from the cantilever by an air gap;
a third electrode having a contact surface that is adjacent a surface of the second electrode portion; and
in response to a program voltage across the first and second electrode portions, the cantilever being adapted to move from an unprogrammed condition, corresponding to an open circuit condition where the cantilever is spaced apart from the second electrode portion, to at least one programmed condition, corresponding to a permanent short circuit condition between the first and second electrode portions where the cantilever engages the second electrode portion.

2. The apparatus of claim 1 , wherein the cantilever includes a surface facing a corresponding contact surface of the second electrode portion,
wherein, in the programmed condition, a substantial part of the surface of the cantilever proximal the distal end thereof contacts the facing surface of the second electrode portion to provide a contact area therebetween.

3. The apparatus of claim 2 , wherein the contact area between the surface of the cantilever and the contact surface of the second electrode portion adapted to create an adhesion force between the cantilever and the second electrode portion that exceeds a mechanical restoring force of the cantilever.

4. The apparatus of claim 1 , further comprising a fourth electrode portion opposite the second electrode portion, the cantilever extending between and spaced from respective surfaces of the second and fourth electrode portions, the cantilever being adapted to move from the unprogrammed condition, corresponding to the open circuit condition where the cantilever is spaced apart from each of the second and fourth electrode portions, to one of two permanent programmed conditions in which the cantilever engages a respective surface of one of the second and fourth electrode portions.

5. The apparatus of claim 1 , wherein the cantilever extends a length from the first electrode portion that is less than approximately 10 micrometers.

6. The apparatus of claim 1 , wherein the first electrode portion, the cantilever and the second electrode portion comprise silicon carbide.

7. The apparatus of claim 1 , further comprising a memory cell having a memory state according to the condition of the apparatus,
in the unprogrammed condition, the cantilever extends over and is spaced apart from the contact surface of the third electrode as well as the spaced apart from the second electrode portion, and
in the programmed condition, a portion of the cantilever contacts the second electrode portion and another portion of the cantilever contacts the third electrode.

8. The apparatus of claim 7 , wherein the program voltage is applied to the second electrode portion to program a state of the memory cell to a binary value corresponding to one of the programmed or unprogrammed conditions, the memory cell further comprising circuitry connected to the third electrode to apply a read voltage between the third and first electrodes to read the state of the memory cell.

9. A field programmable gate array device comprising:
an arrangement of logic blocks;
a matrix of interconnects extending between the logic blocks, at least some of the interconnects intersecting with each other interconnects in the matrix of interconnects to define intersections; and
the antifuse apparatus of claim 1 disposed at some of the intersections to provide a programmable connection depending on the state of the antifuse apparatus at each respective intersection.

10. The field programmable gate array device of claim 9 , wherein the logic blocks comprise at least one of buffers, register cells or combinatorial cells.

11. An antifuse apparatus comprising:
a cantilever extending from a first electrode portion to terminate in a distal end portion, wherein the distal end portion of the cantilever has a thickness that is greater than a thickness of the cantilever proximal the first electrode portion;
a second electrode portion spaced apart from the cantilever by an air gap; and
in response to a program voltage across the first and second electrode portions, the cantilever being adapted to move from an unprogrammed condition, corresponding to an open circuit condition where the cantilever is spaced apart from the second electrode portion, to at least one programmed condition, corresponding to a permanent short circuit condition between the first and second electrode portions where the cantilever engages the second electrode portion.

12. The apparatus of claim 11 , wherein the thickness of the distal end portion of the cantilever has a substantially constant thickness from a distal end of the cantilever to a location that is intermediate the distal end and the first electrode portion.

13. A system comprising:
an arrangement of logic blocks;
a matrix of interconnects extending between the logic blocks, at least some of the interconnects intersecting with each other interconnects in the matrix of interconnects to define intersections; and
a plurality of nanoelectromechanical antifuses at some of the intersections to provide a one-time programmable connection or open circuit between respective interconnects depending on the state of the respective nanoelectromechanical antifuse at each respective intersection, each nanoelectromechanical antifuse comprising:
a moveable cantilever; and
a plurality of electrodes each having a contact surface, wherein the one-time programmable connection corresponds to a programmed condition with a given surface of the cantilever contacting the contact surface of two adjacent electrodes of the plurality of electrodes.

14. The system of claim 13 , wherein the plurality of electrodes further comprises:
a source electrode coupled to a first potential, the cantilever extending from the source electrode to terminate in a distal end portion thereof;
a gate electrode coupled to receive a second potential, the gate electrode having a contact surface that is spaced apart from the cantilever by an air gap;
a drain electrode having a contact surface that is adjacent a surface of the gate electrode and spaced apart from the cantilever by a corresponding air gap; and
in response to a program voltage across the source and gate electrodes, the cantilever being adapted to move from an unprogrammed condition, corresponding to an open circuit condition where the cantilever is spaced apart from the gate electrode, to at least one programmed condition, corresponding to a permanent short circuit condition between the source and gate electrodes where the cantilever engages the contact surface of each of the gate electrode and the drain electrode.

15. The system of claim 14 , wherein the cantilever includes a surface facing the contact surface of the gate electrode,
wherein, in the programmed condition, a substantial part of the surface of the cantilever proximal a distal end thereof contacts the facing surface of the gate electrode,
wherein a contact area between the surface of the cantilever and the contact surface of the gate electrode in programmed condition is adapted to create an adhesion force between the cantilever and the gate electrode that exceeds a mechanical restoring force of the cantilever.

16. The system of claim 14 , wherein each nanoelectromechanical antifuse further comprises another gate electrode opposite the gate electrode with the cantilever extending between and spaced from respectiv

Assignees

• Univ Case Western Reserve

Inventors

• He Ting
• Zhang Fengchao
• Bhunia Swarup
• Feng Philip X -L

Classifications

• H10W90/754

  between a chip and a stacked insulating package substrate, interposer or RDL · CPC title

• H10W90/734

  between a chip and a stacked insulating package substrate, interposer or RDL · CPC title

• H10W74/00

  Encapsulations, e.g. protective coatings · CPC title

• H10W72/932

  Plan-view shape, i.e. in top view · CPC title

• H10W72/884

  Die-attach connectors and bond wires · CPC title