Sawing underfill in packaging processes

Patent metadata

Field	Value
Publication number	US-9620430-B2
Application number	US-201213356173-A
Country	US
Kind code	B2
Filing date	Jan 23, 2012
Priority date	Jan 23, 2012
Publication date	Apr 11, 2017
Grant date	Apr 11, 2017

Abstract

A method includes bonding a first and a second package component on a top surface of a third package component, and dispensing a polymer. The polymer includes a first portion in a space between the first and the third package components, a second portion in a space between the second and the third package components, and a third portion in a gap between the first and the second package components. A curing step is then performed on the polymer. After the curing step, the third portion of the polymer is sawed to form a trench between the first and the second package components.

First claim

What is claimed is:

1. A method comprising:
bonding a first and a second package component on a top surface of a third package component;
dispensing a first polymer, wherein the first polymer comprises:
a first portion in a space between the first and the third package components;
a second portion in a space between the second and the third package components; and
a third portion in a gap between the first and the second package components;

performing a curing on the first polymer;
after the curing, sawing the third portion of the first polymer to form a trench between the first and the second package components, wherein the trench has a bottom higher than a top surface of the third package component; and
after the step of sawing, molding the first, the second, and the third package components with a second polymer, wherein the second polymer is filled into the trench.

2. The method of claim 1 , wherein the curing is a partial curing, and wherein the method further comprises, after the step of sawing the third portion of the first polymer, performing a thermal step to fully cure the first polymer.

3. The method of claim 1 , wherein after the step of curing, the first polymer is fully cured.

4. The method of claim 1 further comprising, after the step of molding with the second polymer, performing a die-saw on the third package component to separate the third package component into individual packages, wherein kerves of the die-saw do not pass through the trench.

5. The method of claim 1 , wherein the bottom of the trench is substantially level with or lower than bottom surfaces of the first and the second package components.

6. The method of claim 1 , wherein after the third portion of the first polymer is sawed, the third portion of the first polymer comprises remaining portions on opposite sides of the trenches, and wherein the remaining portions are in contact with sidewalls of the first and the second package components.

7. A method comprising:
bonding a first die, a second die, and a third die onto a top surface of a wafer, wherein the first die is immediately neighboring the second die and the third die, with no additional dies therebetween, and wherein the second die is between the first die and the third die;
dispensing an underfill to spaces between the first and the second dies and the wafer, wherein the underfill comprises a portion disposed in a gap between the first and the second dies, and wherein the underfill is not filled into a space between the second die and the third die;
performing a curing step to cure the underfill;
after the curing step, sawing the portion of the underfill to form a trench; and
after the step of sawing, performing a thermal step to anneal the underfill, wherein after the curing step, the underfill is partially cured.

8. The method of claim 7 further comprising:
molding a molding compound over the first die, the second die, and the wafer, wherein the molding compound is filled into the trench to form a molding compound strip; and
sawing the wafer into a plurality of packages, wherein a kerf of the sawing the wafer passes through the space between the second die and the third die, and wherein the first die, the second die, and the molding compound strip are in one of the plurality of packages, with the molding compound strip not sawed by the sawing the wafer.

9. The method of claim 8 , further comprising, after the step of molding the molding compound and before the step of sawing the wafer, forming a plurality of connectors on a back surface of the wafer.

10. The method of claim 7 , wherein the wafer comprises:
a substrate; and
a plurality of through-substrate vias in the substrate, wherein the plurality of through-substrate vias are electrically coupled to the first and the second dies.

11. The method of claim 7 , wherein during the step of sawing the portion of the underfill to form the trench, the wafer is not sawed.

12. The method of claim 7 , wherein a bottom of the trench is higher than a top surface of the wafer.

13. A method comprising:
bonding a first and a second package component on a top surface of a third package component;
dispensing a first polymer, wherein the first polymer comprises:
a first portion in a space between the first and the third package components;
a second portion in a space between the second and the third package components; and
a third portion in a gap between the first and the second package components;

performing a curing on the first polymer; and
after the curing, sawing the third portion of the first polymer to form a trench between the first and the second package components;
after the step of sawing, molding the first, the second, and the third package components with a second polymer, wherein the second polymer is filled into the trench to form a polymer strip; and
performing a die-saw to saw the third package component into a plurality of packages, wherein one of the plurality of packages comprises the first package component, the second package component, and the polymer strip, and wherein the polymer strip is not sawed by the die-saw.

14. The method of claim 13 , wherein the trench has a bottom higher than a top surface of the third package component.

15. The method of claim 14 , wherein the bottom of the trench is substantially level with or lower than bottom surfaces of the first and the second package components.

16. The method of claim 1 further comprising:
after the curing, performing a backside grinding to expose through-vias that are embedded in a semiconductor substrate of the third package component; and
before the sawing, forming electrical connectors on a backside of the third package component, wherein the electrical connectors are electrically coupled to the through-vias.

17. The method of claim 7 further comprising:
after the curing, performing a backside grinding to expose through-vias that are embedded in a semiconductor substrate of the wafer; and
before the sawing the wafer, forming electrical connectors on a backside of the wafer, wherein the electrical connectors are electrically coupled to the through-vias.

18. The method of claim 13 further comprising:
after the curing, performing a backside grinding to expose through-vias that are embedded in a semiconductor substrate of the third package component; and
before the die-saw, forming electrical connectors on a backside of the third package component, wherein the electrical connectors are electrically coupled to the through-vias.

19. The method of claim 1 , wherein a portion of the second polymer filled into the trench forms a polymer strip, and wherein the polymer strip has a bottom higher than the top surface of the third package component.

Assignees

• Lu Szu Wei
• Wang ying-da
• Kuo Li-Chung
• Lin Jing-Cheng
• Taiwan Semiconductor Mfg Co Ltd

Inventors

• Lu Szu Wei
• Wang ying-da
• Kuo Li-Chung
• Lin Jing-Cheng

Classifications

• H10P54/00

  Cutting or separating of wafers, substrates or parts of devices · CPC title

• H10W90/734

  between a chip and a stacked insulating package substrate, interposer or RDL · CPC title

• H10W90/732

  between stacked chips · CPC title

• H10W90/724

  between a chip and a stacked insulating package substrate, interposer or RDL · CPC title

• H10W90/722

  between stacked chips · CPC title