Apparatus for testing a semiconductor device and method of testing a semiconductor device

Patent metadata

Field	Value
Publication number	US-9618576-B2
Application number	US-201414552926-A
Country	US
Kind code	B2
Filing date	Nov 25, 2014
Priority date	Nov 29, 2013
Publication date	Apr 11, 2017
Grant date	Apr 11, 2017

Abstract

A semiconductor device measurement apparatus 1 A includes a tester 2 that generates an operational pulse signal to be input to a semiconductor device 3, a light source 5 that generates light, a light branch optical system 6 that irradiates the semiconductor device with the light, a light detector 7 that detects reflected light obtained by the semiconductor device 3 reflecting the light, and outputs a detection signal, an analog signal amplifier 8 that amplifies the detection signal and outputs an amplified signal, and an analysis apparatus 10 that analyzes an operation of the semiconductor device 3 based on the amplified signal and a predetermined correction value, wherein the predetermined correction value is obtained based on a signal obtained by the analog signal amplifier 8 amplifying a signal corresponding to a harmonic of a fundamental frequency of the operational pulse signal.

First claim

What is claimed is:

1. An apparatus for testing a semiconductor device, comprising:
an operational signal generator configured to generate an operational signal to be input to the semiconductor device;
a light source configured to generate light;
an optics configured to illuminate the semiconductor device with the light;
a detector configured to detect reflected light obtained by the semiconductor device reflecting the light, and output a detection signal;
an amplifier configured to amplify the detection signal and output an amplified signal; and
an analysis system configured to analyze an operation of the semiconductor device based on the amplified signal and a correction value,
wherein the correction value is obtained based on a signal obtained by the amplifier amplifying a signal corresponding to a harmonic of a fundamental frequency of the operational signal.

2. The apparatus of claim 1 , further comprising a signal generator configured to generate a pulse signal,
wherein the correction value is obtained by the signal generator sequentially generating a harmonic signal which is a pulse signal of an n th harmonic of the fundamental frequency.

3. The apparatus of claim 2 , wherein n is a positive integer.

4. The apparatus of claim 3 , wherein n is 2 m , and m is 0 or a positive integer.

5. The apparatus of claim 2 , wherein the pulse signal has a duty ratio ranging from 40% to 60%.

6. The apparatus of claim 2 ,
wherein the correction value is obtained by the light source generating modulated light modulated based on the harmonic signal generated by the signal generator and the detector detecting the modulated light and outputting a detection signal of the harmonic signal.

7. The apparatus of claim 2 , wherein the correction value is obtained by the harmonic signal generated by the signal generator being input to the amplifier.

8. The apparatus of claim 1 , wherein the analysis system corrects the amplified signal with the correction value, and reduces a high frequency component at a frequency higher than frequencies in a range in which the correction value is obtained among frequency components of the amplified signal after the correction.

9. The apparatus of claim 1 , wherein the analysis system corrects the amplified signal with the correction value, and reduces a low frequency component lower than the fundamental frequency of the operational signal among frequency components of the amplified signal after the correction.

10. A method of testing a semiconductor device, comprising:
generating an operational signal to be input to the semiconductor device;
generating light;
illuminating the semiconductor device with the light;
detecting reflected light obtained by the semiconductor device reflecting the light, and outputting a detection signal;
by amplifier, amplifying the detection signal and outputting an amplified signal; and
analyzing an operation of the semiconductor device based on the amplified signal and a correction value,
wherein the correction value is obtained based on a signal obtained by the amplifier amplifying a signal corresponding to a harmonic of a fundamental frequency of the operational signal.

11. The method of claim 10 , further comprising generating a pulse signal,
wherein the correction value is obtained by sequentially generating a harmonic signal which is a pulse signal of an n th harmonic of the fundamental frequency.

12. The method of claim 11 , wherein n is a positive integer.

13. The method of claim 12 , wherein n is 2 m , and m is 0 or a positive integer.

14. The method of claim 11 , wherein the pulse signal has a duty ratio ranging from 40% to 60%.

15. The method of claim 11 ,
wherein the correction value is obtained by generating modulated light modulated based on the harmonic signal and detecting the modulated light and outputting a detection signal of the harmonic signal.

16. The method of claim 11 , wherein the correction value is obtained by the harmonic signal being input to the amplifier.

17. The method of claim 10 , wherein correcting the amplified signal with the correction value, and reducing a high frequency component at a frequency higher than frequencies in a range in which the correction value is obtained among frequency components of the amplified signal after the correction.

18. The method of claim 10 , wherein correcting the amplified signal with the correction value, and reducing a low frequency component lower than the fundamental frequency of the operational signal among frequency components of the amplified signal after the correction.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Otaka Akihiro
• Nishizawa Mitsunori
• Hirai Nobuyuki
• Nakamura Tomonori

Classifications

• G01R31/311 Primary

  of integrated circuits {(G01R31/31728 takes precedence)} · CPC title