Photolithography on shrink film

Patent metadata

Field	Value
Publication number	US-9625819-B2
Application number	US-201213481653-A
Country	US
Kind code	B2
Filing date	May 25, 2012
Priority date	May 27, 2011
Publication date	Apr 18, 2017
Grant date	Apr 18, 2017

Abstract

Provided are methods of preparing a plurality of extrusions, comprising (a) shrinking a transparent first thermoplastic material comprising a plurality of non-transparent marks, (b) lithographically transferring the pattern of the shrunk non-transparent marks to a layer of photoresist deposited on a second thermoplastic material, and (c) shrinking the second thermoplastic material, thereby generating a plurality of extrusions on the shrunk second thermoplastic material.

First claim

What is claimed is:

1. A method for preparing a plurality of extrusions, comprising (a) shrinking a transparent first thermoplastic material comprising a plurality of non-transparent marks, (b) lithographically transferring the pattern of the shrunk non-transparent marks to a layer of photoresist deposited on a second thermoplastic material, and (c) shrinking the second thermoplastic material, thereby generating a plurality of extrusions on the shrunk second thermoplastic material, wherein the second thermoplastic material shrinks by at least about 70% from its original size.

2. The method of claim 1 , wherein the first and/or the second thermoplastic material is pre-stressed prior to being shrunk and the shrinking comprises removing the stress.

3. The method of claim 1 , wherein the shrinking of (a) and/or (c) comprises heating the material.

4. The method of claim 1 , wherein the shrinking of (a) and/or (c) is uniaxial or biaxial.

5. The method of claim 1 , wherein the first thermoplastic material is shrunk by at least 60%.

6. The method of claim 1 , wherein the second thermoplastic material is shrunk by at least 60%.

7. The method of claim 1 , wherein the marks are of a round shape or an oval shape.

8. The method of claim 7 , wherein the marks have a round shape and a diameter and the extrusions are smaller than about 5% of the diameter of the marks.

9. The method of claim 7 , wherein the marks have a round shape and a diameter and the extrusions are smaller than about 1% of the diameter of the marks.

10. The method of claim 1 , wherein the first and/or second thermoplastic material comprises a high molecular weight polymer, polyolefin, a shape memory polymer, acrylonitrile butadiene styrene (ABS), acrylic, celluloid, cellulose acetate,ethylene-vinyl acetate (EVA), ethylene vinyl alcohol (EVAL), fluoroplastics (PTFEs, including FEP, PFA, CTFE, ECTFE, ETFE), ionomers kydex, a trademarked acrylic/PVC alloy, liquid crystal polymer (LCP), polyacetal (POM or Acetal), polyacrylates (Acrylic), polyacrylonitrile (PAN or Acrylonitrile), polyamide (PA or Nylon), polyamide-imide (PAI), polyaryletherketone (PAEK or Ketone), polybutadiene (PBD), polybutylene (PB), polybutylene terephthalate (PBT), polyethylene terephthalate (PET), Polycyclohexylene Dimethylene Terephthalate (PCT), polycarbonate (PC), polyhydroxyalkanoates (PHAs), polyketone (PK), polyester, polyethylene (PE), polyetheretherketone (PEEK), polyetherimide (PEI), polyethersulfone (PES), polysulfone polyethylenechlorinates (PEC), polyimide (PI), polylactic acid (PLA), polymethylpentene (PMP), polyphenylene oxide (PPO), polyphenylene sulfide (PPS), polyphthalamide (PPA), polypropylene (PP), polystyrene (PS), polysulfone (PSU), polyvinyl chloride (PVC), polyvinylidene chloride (PVDC) or spectralon.

Assignees

• Khine Michelle
• Jayadev Shreshta
• Univ California

Inventors

• Khine Michelle
• Jayadev Shreshta

Classifications

• Y10T428/24479

  including variation in thickness · CPC title

• G03F7/20 Primary

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title

• G03F7/0005 Primary

  Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor · CPC title