Extreme ultraviolet lithography collector contamination reduction

Patent metadata

Field	Value
Publication number	US-9625824-B2
Application number	US-201514803849-A
Country	US
Kind code	B2
Filing date	Jul 20, 2015
Priority date	Apr 30, 2015
Publication date	Apr 18, 2017
Grant date	Apr 18, 2017

Abstract

An extreme ultraviolet (EUV) radiation source module includes a target droplet generator, a first laser source, and a second laser source. The target droplet generator is configured to generate a plurality of target droplets. The first laser source is configured to generate a plurality of first laser pulses that heat the target droplets at respective excitation positions thereby generating a plurality of target plumes. At least one of the target droplets is heated at an excitation position different from that of other target droplets. The second laser source is configured to generate a plurality of second laser pulses that heat the target plumes thereby generating plasma emitting EUV radiation.

First claim

What is claimed is:

1. An extreme ultraviolet (EUV) radiation source module, comprising:
a target droplet generator configured to generate a plurality of target droplets;
a first laser source configured to generate a plurality of first laser pulses that heat the target droplets thereby generating a plurality of target plumes corresponding to the target droplets respectively, wherein at least one of the target droplets is heated at an excitation position different from that of other target droplets such that its corresponding target plume has a different orientation than other target plumes; and
a second laser source configured to generate a plurality of second laser pulses that heat the target plumes thereby generating plasma emitting EUV radiation.

2. The EUV radiation source module of claim 1 , further comprising:
a collector configured to collect and reflect the EUV radiation.

3. The EUV radiation source module of claim 1 , wherein:
the target droplet generator is configured to generate the target droplets one at a time with a same delay between two contiguous target droplets; and
the first laser source is configured to generate the first laser pulses one at a time with generally the same delay between two first laser pulses, wherein at least one of the first laser pulses is generated earlier in timing than other first laser pulses.

4. The EUV radiation source module of claim 1 , wherein:
the target droplet generator is configured to generate the target droplets one at a time with a same delay between two contiguous target droplets; and
the first laser source is configured to generate the first laser pulses one at a time with generally the same delay between two first laser pulses, wherein at least one of the first laser pulses is generated later in timing than other first laser pulses.

5. The EUV radiation source module of claim 1 , wherein the first and second laser sources are synchronized such that there is a fixed time delay between each of the first laser pulses and a corresponding one of the second laser pulses.

6. The EUV radiation source module of claim 1 , wherein the first and second laser sources are configured such that at least one of the target droplets is not heated by either the first or the second laser pulses.

7. The EUV radiation source module of claim 1 , wherein the target droplets include tin (Sn).

8. The EUV radiation source module of claim 1 , wherein a driving power of the first laser pulse and the second laser pulse is at least 20 kW.

9. The EUV radiation source module of claim 1 , wherein at least one of the first and the second laser pulses is CO 2 laser.

10. An EUV lithography system comprising:
a radiation source, wherein the radiation source includes:
a target droplet generator configured to generate a plurality of target droplets;
a first laser source configured to generate a plurality of first laser pulses that heat the target droplets thereby generating a plurality of target plumes corresponding to the target droplets respectively, wherein at least one of the target plumes has a different orientation than other target plumes;
a second laser source configured to generate a plurality of second laser pulses that heat the target plumes thereby generating plasma emitting EUV radiation; and
a collector configured to collect and reflect the EUV radiation;

a mask stage configured to secure an EUV mask;
a wafer stage configured to secure a semiconductor wafer; and
an optical module designed to direct the EUV radiation from the radiation source to image an integrated circuit (IC) pattern defined on the EUV mask to the semiconductor wafer.

11. The EUV lithography system of claim 10 , wherein the radiation source is configured such that generation of the target droplets and the first laser pulses are synchronized except that at least one of the first laser pulses is generated at timing different from other first laser pulses relative to their corresponding target droplets.

12. The EUV lithography system of claim 11 , wherein the at least one of the first laser pulses is generated earlier than other first laser pulses relative to their corresponding target droplets.

13. The EUV lithography system of claim 11 , wherein the at least one of the first laser pulses is generated later than other first laser pulses relative to their corresponding target droplets.

14. The EUV lithography system of claim 10 , wherein the first and second laser sources are synchronized such that there is a fixed time delay between each of the first laser pulses and a corresponding one of the second laser pulses.

15. The EUV lithography system of claim 10 , wherein the target droplets include tin (Sn) or tin containing material.

16. The EUV lithography system of claim 10 , wherein at least one of the first and second laser pulses is CO 2 laser.

17. The EUV lithography system of claim 10 , further comprising:
a gas supply configured to introduce hydrogen gas into a space proximate a reflective surface of the collector.

18. An extreme ultraviolet (EUV) lithography process for patterning a target, comprising:
loading a semiconductor wafer to an EUV lithography system that includes:
a radiation source that includes:
a target droplet generator configured to generate a plurality of target droplets;
a first laser source configured to generate a plurality of first laser pulses that heat the target droplets thereby generating a plurality of target plumes;
a second laser source configured to generate a plurality of second laser pulses that heat the target plumes thereby generating a plasma emitting EUV radiation; and
a collector configured to collect and reflect the EUV radiation;

a mask stage holding an EUV mask;
a wafer stage configured to secure the semiconductor wafer; and
an optical module designed to direct the EUV radiation from the radiation source to image an IC pattern defined on the EUV mask to the semiconductor wafer;

programming the radiation source such that generation of the target droplets and first laser pulses are synchronized except that at least one of the first laser pulses is generated at timing different from other first laser pulses relative to their corresponding target droplets; and
exposing the semiconductor wafer by the EUV radiation.

19. The EUV lithography process of claim 18 , further comprising:
programming the radiation source such that generation of the first and second laser pulses are synchronized.

20. The EUV lithography process of claim 18 , further comprising:
introducing a hydrogen gas flow into a space proximate a reflective surface of the collector.

Assignees

• Taiwan Semiconductor Mfg Co Ltd
• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Lu Yen-Cheng
• Chen Jeng-Horng
• Wu Shun-Der
• Chen Tzu-Hsiang

Classifications

• H05G2/0088

  for preconditioning the plasma generating material · CPC title

• H05G2/0084

  Control of the laser beam · CPC title

• H05G2/0035

  the material containing metals as principal radiation-generating components · CPC title

• H05G2/009

  Auxiliary arrangements not involved in the plasma generation · CPC title

• G03F7/70033 Primary

  by plasma extreme ultraviolet [EUV] sources · CPC title