Semiconductor device including two-dimensional material and method of fabricating the same
US-2024170562-A1 · May 23, 2024 · US
US9620534B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9620534-B2 |
| Application number | US-201514695326-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 24, 2015 |
| Priority date | Oct 27, 2014 |
| Publication date | Apr 11, 2017 |
| Grant date | Apr 11, 2017 |
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A thin-film transistor (TFT) array substrate includes a driving TFT, a storage capacitor, a first wire, a first interlayer insulating film, a second interlayer insulating film, and a second wire. The storage capacitor has a first electrode connected to a driving gate electrode of the driving TFT and a second electrode on and insulated from the first electrode. The first wire is on a same layer as the driving gate electrode. The first interlayer insulating film covers the first electrode and the first wire. The second interlayer insulating film is on the first interlayer insulating film and includes an opening that exposes part of the first interlayer insulating film. The second wire is on the second interlayer insulating film and at least partially overlaps the first wire. The second electrode is in the opening of the second interlayer insulating film.
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What is claimed is: 1. A thin-film transistor (TFT) array substrate, comprising: a driving TFT on a substrate; a storage capacitor including a first electrode connected to a driving gate electrode of the driving TFT, and a second electrode on and insulated from the first electrode; a first wire on a same layer as the driving gate electrode; a first interlayer insulating film covering the first electrode and the first wire; a second interlayer insulating film on the first interlayer insulating film and including an opening that exposes part of the first interlayer insulating film; and a second wire on the second interlayer insulating film and at least partially overlapping the first wire, wherein the second electrode is in the opening of the second interlayer insulating film and wherein the driving gate electrode and the first electrode are integrally formed as one body on a same layer. 2. The substrate as claimed in claim 1 , wherein a thickness of the second interlayer insulating film is greater than a thickness of the first interlayer insulating film. 3. The substrate as claimed in claim 1 , wherein a thickness of the second interlayer insulating film is about 2 to 5 times greater than a thickness of the first interlayer insulating film. 4. The substrate as claimed in claim 1 , wherein a dielectric constant of the second interlayer insulating film is lower than a dielectric constant of the first interlayer insulating film. 5. The substrate as claimed in claim 1 , wherein: the first interlayer insulating film includes an inorganic material, and the second interlayer insulating film includes an organic material. 6. A thin-film transistor (TFT) array substrate, comprising: a driving TFT on a substrate; a storage capacitor including a first electrode connected to a driving gate electrode of the driving TFT, and a second electrode on and insulated from the first electrode; a first wire on a same layer as the driving gate electrode; a first interlayer insulating film covering the first electrode and the first wire; a second interlayer insulating film on the first interlayer insulating film and including an opening that exposes part of the first interlayer insulating film; and a second wire on the second interlayer insulating film and at least partially overlapping the first wire, wherein the second electrode is in the opening of the second interlayer insulating film, wherein the driving TFT includes: a driving semiconductor layer below the driving gate electrode and insulated by a first gate insulating film, wherein the driving semiconductor layer is curved. 7. The substrate as claimed in claim 1 , wherein the second wire is a driving voltage line to supply a voltage to the driving TFT and extends from the second electrode. 8. A thin-film transistor (TFT) array substrate, comprising: a driving TFT and a switching TFT on a substrate; a storage capacitor including a first electrode connected to a driving gate electrode of the driving TFT and a second electrode on the first electrode and insulated from the first electrode; a first interlayer insulating film covering the first electrode and a switching gate electrode of the switching TFT; and a second interlayer insulating film on the first interlayer insulating film and including an opening exposing a part of the first interlayer insulating film, wherein the second electrode is in the opening of the second interlayer insulating film. 9. The substrate as claimed in claim 8 , wherein a thickness of the second interlayer insulating film is greater than a thickness of the first interlayer insulating film. 10. The substrate as claimed in claim 8 , wherein: the first interlayer insulating film includes an inorganic material, and the second interlayer insulating film includes an organic material. 11. The substrate as claimed in claim 8 , wherein the driving TFT and the storage capacitor at least partially overlap each other. 12. The substrate as claimed in claim 8 , further comprising: a first wire on a same layer as the driving gate electrode; and a second wire on the second interlayer insulating film and at least partially overlapping the first wire. 13. The substrate as claimed in claim 8 , further comprising: a contact metal on the second interlayer insulating film and connected to the switching TFT. 14. The substrate as claimed in claim 8 , further comprising: a pad region including at least one pad connected to a driver integrated circuit for driving the driving TFT and the switching TFT; and a sealing region including a sealing material between the pad region and the driving TFT, wherein the sealing region excludes the second interlayer insulating film. 15. An organic light-emitting display apparatus, comprising: a display area including a plurality of pixels; and a non-display area around the display area, wherein each of the plurality of pixels includes: a driving thin-film transistor (TFT) on a substrate; a storage capacitor including a first electrode connected to a driving gate electrode of the driving TFT and a second electrode on the first electrode and insulated from the first electrode; a first wire on a same layer as the driving gate electrode; a first interlayer insulating film covering the first electrode and the first wire; a second interlayer insulating film on the first interlayer insulating film and including an opening exposing part of the first interlayer insulating film; and a second wire on the second interlayer insulating film and at least partially overlapping the first wire, wherein the second electrode is in the opening of the second interlayer insulating film and wherein the driving gate electrode and the first electrode are integrally formed as one body on a same layer. 16. The display apparatus as claimed in claim 15 , wherein a thickness of the second interlayer insulating film is greater than a thickness of the first interlayer insulating film. 17. The display apparatus as claimed in claim 15 , wherein: the first interlayer insulating film includes an inorganic material, and the second interlayer insulating film includes an organic material. 18. The display apparatus as claimed in claim 15 , further comprising: a sealing substrate facing the substrate; and a sealing material adhering the substrate and the sealing substrate, the sealing material surrounding the display area, wherein the sealing material directly contacts the first interlayer insulating film. 19. The display apparatus as claimed in claim 18 , further comprising: an organic light-emitting diode in the display area and including a pixel electrode, an intermediate layer including an organic emission layer, and a counter electrode; and a spacer that maintains a substantially uniform interval between the substrate and the sealing substrate. 20. The display apparatus as claimed in claim 15 , further comprising: a pad region in the non-display area and including at least one pad connected to a driver integrated circuit for driving the pixels. 21. The display apparatus as claimed in claim 15 , wherein: each of the pixels includes a switching transistor, and the first interlayer insulating film and the second interlayer insulating film are stacked on a gate electrode of the switching transistor.
having supplementary regions or layers in the thin films or in the insulated bulk substrates for controlling properties of the device · CPC title
Electricity · mapped topic
Electricity · mapped topic
Interconnections, e.g. scanning lines · CPC title
integrated with passive devices, e.g. auxiliary capacitors · CPC title
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