Electromechanical devices and methods for fabrication of the same

Patent metadata

Field	Value
Publication number	US-9624098-B2
Application number	US-201514809934-A
Country	US
Kind code	B2
Filing date	Jul 27, 2015
Priority date	Dec 1, 2008
Publication date	Apr 18, 2017
Grant date	Apr 18, 2017

Abstract

A fabricated electromechanical device is disclosed herein. An exemplary device includes, a substrate, at least one layer of a high-transconductance material separated from the substrate by a dielectric medium, a first electrode in electrical contact with the at least one layer of a high-transconductance material and separated from the substrate by at least one first supporting member, a second electrode in electrical contact with the layer of a high-transconductance material and separated from the substrate by at least one second supporting member, where the first electrode is electrically separate from the second electrode, and a third electrode separated from the at least one layer of high-transconductance material by a dielectric medium and separated from each of the first electrode and the second electrode by a dielectric medium.

First claim

The invention claimed is:

1. A method for fabricating an electromechanical device comprising:
depositing a first layer of etchable material on a substrate;
depositing at least one layer of graphene on the etchable material;
depositing a first electrode on the etchable material such that at least a first portion of the at least one layer of graphene is covered by the first electrode and at least a portion of the first electrode is directly in contact with the etchable material;
depositing a second electrode on the etchable material such that at least a second portion of the at least one layer of graphene is covered by the second electrode and at least a portion of the second electrode is directly in contact with the etchable material; and
exposing the etchable material to an etchant to remove the etchable material around the first and second electrodes and underneath the at least one layer of graphene, thereby fabricating a device having the at least one layer of graphene suspended above the substrate.

2. The method of claim 1 , further comprising depositing a third electrode on the substrate.

3. The method of claim 2 , wherein depositing the third electrode on the substrate comprises depositing the third electrode on the first layer of etchable material.

4. The method of claim 1 , further comprising depositing a second layer of etchable material on the substrate.

5. The method of claim 4 , further comprising:
depositing a third electrode on the first layer of etchable material,
wherein depositing the second layer of etchable material on the substrate comprises depositing the second layer of etchable material on the first layer of etchable material,
wherein depositing the at least one layer of graphene on the etchable material comprises depositing the at least one layer of graphene on the second layer of etchable material,
wherein depositing the first electrode on the etchable material comprises depositing the first electrode on the second layer of etchable material, and
wherein depositing the second electrode on the etchable material comprises depositing the second electrode on the second layer of etchable material.

6. The method of claim 4 , further comprising:
depositing a third electrode on the second layer of etchable material,
wherein depositing the at least one layer of graphene on the etchable material comprises depositing the at least one layer of graphene on the first layer of etchable material,
wherein depositing the first electrode on the etchable material comprises depositing the first electrode on the first layer of etchable material,
wherein depositing the second electrode on the etchable material comprises depositing the second electrode on the first layer of etchable material, and
wherein depositing the second layer of etchable material on the substrate comprises depositing the second layer of etchable material on the first layer of etchable material.

7. The method of claim 1 , further comprising patterning the at least one layer of graphene.

8. The method of claim 7 , wherein patterning the at least one layer of graphene comprises utilizing lithography to pattern the deposited layer.

9. The method of claim 7 , wherein patterning the at least one layer of graphene comprises utilizing oxygen plasma etching to pattern the at least one layer of graphene.

10. The method of claim 1 , wherein exposing the etchable material to an etchant comprises acid vapor phase etching the etchable material.

11. The method of claim 1 , wherein exposing the etchable material to an etchant comprises exposing the etchable material to a buffered oxide etchant.

12. A method for fabricating an electromechanical device comprising:
depositing a first layer of etchable material on a substrate;
depositing a first electrode on the etchable material;
depositing a second electrode on the etchable material;
exposing the etchable material to an etchant to remove the etchable material around the first electrode and the second electrode;
depositing at least one layer of graphene to span the first electrode and the second electrode such that at least a first portion of the graphene is in contact with the first electrode and at least a second portion of the graphene is in contact with the second electrode; and
forming a third electrode separated from the at least one layer of graphene and separated from each of the first electrode and the second electrode;
wherein, when a voltage is applied to at least one of the first electrode and the second electrode within a range of resonance frequency of the at least one layer of graphene, the at least one layer of graphene provides a self-sustaining oscillating signal to the third electrode.

13. The method of claim 12 , further comprising depositing a second layer of etchable material on the substrate.

14. The method of claim 13 ,
wherein forming the third electrode comprises depositing the third electrode on the first layer of etchable material,
wherein depositing the second layer of etchable material on the substrate comprises depositing the second layer of etchable material on the first layer of etchable material,
wherein depositing the first electrode on the etchable material comprises depositing the first electrode on the second layer of etchable material, and
wherein depositing the second electrode on the etchable material comprises depositing the second electrode on the second layer of etchable material.

15. The method of claim 12 , wherein forming the third electrode comprises depositing the third electrode on a surface of the substrate.

16. The method of claim 12 , wherein forming the third electrode comprises submerging the third electrode in the substrate.

17. The method of claim 12 , wherein forming the third electrode comprises suspending the third electrode above the at least one layer of graphene and supporting the third electrode by a supporting member.

18. The method of claim 12 , wherein forming the third electrode comprises forming a global gate electrode comprising a layer of metal deposited across a surface of the substrate.

19. The method of claim 12 , wherein forming the third electrode comprises forming the substrate comprising a semiconductive material to function as the third electrode.

Assignees

• Univ Columbia

Inventors

• Rosenblatt Sami
• Hone James
• Chen Changyao

Classifications

• B81C1/00341 Primary

  Processes for manufacturing microsystems not provided for in groups B81C1/00023 - B81C1/00261 · CPC title

• B81C1/00142 Primary

  Bridges (deformable micromirrors G02B26/0841) · CPC title

• H01L29/1606

  Electricity · mapped topic

• H01L29/84

  Electricity · mapped topic

• H01L29/16

  Electricity · mapped topic