Optical measuring system with filter unit for extracting electromagnetic radiation

Patent metadata

Field	Value
Publication number	US-9618328-B2
Application number	US-201214128454-A
Country	US
Kind code	B2
Filing date	Jul 25, 2012
Priority date	Jul 26, 2011
Publication date	Apr 11, 2017
Grant date	Apr 11, 2017

Abstract

An optical measuring system determines coordinates of points for distance measurement. The measuring system includes a radiation source for emitting electromagnetic radiation and a receiving unit having a filter unit for extracting electromagnetic radiation in a defined wavelength range and having, a detector, such that the radiation extracted by the filter unit is detectable by the detector. The filter unit includes at least two mirror elements which are at least partly reflective and constructed in a multilayered fashion. The mirror elements are substantially parallel to one another. Two adjacent mirror elements in each case enclose a cavity and are arranged at a specific distance from one another. An optical thickness is defined by a refractive index of the cavity and by the distance between the mirror elements. Optical thickness varying means operate to varying the optical thickness, such that an extractable wavelength range of the filter unit is varied.

First claim

What is claimed is:

1. An optical distance measuring system for determining coordinates of points based on measured distances, comprising:
a radiation source for emitting electromagnetic radiation having a center emission wavelength, and
a receiving unit having:
a filter unit for extracting electromagnetic radiation in a defined wavelength range according to an interference principle; and
a detector arranged in such a way that the radiation that can be extracted by means of the filter unit is detectable by the detector,
wherein the filter unit includes:
at least two mirror elements which are at least partly reflective and which are constructed in a multilayered fashion, wherein the mirror elements are oriented substantially parallel to one another and two adjacent mirror elements in each case enclose a cavity and are arranged at a specific distance with respect to one another, wherein an optical thickness is defined by a refractive index of the cavity and by the distance between the mirror elements, and wherein the two mirror elements are held by springs;

optical thickness varying means for varying the optical thickness, such that an extractable wavelength range of the filter unit is varied; and
a processing unit that derives distance information based on the radiation detected by the detector;
wherein part of the electromagnetic radiation emitted by the radiation source is coupled out as reference beam by a beam coupling-out element and a reference wavelength is measurable by a sensor; and
wherein the optical thickness is adjustable depending on the measured reference wavelength in such a way that the reference wavelength lies in the extracted wavelength range.

2. The optical measuring system as claimed in claim 1 , wherein:
the measuring system comprises a regulating unit that interacts with the optical thickness varying means in such a way that the optical thickness is variable, such that the emission wavelength of the emitted radiation lies within the extractable wavelength range.

3. The optical measuring system as claimed in claim 2 , wherein:
the regulating unit interacts with the optical thickness varying means and the detector in such a way that the optical thickness is adjustable depending on a detection of the detector.

4. The optical measuring system as claimed in claim 1 , wherein:
the optical thickness is adjustable by means of the optical thickness varying means in such a way that a measured value detected by means of the detector exceeds a defined threshold value.

5. The optical measuring system as claimed in claim 1 , wherein:
the extractable wavelength range is defined by a center wavelength representing an extraction maximum, and a tolerance range around the center wavelength defined depending on an extraction level-wavelength profile.

6. The optical measuring system as claimed in claim 1 , wherein:
the filter unit is designed to be transmissive or reflective; and
the filter unit is designed in such a way that reflection or transmission of electromagnetic radiation within the extractable wavelength range is effected.

7. The optical measuring system as claimed in claim 1 , wherein:
an extraction wavelength for the extracted radiation is derivable from the variation of the optical thickness that can be carried out by means of a measurement by the detector.

8. The optical measuring system as claimed in claim 1 , wherein:
the detector is designed as a photodiode, CMOS or PSD area sensor; and/or
the measuring system comprises at least one further radiation source having a further emission wavelength.

9. The optical measuring system as claimed in claim 1 , wherein:
the optical thickness is adjustable by means of an electrical control signal being applied to the optical thickness varying means, wherein the optical thickness is adjustable depending on an applied control signal value.

10. The optical measuring system as claimed in claim 1 , wherein:
the cavity has an optically variable medium having a material refractive index.

11. The optical measuring system as claimed in claim 1 , wherein:
the system comprises a database in which an assignment table having distances between the mirror elements and respective wavelength ranges is stored.

12. The optical measuring system as claimed in claim 11 , wherein:
in the database a parameterization for the radiation source for determining the emission wavelength is stored and the distance between the mirror elements and/or the refractive index of the cavity are/is adjustable depending on parameters of the parameterization that represents a dependence of the emission wavelength on current and/or temperature of the radiation source.

13. The optical measuring system as claimed in claim 1 , wherein:
the optical thickness varying means have actuating means for varying the position of the mirror elements and/or refractive index adjusting means for varying the refractive index of the cavity.

14. The optical measuring system as claimed in claim 13 , wherein:
the optical thickness is variable continuously during operation.

15. The optical measuring system as claimed in claim 2 , wherein:
the optical thickness is automatically variable.

16. The optical measuring system as claimed in claim 10 , wherein:
the medium is embodied by an electroactive polymer and the material refractive index is variable in a defined manner by means of the application of a voltage, such that the optical thickness is varied.

17. The optical measuring system as claimed in claim 11 , wherein:
the respective wavelength ranges depending on refractive indices of the cavity are stored; and
the distance between the mirror elements and/or the refractive index of the cavity are/is adjustable depending on a defined wavelength to be extracted by means of the assignment table.

18. A distance measuring method for determining coordinates of points based on measured distances in an optical distance measuring system, the method comprising:
using a filter unit of the optical distance measuring system to extract electromagnetic radiation in a defined wavelength range having a center emission wavelength according to an interference principle, the filter unit including:
at least two mirror elements which are at least partly reflective and which are constructed in a multilayered fashion, wherein the mirror elements are oriented substantially parallel to one another and two adjacent mirror elements in each case enclose a cavity and are arranged at a specific distance with respect to one another, wherein an optical thickness is defined by a refractive index of the cavity and by the distance between the mirror elements, and wherein the two mirror elements are held by springs; and
optical thickness varying means for varying the optical thickness, such that an extractable wavelength range of the filter unit is varied, the optical thickness varying means having actuating means for varying the position of the mirror elements and/or refractive index adjusting means for varying the refractive index of the cavity, the optical thickness capable of being continuously varied during operation to ensure that that the emission wavelength lies within the extractable wavelength range; and

deriving distance information based on the extracted radiation
wherein part of the electromagnetic radiation emitted by the radiation source is coupled out as reference beam by a beam coupling-out element and a reference wavelength is measured by a sensor; and
wherein the optical thickness is adjusted depending on the measured reference w

Assignees

• Hinderling Jürg
• Siercks Knut
• Hexagon Technology Ct Gmbh

Inventors

• Hinderling Jürg
• Siercks Knut

Classifications

• G01B11/002 Primary

  for measuring two or more coordinates · CPC title

• G01C15/002 Primary

  Active optical surveying means (optical plumbing G01C15/105) · CPC title

• G02B5/284

  of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates (etalons for fibre optic multiplexing G02B6/29358; etalons for spectral measurement G01J3/26) · CPC title

• G01C3/02

  Details · CPC title

• G01C1/02 Primary

  Theodolites · CPC title