Magnetoresistive element and manufacturing method thereof

Patent metadata

Field	Value
Publication number	US-9620561-B2
Application number	US-201514627552-A
Country	US
Kind code	B2
Filing date	Feb 20, 2015
Priority date	Sep 5, 2014
Publication date	Apr 11, 2017
Grant date	Apr 11, 2017

Abstract

According to one embodiment, a magnetoresistive element is disclosed. The magnetoresistive element includes an underlayer containing aluminum (Al), nitrogen (N) and X. The X is an element other than Al and N. A first magnetic layer is provided on the underlayer. A nonmagnetic layer is provided on the first magnetic layer. A second magnetic layer is provided on the nonmagnetic layer.

First claim

What is claimed is:

1. A method of manufacturing a magnetoresistive element, comprising:
forming a crystalline underlayer containing aluminum (Al), nitrogen (N) and X, wherein the X is an element other than Al and N;
forming a first magnetic layer on the crystalline underlayer;
forming a nonmagnetic layer on the first magnetic layer;
forming a second magnetic layer on the nonmagnetic layer; and
forming a buffer layer, wherein the crystalline underlayer is formed on the buffer layer.

2. The method according to claim 1 , wherein the X contains titanium (Ti), zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), tantalum (Ta), chromium (Cr), molybdenum (Mo) or tungsten (W).

3. The method according to claim 1 , wherein the forming the crystalline underlayer is carried out in an atmosphere containing nitrogen, and is carried out by using a sputtering process with a target containing Al and the X.

4. The method according to claim 3 , wherein the forming the underlayer further comprises subjecting the crystalline underlayer to heat treatment after the sputtering process.

5. The method according to claim 3 , wherein the buffer layer contains at least one of Ta, Ti, W, Zr, Hf and Cr.

6. A magnetoresistive element comprising:
a crystalline underlayer containing aluminum (Al), nitrogen (N) and X, wherein the X is an element other than Al and N;
a first magnetic layer provided on the crystalline underlayer;
a nonmagnetic layer provided on the first magnetic layer;
a second magnetic layer provided on the nonmagnetic layer; and
a buffer layer, wherein the crystalline underlayer is formed on the buffer layer.

7. The magnetoresistive element according to claim 6 , wherein the X contains titanium (Ti), zirconium (Zr), hafnium (Hf), vanadium (V), niobium (Nb), tantalum (Ta), chromium (Cr), molybdenum (Mo) or tungsten (W).

8. The magnetoresistive element according to claim 6 , wherein the crystalline underlayer does not contain a metallic state of Al.

9. The magnetoresistive element according to claim 6 , wherein the nonmagnetic layer does not contain a metallic state of Al.

10. The magnetoresistive element according to claim 6 , wherein the crystalline underlayer further contains a compound of Al and the X.

11. The magnetoresistive element according to claim 6 , wherein the crystalline underlayer further contains a compound of N and the X.

12. The magnetoresistive element according to claim 6 , wherein the buffer layer contains at least one of Ta, Ti, W, Zr, Hf and Cr.

13. The magnetoresistive element according to claim 6 , wherein concentration of the X in the crystalline underlayer is equal to or greater than 10 at. %.

14. The magnetoresistive element according to claim 6 , wherein the crystalline underlayer comprises a first region containing a compound of Al and N and second regions containing a compound of the X and N, the first region is different from the second regions in composition, and part of the second regions is surrounded by the first region.

15. The magnetoresistive element according to claim 14 , wherein the second regions have pillar shapes.

16. The magnetoresistive element according to claim 15 , wherein side surfaces of the second regions are surrounded by the first region.

17. A magnetoresistive element comprising:
an underlayer comprising (Al 50 N 50 )z(TiyN 100-Y ) 100-Z , where 50≦Y≦55;
a first magnetic layer provided on the underlayer;
a nonmagnetic layer provided on the first magnetic layer;
a second magnetic layer provided on the nonmagnetic layer; and
a buffer layer, wherein the crystalline underlayer is formed on the buffer layer.

Assignees

• Nagase Toshihiko
• Watanabe Daisuke
• Eeh Youngmin
• Ueda Koji
• Sawada Kazuya
• Nagamine Makoto
• Toshiba Kk

Inventors

• Nagase Toshihiko
• Watanabe Daisuke
• Eeh Youngmin
• Ueda Koji
• Sawada Kazuya
• Nagamine Makoto

Classifications

• H10P72/3204

  using magnetic elements · CPC title

• H01L43/08

  Electricity · mapped topic

• H01L29/82

  Electricity · mapped topic

• H01L43/12

  Electricity · mapped topic

• H01L21/67709

  Electricity · mapped topic