Mask for forming layer, forming method of layer, and manufacturing method of organic light-emitting diode (oled) display using the same
US-2015132875-A1 · May 14, 2015 · US
Thin film forming apparatus and thin film forming method using the same
US9627619B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9627619-B2 |
| Application number | US-201514605965-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 26, 2015 |
| Priority date | Sep 3, 2014 |
| Publication date | Apr 18, 2017 |
| Grant date | Apr 18, 2017 |
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Abstract
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A thin film forming apparatus includes: a thin film source including a thin film on one surface of the thin film source to be transferred to a substrate; and a light emitter configured to apply light energy to the thin film source to transfer the thin film to the substrate.
First claim
Opening claim text (preview).
What is claimed is: 1. A method of forming a thin film, the method comprising: arranging a thin film source to face a substrate, the thin film source comprising a thin film on one surface of the thin film source; arranging a mask between the thin film source and the substrate; and transferring the thin film through an opening of the mask to the substrate by applying light energy to the thin film source. 2. A method of forming a thin film, the method comprising: arranging a thin film source to face a substrate, the thin film source comprising a thin film on one surface of the thin film source; interposing a mask between the substrate and the thin film source for patterning the thin film; and transferring the thin film to the substrate by applying light energy to the thin film source. 3. The method of claim 1 , further comprising pressing the thin film source toward the substrate by a transparent window. 4. The method of claim 1 , further comprising transferring the thin film to the substrate a plurality of times while moving the thin film source. 5. The method of claim 4 , wherein the thin film source comprises a roll, and the moving of the thin film source comprises releasing the roll at one end and winding the roll at another end. 6. The method of claim 4 , wherein the thin film source is movable in forward, backward, left, and right directions along a plane facing the substrate. 7. The method of claim 1 , wherein the thin film comprises material to from an organic light-emitting layer of an organic light-emitting display apparatus. 8. The method of claim 7 , wherein the transferring of the thin film to the substrate comprises forming the organic light-emitting layer of the organic light-emitting display apparatus.
Assignees
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Classifications
using masks · CPC title
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US9627619B2 cover?
- A thin film forming apparatus includes: a thin film source including a thin film on one surface of the thin film source to be transferred to a substrate; and a light emitter configured to apply light energy to the thin film source to transfer the thin film to the substrate.
- Who is the assignee on this patent?
- Samsung Display Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification H01L51/0013. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Apr 18 2017 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).