Method of acquiring EBSP patterns

Patent metadata

Field	Value
Publication number	US-9618463-B2
Application number	US-201514834069-A
Country	US
Kind code	B2
Filing date	Aug 24, 2015
Priority date	Aug 25, 2014
Publication date	Apr 11, 2017
Grant date	Apr 11, 2017

Abstract

The invention relates to a method of acquiring an Energy Backscattering Pattern image of a sample in a charged particle apparatus, the sample showing a flat surface, the charged particle apparatus equipped with an electron column for producing a finely focused electron beam, a position sensitive detector for detecting EBSP patterns, and a sample holder for holding and positioning the sample, the method comprising the steps of:
Positioning the sample with respect to the electron beam, Directing the electron beam to an impact point on the sample, thereby causing backscattered electrons to irradiate the detector, and Acquiring the signal from the detector while the beam is kept stationary,

in which
The detector is equipped to selectively detect electrons with an energy above a predefined threshold, and The signal of the electrons with an energy above said threshold is used to form an EBSP image.

First claim

The invention claimed is:

1. Method of acquiring an Electron Backscattering Pattern (EBSP) image and/or a Kossel image of a sample in a charged particle apparatus, the sample showing a flat surface, the charged particle apparatus equipped with an electron column for producing a finely focused electron beam, a position sensitive detector for detecting EBSP patterns and/or Kossel image, and a sample holder for holding and positioning the sample, the method comprising the steps of:
positioning the sample with respect to the electron beam,
directing the electron beam to an impact point on the sample, thereby causing backscattered electrons and/or X-rays to irradiate the detector, and
acquiring the signal from the detector while the beam is kept stationary,
the detector is equipped to selectively detect electrons and/or X-rays with an energy above a predefined threshold, and
the signal of the electrons and/or X-rays with an energy above said threshold is used to form an EBSP or Kossel image,
in which during acquisition of the image the angle between the normal to the flat surface of the sample and the electron beam is less than 45 degrees.

2. The method of claim 1 in which the detector is a pixelated detector.

3. The method of claim 2 in which the detector is equipped to detect electrons and/or X-rays within different energy bands.

4. The method of claim 2 in which during acquisition the electron beam has an energy of 5 keV or less.

5. The method of claim 2 in which the method further comprises imaging the sample while scanning the electron beam over the sample, and detecting a signal from the group of SEs, BSEs, X-rays, or photons in the visible light.

6. The method of claim 2 in which the predetermined threshold is a programmable predetermined threshold.

7. The method of claim 1 in which the detector is equipped to detect electrons and/or X-rays within different energy bands.

8. The method of claim 7 in which the detector is a detector with a sensor chip showing pixels on which the backscattered electrons and/or X-rays impinge is bonded to a chip comprising for each pixel an amplifier, a comparator and a counter.

9. The method of claim 8 in which the bonding is flip-chip bump bonding.

10. The method of claim 7 in which during acquisition the electron beam has an energy of 5 keV or less.

11. The method of claim 1 in which during acquisition the electron beam has an energy of 5 keV or less.

12. The method of claim 1 in which the method further comprises imaging the sample while scanning the electron beam over the sample, and detecting a signal from the group of SEs, BSEs, X-rays, or photons in the visible light.

13. The method of claim 1 in which the predetermined threshold is a programmable predetermined threshold.

14. A charged particle apparatus equipped with an electron beam column and a pixelated detector for detecting an EBSP pattern and/or a Kossel pattern, the apparatus characterized in that the detector is equipped to selectively detect electrons and/or X-rays with an energy above a predefined threshold, and that the apparatus is equipped with a programmable controller for controlling beam position and the detector, said controller further equipped to process the signal from the detector to form an EBSP image and/or a Kossel image, the apparatus including a sample holder for holding and positioning a sample such that, during acquisition of the image the angle between the normal to the flat surface of the sample and the electron beam is less than 45 degrees.

15. The charged particle apparatus of claim 14 in which the programmable controller is equipped to automatically process the EBSP or Kossel image to determine crystallographic orientation and form an image showing the crystallographic orientation of crystals of the sample.

16. The charged particle apparatus of claim 15 in which the predefined threshold is a programmable predefined threshold.

17. The charged particle apparatus of claim 15 in which the apparatus further comprises an ion beam column for machining the sample before detecting the EBSP pattern and/or the Kossel pattern.

18. The charged particle apparatus of claim 14 in which the predefined threshold is a programmable predefined threshold.

19. The charged particle apparatus of claim 14 in which the apparatus further comprises an ion beam column for machining the sample before detecting the EBSP pattern and/or the Kossel pattern.

20. The charged particle apparatus of claim 19 in which the apparatus further comprises a Gas Injection System for enhanced machining or etching of the sample.

Assignees

• Fei Co

Inventors

• Un{hacek over (c)}ovský Marek
• Stejskal Pavel
• Vystav{Hacek Over (E)}L Tomá{Hacek Over (S)}

Classifications

• H01J2237/31745

  for preparing specimen to be viewed in microscopes or analyzed in microanalysers · CPC title

• H01J2237/2442

  Energy-dispersive (Si-Li type) spectrometer · CPC title

• H01J2237/24475

  Scattered electron detectors · CPC title

• H01J2237/24485

  Energy spectrometers · CPC title

• H01J37/252

  Tubes for spot-analysing by electron or ion beams; Microanalysers · CPC title