Platform unit for combined sensing of pressure, temperature and humidity

Patent metadata

Field	Value
Publication number	US-9625341-B2
Application number	US-201314387838-A
Country	US
Kind code	B2
Filing date	Mar 21, 2013
Priority date	Mar 26, 2012
Publication date	Apr 18, 2017
Grant date	Apr 18, 2017

Abstract

The present invention provides a modular platform unit comprising a plurality of sensors for the combined sensing of pressure, temperature and humidity. In particular, the sensors are composed of a layer of metallic-capped nanoparticles (MCNP) casted on a flexible substrate or a rigid substrate. Integration of the platform unit for artificial or electronic skin applications is disclosed.

First claim

The invention claimed is:

1. A platform unit for detecting a parameter selected from the group consisting of pressure, temperature, humidity and a combination thereof, the platform unit comprising at least three sensors comprising metallic nanoparticles capped with an organic coating, wherein the three sensors comprise:
a pressure sensor being deposited on a substantially flexible substrate, wherein the pressure sensor is configured to sense pressure applied thereon and to generate an electrical signal in response thereto,
a temperature sensor configured to exhibit a change in conformation of the metallic nanoparticles capped with an organic coating in response to a change in temperature and generate an electrical signal in response thereto, and
a humidity sensor configured to exhibit a change in conformation of the metallic nanoparticles capped with an organic coating in response to a change in humidity and generate an electrical signal in response thereto,
thereby providing the detection of pressure, temperature, humidity or their combination.

2. The platform unit according to claim 1 further comprising a plurality of electrodes comprising an electrically conductive material, wherein the plurality of electrodes are coupled to each sensor and are used for measuring the signals generated by the sensors.

3. The platform unit according to claim 1 further comprising a detection means comprising a device for measuring changes in at least one of resistance, conductance, alternating current (AC), frequency, capacitance, impedance, inductance, mobility, electrical potential, optical property or voltage threshold.

4. The platform unit according to claim 1 , wherein each sensor is configured in a form selected from the group consisting of a capacitive sensor, a resistive sensor, a chemiresistive sensor, an impedance sensor, and a field effect transistor sensor.

5. The platform unit according to claim 1 further comprising a film, wherein the film is configured to block at least one sensor from generating a signal in response to a change in humidity.

6. The platform unit according to claim 5 , wherein the film is characterized by a thickness ranging from about 1 μm to about 1000 μm.

7. The platform unit according to claim 5 , wherein the film is selected from the group consisting of an epoxy resin, a silicon resin, a polyamide resin, a polyimide resin, a poly(p-xylylene) resin and a combination thereof.

8. The platform unit according to claim 1 , wherein the substantially flexible substrate is characterized by widths in the range of about 0.01-10 cm and thicknesses in the range of about 20-500 μm.

9. The platform unit according to claim 1 , wherein the substantially flexible substrate comprises a polymer.

10. The platform unit according to claim 9 , wherein the polymer is selected from the group consisting of polyimide, polyamide, polyimine, polyethylene, polyester, polydimethylsiloxane, polyvinyl chloride, and polystyrene.

11. The platform unit according to claim 1 , wherein the temperature or humidity sensor is deposited on a substantially flexible or substantially rigid substrate.

12. The platform unit according to claim 1 , wherein i) the temperature sensor is deposited on a substantially rigid substrate, or ii) wherein the humidity sensor is deposited on a substantially rigid substrate.

13. The platform unit according to claim 12 , wherein the substantially rigid substrate is selected from the group consisting of metals, insulators, semiconductors, semimetals, and combinations thereof.

14. The platform unit according to claim 1 , wherein the metallic nanoparticles are selected from the group consisting of Au, Ag, Ni, Co, Pt, Pd, Cu, Al, and combinations thereof or wherein the metallic nanoparticles are metallic alloys selected from the group consisting of Au/Ag, Au/Cu, Au/Ag/Cu, Au/Pt, Au/Pd, Au/Ag/Cu/Pd, Pt/Rh, Ni/Co, and Pt/Ni/Fe.

15. The platform unit according to claim 1 , wherein the organic coating comprises compounds selected from the group consisting of alkylthiols, arylthiols, alkylarylthiols, alkylthiolates, ω-functionalized alkanethiolates, arenethiolates, (γ-mercaptopropyl)tri-methyloxysilane, dialkyl disulfides and combinations and derivatives thereof.

16. The platform unit according to claim 1 , wherein the humidity sensor comprises continuous and discontinuous regions of metallic nanoparticles capped with an organic coating.

17. The platform unit according to claim 16 , wherein the discontinuous regions comprise voids ranging in size from about 10 nm to about 500 nm.

18. The platform unit according to claim 17 , wherein the discontinuous regions comprise between about 3% and about 90% voids.

19. The platform unit according to claim 1 , integrated on electronic or artificial skin surface.

Assignees

• Technion Res & Dev Foundation

Inventors

• Haick Hossam
• Shuster Gregory
• Segev-Bar Meital
• Kloper Victoria
• Gliksman Sagi

Classifications

• G01L19/0092 Primary

  Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature (G01L9/025, G01L9/045, G01L9/065, G01L9/085, G01L9/105, G01L9/125, G01L19/02, G01L19/04 take precedence; measuring two or more variable G01D21/02; temperature sensors with pressure compensation G01K1/26) · CPC title

• B82Y15/00 Primary

  Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors · CPC title

• G01K2211/00

  Thermometers based on nanotechnology · CPC title

• Y10S977/953

  Detector using nanostructure · CPC title

• G01N27/121

  for determining moisture content, e.g. humidity, of the fluid (moisture content of the tested material G01N27/048) · CPC title