Apparatus for frequency analyzing a measurement target and method of frequency analyzing a measurement target

Patent metadata

Field	Value
Publication number	US-9618550-B2
Application number	US-201414535709-A
Country	US
Kind code	B2
Filing date	Nov 7, 2014
Priority date	Nov 12, 2013
Publication date	Apr 11, 2017
Grant date	Apr 11, 2017

Abstract

A semiconductor device testing apparatus 1 A includes a tester unit 16 that generates an operational pulse signal, an optical sensor 10 that outputs a detection signal as a response to the operational pulse signal, a pulse generator 17 that generates a reference signal containing a plurality of harmonics for the operational pulse signal in synchronization with the operational pulse signal, a spectrum analyzer 13 that receives the detection signal and acquires a phase and amplitude of the detection signal at a detection frequency, a spectrum analyzer 14 that receives the reference signal and acquires a phase of the reference signal at a detection frequency, and an analysis control unit 18 that acquires a time waveform of the detection signal based on the phase and the amplitude of the detection signal acquired by the spectrum analyzer 13 and the phase of the reference signal acquired by the spectrum analyzer 14.

First claim

What is claimed is:

1. An apparatus for frequency analyzing a measurement target, comprising:
an operational signal generator configured to generate an operational pulse signal to be input to the measurement target;
a detector configured to output a detection signal as a response to the operational pulse signal;
a reference signal generator configured to generate a reference signal containing a plurality of harmonics for the operational pulse signal in synchronization with the operational pulse signal;
a first electronic device configured to receive the detection signal and acquire a phase and amplitude of the detection signal at a detection frequency;
a second electronic device configured to receive the reference signal and acquire a phase of the reference signal at the detection frequency; and
an analysis system configured to acquire a time waveform of the detection signal based on the phase and the amplitude of the detection signal and the phase of the reference signal.

2. The apparatus according to claim 1 , further comprising:
a light source configured to generate light; and
an optical system configured to irradiate the measurement target with the light, and guide reflected light of the light,
wherein the detector is an optical sensor configured to output the detection signal by detecting the reflected light.

3. The apparatus according to claim 1 , further comprising a changing device configured to change the detection frequency in synchronization with the reference signal.

4. The apparatus according to claim 1 , further comprising a switching device configured to perform switching so that the detection signal or the reference signal is input to the first electronic device.

5. The apparatus according to claim 4 ,
wherein the switching device performs switching so that the reference signal is input to the first electronic device,
the first electronic device acquires the phase of the reference signal at the detection frequency, and
the analysis system acquires a phase error between the first electronic device and the second electronic device based on the phases of the reference signals acquired by the first electronic device and the second electronic device.

6. The apparatus according to claim 1 ,
wherein the reference signal generator generates the reference signal containing harmonics from a fundamental harmonic to at least a tenth harmonic for the operational pulse signal.

7. The apparatus according to claim 1 , wherein the reference signal generator is a pulse generator, and generates, as the reference signal, a pulse signal having a shorter pulse width than a repetition period of the operational pulse signal.

8. The apparatus according to claim 1 , wherein the reference signal generator continuously generates a signal at a different frequency as the reference signal.

9. The apparatus according to claim 1 , wherein the first electronic device and the second electronic device are one or more spectrum analyzers.

10. A method of frequency analyzing a measurement target, comprising:
generating an operational pulse signal to be input to the measurement target;
outputting a detection signal as a response to the operational pulse signal;
generating a reference signal containing a plurality of harmonics for the operational pulse signal in synchronization with the operational pulse signal;
by a first electronic device, acquiring a phase and amplitude of the detection signal at a detection frequency based on the detection signal;
by a second electronic device, acquiring a phase of the reference signal at a detection frequency based on the reference signal; and
acquiring a time waveform of the detection signal based on the phase and the amplitude of the detection signal and the phase of the reference signal.

11. The method according to claim 10 , further comprising
generating light;
irradiating the measurement target with the light, and guiding reflected light of the light,
wherein the outputting step is outputting the detection signal by detecting the reflected light.

12. The method according to claim 10 , further comprising changing the detection frequency in synchronization with the reference signal.

13. The method according to claim 10 , further comprising switching so that the detection signal or the reference signal is input to the first electronic device.

14. The method according to claim 10 , further comprising
inputting the reference signal to the first electronic device,
by the first electronic device, acquiring the phase of the reference signal at the detection frequency, and
acquiring a phase error between the first electronic device and the second electronic device based on the phases of the reference signals acquired by the first electronic device and the second electronic device.

15. The method according to claim 10 ,
wherein the reference signal contains harmonics from a fundamental harmonic to at least a tenth harmonic for the operational pulse signal.

16. The method according to claim 10 , wherein the reference signal is a pulse signal having a shorter pulse width than a repetition period of the operational pulse signal.

17. The method according to claim 10 , wherein the reference signal is a pulse train having a plurality of pulses at a different frequency.

18. The method according to claim 10 , wherein the first electronic device and the second electronic device are one or more spectrum analyzers.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Nakamura Tomonori
• Otaka Akihiro
• Nishizawa Mitsunori

Classifications

• G01R31/311

  of integrated circuits {(G01R31/31728 takes precedence)} · CPC title

• G01N21/9501

  Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20) · CPC title

• G01R23/17 Primary

  with optical {or acoustical} auxiliary devices · CPC title

• G01N2201/06113

  Coherent sources; lasers · CPC title

• G01N2201/08

  Optical fibres; light guides · CPC title