System and method for detecting leakage in a gas pipeline

Patent metadata

Field	Value
Publication number	US-9618418-B2
Application number	US-201414541353-A
Country	US
Kind code	B2
Filing date	Nov 14, 2014
Priority date	Nov 14, 2014
Publication date	Apr 11, 2017
Grant date	Apr 11, 2017

Abstract

Disclosed is a leakage detection system ( 200 ) and a leakage detection method for detecting leakage in a gas supply system ( 10 ′) comprising a gas source ( 11; 12 ) connected to a gas delivery module ( 14 ) by a pipeline. The leakage detection system ( 200 ) comprises a flow meter ( 113 ) connectable along the pipeline remotely from an inlet of the gas delivery module ( 14 ); and a detection module ( 110 ) configured to receive signals representing a measured flow rate from the flow meter ( 113 ), and to compare the measured flow rate ( 115 ) to a stored leakage-free reference value ( 116 ) to detect an increase in flow rate in the presence of a leak. A flow resistance between the detection module ( 110 ) and an outlet of the gas delivery module ( 14 ) amplifies the increase in flow rate in the presence of a leak. The system ( 200 ) may comprise a flow rate elevation system ( 121 ) connectable between the gas source ( 11; 12 ) and the flow meter ( 113 ) for temporarily increasing the flow rate in the pipeline.

First claim

The invention claimed is:

1. A leakage detection system for detecting leakage in a gas supply system comprising a gas source connected to a gas delivery module by a pipeline, the leakage detection system comprising:
a flow sensor connectable along the pipeline remotely from an inlet of the gas delivery module; and
a detection module configured to receive signals representing a measured flow parameter from the flow sensor, and to compare the measured flow parameter to a stored leakage-free reference value to detect a change in flow parameter in the presence of a leak;
wherein a flow resistance between the detection module and an outlet of the gas delivery module amplifies the change in flow parameter in the presence of a leak,
wherein the flow resistance comprises a flow resistor element, the flow resistor element being connectable between the flow sensor and the inlet of the gas delivery module.

2. A leakage detection system according to claim 1 , wherein the flow resistance comprises an intrinsic flow resistance of the gas delivery module.

3. A leakage detection system according to claim 1 , comprising a flow rate elevation system connectable between the gas source and the flow sensor for temporarily changing the flow rate in the pipeline.

4. A gas supply system for a wire bonding process, comprising:
a gas source;
a gas delivery module; and
a leakage detection system according to claim 1 , the leakage detection system being connected between the gas source and the gas delivery module.

5. A method of detecting leakage in a pipeline connected between a gas source and a gas delivery module, the method comprising steps of:
connecting a flow parameter sensor along the pipeline remotely from an inlet of the gas delivery module;
introducing or changing a flow resistance in the pipeline;
measuring a flow parameter along the pipeline using the flow parameter sensor;
comparing the flow parameter to a stored leakage-free reference value; and
if the flow parameter is different from a predetermined level above the leakage-free reference value, determining that there is a leakage in the pipeline.

6. A method according to claim 5 , wherein the predetermined level is 10% above the leakage-free reference value.

7. A method according to claim 5 , further comprising temporarily increasing the flow rate from the gas source.

8. A method according to claim 5 , further comprising determining the leakage-free reference value.

Assignees

• Zhang Yue
• Chang Hao Ming
• Asm Tech Singapore Pte Ltd

Inventors

• Zhang Yue
• Chang Hao Ming

Classifications

• H10W72/07125

  Means for controlling the bonding environment, e.g. valves or vacuum pumps · CPC title

• G01F1/00

  Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow (measuring a proportion of the volume flow G01F5/00) · CPC title

• F17D5/02

  Preventing, monitoring, or locating loss · CPC title

• G01M3/2807 Primary

  for pipes (G01M3/2892, G01M3/30 take precedence) · CPC title

• G01F25/10

  of flowmeters · CPC title