Configuration of gate to drain (GD) clamp and ESD protection circuit for power device breakdown protection

Patent metadata

Field	Value
Publication number	US-9620498-B2
Application number	US-201414341789-A
Country	US
Kind code	B2
Filing date	Jul 26, 2014
Priority date	Jul 26, 2014
Publication date	Apr 11, 2017
Grant date	Apr 11, 2017

Abstract

A semiconductor power device supported on a semiconductor substrate comprising a plurality of transistor cells each having a source and a drain with a gate to control an electric current transmitted between the source and the drain. The semiconductor further includes a gate-to-drain (GD) clamp termination connected in series between the gate and the drain further includes a plurality of back-to-back polysilicon diodes connected in series to a silicon diode includes parallel doped columns in the semiconductor substrate wherein the parallel doped columns having a predefined gap. The doped columns further include a U-shaped bend column connect together the ends of parallel doped columns with a deep doped-well that is disposed below and engulfing the U-shaped bend.

First claim

We claim:

1. A semiconductor power device supported on a semiconductor substrate comprising a plurality of transistor cells each having a source encompassed in a body region and a drain with a gate to control an electric current transmitted between the source and the drain, wherein the semiconductor further comprises: a clamp termination structure connected in series to a silicon diode comprising a plurality of parallel doped columns disposed in said semiconductor substrate; an end well doped with a same conductivity type as the doped column enclosing an end portion of the doped column; and said parallel doped columns further include a U-shaped bend for connecting together two ends of two adjacent parallel doped columns.

2. The semiconductor power device of claim 1 wherein:
the parallel doped columns having a predefined gap between the parallel doped columns.

3. The semiconductor power device of claim 2 wherein:
said predefined gap ranging between 2 to 5 micrometers.

4. The semiconductor power device of claim 2 further comprising:
a floating well is disposed in said semiconductor substrate surrounding the parallel doped columns, wherein the floating well having the opposite conductivity type as the semiconductor substrate.

5. The semiconductor power device of claim 1 wherein:
the end well is disposed below and engulfing an end of the parallel doped columns, wherein the end well having the same conductivity type as the parallel doped columns with a lower doping concentration than the parallel doped columns.

6. The semiconductor power device of claim 1 wherein:
said clamp termination structure comprising a plurality of polysilicon diodes disposed on a dielectric layer overlaying a top surface of said semiconductor substrate supporting said semiconductor power device.

7. The semiconductor power device of claim 6 wherein:
each said plurality of polysilicon diodes comprises doped polysilicon regions with alternating conductivity types.

8. The semiconductor power device of claim 7 wherein:
said insulation layer covering the top surface of said semiconductor substrate extending over to said silicon diode comprising said doped column in said semiconductor substrate.

9. The semiconductor power device of claim 7 wherein:
said plurality of polysilicon diodes are connected on one end to a gate metal.

10. The semiconductor power device of claim 1 further comprising:
a floating well is disposed in said semiconductor substrate surrounding said doped column, wherein the floating well having the opposite conductivity type as the semiconductor substrate.

Assignees

• Su Yi
• Bhalla Anup
• Ng Daniel
• Alpha & Omega Semiconductor

Inventors

• Su Yi
• Bhalla Anup
• Ng Daniel

Classifications

• H01L27/0255 Primary

  Electricity · mapped topic

• H01L27/0629

  Electricity · mapped topic

• H10D84/811

  Combinations of field-effect devices and one or more diodes, capacitors or resistors · CPC title

• H10D89/611 Primary

  using diodes as protective elements · CPC title