Transmission Line RF Applicator for Plasma Chamber
US-2015340204-A1 · Nov 26, 2015 · US
High-frequency signal line and method for producing base layer with signal line
US9627734B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9627734-B2 |
| Application number | US-201414531058-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 3, 2014 |
| Priority date | Jun 29, 2012 |
| Publication date | Apr 18, 2017 |
| Grant date | Apr 18, 2017 |
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- Title
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- Abstract
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Abstract
Official abstract text for this publication.
A high-frequency signal line includes a first base layer having flexibility, a linear signal line provided on the first base layer and including a first line portion having a first width and a second line portion having a second width greater than the first width, and a first reinforcing conductor provided on the first base layer along the first line portion.
First claim
Opening claim text (preview).
What is claimed is: 1. A high-frequency signal line, comprising: a first base layer having flexibility; a linear signal line provided on the first base layer and including a first line portion having a first width and a second line portion having a second width greater than the first width; and a first reinforcing conductor provided on the first base layer along the first line portion; wherein the first reinforcing conductor does not extend entirely along the second line portion. 2. The high-frequency signal line according to claim 1 , further comprising a first ground conductor positioned opposite to the signal line. 3. The high-frequency signal line according to claim 2 , wherein the first and second line portions are arranged so as to alternate with each other; and the first ground conductor includes a plurality of openings overlapping with the second line portions. 4. The high-frequency signal line according to claim 3 , wherein a shortest distance between the first line portion and the first reinforcing conductor is greater than a shortest distance between the first line portion and the first ground conductor. 5. The high-frequency signal line according to claim 2 , further comprising a second ground conductor provided on the other side from the first ground conductor with the signal line positioned therebetween and opposed to the second ground conductor. 6. The high-frequency signal line according to claim 1 , further comprising a second reinforcing conductor provided on the first base layer along the first line portion so as to be positioned on the other side from the first reinforcing conductor with the signal line positioned therebetween. 7. The high-frequency signal line according to claim 6 , wherein a total of the first width, a width of the first reinforcing conductor, and a width of the second reinforcing conductor is equal or approximately equal to the second width.
Assignees
Inventors
Classifications
Flexible materials (H05K1/038 takes precedence; specific organic compositions are classified in H05K1/0313 and subgroups) · CPC title
Single or multiple openings in a shielding, ground or power plane (H05K1/0227 takes precedence) · CPC title
- H01P3/085Primary
Triplate lines · CPC title
Via provided in pad; Pad over filled via · CPC title
Manufacturing lines with conductors on a substrate, e.g. strip lines, slot lines · CPC title
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Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US9627734B2 cover?
- A high-frequency signal line includes a first base layer having flexibility, a linear signal line provided on the first base layer and including a first line portion having a first width and a second line portion having a second width greater than the first width, and a first reinforcing conductor provided on the first base layer along the first line portion.
- Who is the assignee on this patent?
- Murata Manufacturing Co
- What technology area does this patent fall under?
- Primary CPC classification H01P3/085. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Apr 18 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).