Contact probe pin

Patent metadata

Field	Value
Publication number	US-9625492-B2
Application number	US-201113883698-A
Country	US
Kind code	B2
Filing date	Nov 16, 2011
Priority date	Nov 19, 2010
Publication date	Apr 18, 2017
Grant date	Apr 18, 2017

Abstract

The present invention provides a contact probe pin in which a carbon film having both of conductivity and durability is formed on a base material with a tip divided, wherein Sn adherence can be reduced as much as possible to be able to maintain stable electrical contact over a long period of time, even under such circumstances that the temperature of a usage environment becomes high. The present invention relates to a contact probe pin, including a tip divided into 2 or more projections and repeatedly coming into contact with a test surface at the projection, wherein a carbon film containing a metal element is formed at least on a surface of the projection, and a radius of curvature at an apex part of the projection is 30 μm or more.

First claim

The invention claimed is:

1. A method for measuring electrical property of a semiconductor element, the method comprising:
contacting a contact probe pin with a test surface of the semiconductor element,
wherein
the contact probe pin comprises a tip divided into two or more projections each having an apex part with an apical radius of curvature of 30 μm or more and 100 μm or less,
at least a surface of each said projection is coated with a film comprising carbon and a metal element, and
a contact angle between contacted surfaces is 45° or less when said contacting between the apex part of each projection and the test surface occurs while a load of from 5 to 40 g is applied.

2. The method of claim 1 , wherein said contacting occurs at a temperature of at least 85° C.

3. The method of claim 1 , wherein said contacting occurs at a temperature of at least 90° C.

4. The method of claim 1 , wherein said contacting occurs at a temperature of 130° C.

5. The method of claim 1 , wherein the test surface comprises Sn.

6. The method of claim 1 , wherein the tip is divided into three projections.

7. The method of claim 1 , wherein the tip is divided into four to eight projections.

8. The method of claim 1 , wherein the apical radius of curvature is from 30 μm to 50 μm.

9. The method of claim 1 , wherein the apical radius of curvature is from 50 μm to 100 μm.

10. The method of claim 1 , wherein said film has a metal content ranging from 5 to 30 atomic %.

11. The method of claim 1 , wherein the metal element is at least one selected from the group consisting of W, Ta, Mo, Nb, Ti and Cr.

12. The method of claim 1 , wherein said film comprises an elemental metal mixed with carbon.

13. The method of claim 1 , wherein said film comprises a metal carbide.

14. The method of claim 1 , wherein said film comprises tungsten or tungsten carbide.

15. The method of claim 1 , wherein said film is at east 0.1 μm thick.

16. The method of claim 1 , wherein said film has a thickness of from 0.1 μm to 5 μm.

Assignees

• Hirano Takayuki
• Kobori Takashi
• Kobe Steel Ltd
• Kobelco Res Inst Inc

Inventors

• Hirano Takayuki
• Kobori Takashi

Classifications

• G01R1/06761

  related to layers · CPC title

• H01R13/03

  characterised by the material, e.g. plating, or coating materials · CPC title

• G01R1/06738 Primary

  related to tip portion · CPC title

• G01R1/067 Primary

  Measuring probes · CPC title