Flow control valve for flow controller

Patent metadata

Field	Value
Publication number	US-9625047-B2
Application number	US-201414780393-A
Country	US
Kind code	B2
Filing date	Mar 17, 2014
Priority date	Mar 26, 2013
Publication date	Apr 18, 2017
Grant date	Apr 18, 2017

Abstract

A flow control valve for a flow controller includes a valve main body provided with an open-top valve chamber hole, a metal diaphragm valve element, a lower support cylinder having notches facing each other, an upper support cylinder attached to the lower support cylinder, a support frame horizontally disposed through the notches of the lower support cylinder, a disc spring placed between the support frame and a bottom of the lower support cylinder, a lower cradle placed on the support frame, a piezoelectric element inserted into the support cylinder above the lower cradle, a guide fixed to the valve main body together with the support frame with the support cylinder being inserted through the guide cylinder in a vertically movable manner. The support cylinder is pressed upward by the extension of the piezoelectric element, whereby the metal diaphragm valve element is separated from the valve seat by the elastic force.

First claim

The invention claimed is:

1. A flow control valve for a flow controller, comprising:
a valve main body provided with an open-top valve chamber hole having a valve seat on a bottom, a fluid inlet passage communicating with the valve chamber hole, and a fluid outlet passage communicating with the valve chamber hole;
a metal diaphragm valve element in an inverted dish shape disposed above the valve seat to face the valve seat, with an outer periphery being hermetically fixed to the bottom of the valve chamber hole;
a pressing screw screwed and inserted into the valve chamber hole to press and fix the outer periphery of the metal diaphragm valve element;
a lower support cylinder inserted through the pressing screw into the valve chamber hole, provided with a diaphragm presser below a bottom wall at a tip portion, and also having, on a side wall, rectangular through notches extending from an upper end of the side wall to an intermediate portion of the side wall;
an upper support cylinder in a cylindrical shape screwed and attached to an upper end portion of the lower support cylinder to form a support cylinder;
a disc spring cradle placed on a bottom wall of the lower support cylinder and having a disc spring holder;
a disc spring placed on the disc spring cradle;
a support frame horizontally disposed through the notches of the lower support cylinder, having a disc spring cradle guide hole in the center for holding a tip portion of the disc spring holder, and also having, at each end portion, a bolt insertion hole for a fixing bolt;
a lower cradle placed above the disc spring cradle guide hole of the support frame;
a piezoelectric element inserted into the support cylinder above the lower cradle;
a guide provided with a guide cylinder and a flange projecting from a lower end portion of the guide cylinder toward both sides, and fixed to the valve main body together with the support frame by a fixing bolt with the support cylinder being inserted through the guide cylinder in a vertically movable manner and the flange facing each end portion of the support frame; and
a positioning nut screwed and attached to an upper end portion of the upper support cylinder, wherein
the flow control valve for a flow controller is configured such that the support cylinder is pushed upward by the extension of the piezoelectric element, whereby the metal diaphragm valve element is separated from the valve seat by the elastic force of the metal diaphragm valve element.

2. The flow control valve for a flow controller according to claim 1 , wherein a thread is provided on an outer peripheral surface of an upper end portion of the lower support cylinder, while a thread is provided on an inner peripheral surface of a lower end portion of the upper support cylinder, and the two threads are screwed together to connect the two support cylinders to form the support cylinder.

3. The flow control valve for a flow controller according to claim 1 , wherein a connection between the lower support cylinder and the upper support cylinder screwed and attached together is locked by a locking screw that is screwed and attached to an inner peripheral surface of the upper support cylinder.

4. The flow control valve for a flow controller according to claim 1 , wherein a ball is interposed between an upper end surface of the lower cradle and a lower end surface of the piezoelectric element.

5. The flow control valve for a flow controller according to claim 1 , wherein a bearing is interposed between an upper end surface of the piezoelectric element and the positioning nut.

6. The flow control valve for a flow controller according to claim 1 , wherein an O-ring is interposed between an inner peripheral surface of the guide and an outer peripheral surface of the support cylinder.

7. The flow control valve for a flow controller according to claim 1 , wherein an insertion groove for the support frame is provided at a lower side of the flange of the guide.

8. A flow control valve for a flow controller, comprising:
a valve main body provided with two open-top valve chamber holes placed side by side and each having a valve seat on a bottom, a fluid inlet passage communicating with each valve chamber hole, and a fluid outlet passage communicating with each valve chamber hole;
a metal diaphragm valve element in an inverted dish shape disposed above each valve seat to face the valve seat, with an outer periphery thereof being hermetically fixed to the bottom of the valve chamber hole;
a pressing screw screwed and inserted into each valve chamber hole to press and fix the outer periphery of the metal diaphragm valve element;
a lower support cylinder inserted through each pressing screw into the valve chamber hole, provided with a diaphragm presser below a bottom wall at a tip portion thereof, and also having, on a side wall, rectangular through notches extending from an upper end of the side wall to an intermediate portion of the side wall;
an upper support cylinder in a cylindrical shape screwed and attached to an upper end portion of each lower support cylinder to form a support cylinder;
a disc spring cradle placed on a bottom wall of each lower support cylinder and having a disc spring holder;
a disc spring placed on each disc spring cradle;
a support frame horizontally disposed through the notches of the two lower support cylinders, having two disc spring cradle guide holes with a space in between for holding tip portions of the respective disc spring holders, and also having, at each end portion thereof, a bolt insertion hole for a fixing bolt;
a lower cradle placed above each disc spring cradle guide hole of the support frame;
a piezoelectric element inserted into the support cylinder above each lower cradle;
a guide for dual application provided with two guide cylinders and a flange projecting outward from a lower end portion of each guide cylinder, and fixed to the valve main body together with the support frame by a fixing bolt with each support cylinder being inserted through each guide cylinder in a vertically movable manner and the flange facing each end portion of the support frame; and
a positioning nut screwed and attached to an upper end portion of each upper support cylinder, wherein
the flow control valve for a flow controller is configured such that each support cylinder is pushed upward by the extension of each piezoelectric element, whereby the metal diaphragm valve element is separated from the valve seat by the elastic force of the metal diaphragm valve element.

9. The flow control valve for a flow controller according to claim 2 , wherein a thread is provided on an outer peripheral surface of an upper end portion of the lower support cylinder, while a thread is provided on an inner peripheral surface of a lower end portion of the upper support cylinder, and the two threads are screwed together to connect the two support cylinders to form the support cylinder.

10. The flow control valve for a flow controller according to claim 2 , wherein a connection between the lower support cylinder and the upper support cylinder screwed and attached together is locked by a locking screw that is screwed and attached to an inner peripheral surface of the upper support cylinder.

11. The flow control valve for a flow controller according to claim 2 , wherein a ball is interposed between an upper end surface of the lower cradle and a lower end surface of the piezoelectric element.

12. The flow control valve for a flow controller according to claim 2 , wherein a bearing is interposed between an upper end surface of the piezoelectric element and the positioning nut.

13. The flow control valve

Assignees

• Fujikin Kk

Inventors

• Hirose Takashi
• Yamaji Michio
• Yoshida Toshihide
• Shigyou Kohei

Classifications

• F16K25/005

  Particular materials for seats or closure elements · CPC title

• F16K27/0236

  Diaphragm cut-off apparatus · CPC title

• F16K31/004 Primary

  actuated by piezoelectric means · CPC title

• F16K7/14 Primary

  arranged to be deformed against a flat seat · CPC title

• F16K31/007

  Piezoelectric stacks · CPC title