High removal rate chemical mechanical polishing pads and methods of making
US-2017361421-A1 · Dec 21, 2017 · US
US9617372B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9617372-B2 |
| Application number | US-201314438396-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 16, 2013 |
| Priority date | Oct 24, 2012 |
| Publication date | Apr 11, 2017 |
| Grant date | Apr 11, 2017 |
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A sulphur-comprising polyaromatic polyamine compound can be used as a monomer or prepolymer, when n is different from zero, in the synthesis of polyurea. The compound corresponds to the formula (I): H 2 N—Ar 1 —NH—CH 2 —CH(OH)—(CH 2 ) m —O—Z 1 —O—(CH 2 ) m —CH(OH)—CH 2 —[X] n —HN—Ar 2 —NH 2 in which X represents the string: —HN—Ar 3 —NH—(CH 2 )—CH(OH)—(CH 2 ) m —O—Z 2 —O—(CH 2 ) m —CH(OH)—(CH 2 )— and in which n represents an integer equal to zero or different from zero; m, which are identical or different, represent an integer within a range from 1 to 10; Z 1 and Z 2 , which are identical or different, represent a divalent bonding group comprising from 1 to 30 carbon atoms; and Ar 1 , Ar 2 and Ar 3 , which are identical or different, each represent a phenylene group, at least one of these phenylene groups bearing one, two, three or four groups of formula —S x —R in which “x” is an integer from 1 to 8 and R represents hydrogen or a hydrocarbon group which can comprise a heteroatom and which comprises from 1 to 10 carbon atoms.
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The invention claimed is: 1. A sulfur-comprising polyaromatic polyamine compound corresponding to the formula (I): H 2 N—Ar 1 —NH—CH 2 —CH(OH)—(CH 2 ) m —O—Z 1 —O—(CH 2 ) m —CH(OH)—CH 2 —[X] n —HN—Ar 2 —NH 2 wherein X represents the string: —HN—Ar 3 —NH—(CH 2 )—CH(OH)—(CH 2 ) m —O—Z 2 —O—(CH 2 ) m —CH(OH)—(CH 2 )—; wherein n represents an integer equal to zero or different from zero; wherein m, which are identical or different, represent an integer within a range from 1 to 10; wherein Z 1 and Z 2 represent cyclohexane-1,4-dimethylene; wherein Ar 1 , Ar 2 and Ar 3 , which are identical or different, each represent a phenylene group, at least one of these phenylene groups bearing one, two, three or four groups of formula —S x —R in which x is an integer from 1 to 8 and R represents hydrogen or a hydrocarbon group which optionally comprises a heteroatom and which comprises from 1 to 10 carbon atoms. 2. The compound according to claim 1 , wherein n is equal to 1. 3. The compound according to claim 1 , wherein n is within a range from 2 to 20. 4. The compound according to claim 3 , wherein n is within a range from 2 to 10. 5. The compound according to claim 1 , wherein m, which are identical or different, represent an integer within a range from 1 to 5. 6. The compound according to claim 5 , wherein m, which are identical or different, represent an integer equal to 1 or 2. 7. The compound according to claim 6 , wherein m is preferably equal to 1. 8. The compound according to claim 1 , wherein each of the Ar 1 , Ar 2 and Ar 3 groups bears one, two, three or four groups of formula —S x —R. 9. The compound according to claim 1 , wherein x is within a range from 1 to 4. 10. The compound according to claim 9 , wherein x is equal to 1 or 2. 11. The compound according to claim 1 , wherein R is an alkyl. 12. The compound according to claim 11 , wherein R is an alkyl having from 1 to 5 carbon atoms. 13. The compound according to claim 12 , wherein R represents a methyl or an ethyl. 14. The compound according to claim 13 , wherein R is a methyl. 15. The compound according to claim 1 , wherein the monovalent phenylenediamino strings H 2 N—Ar 1 —NH— and —HN—Ar 2 —NH 2 , which are identical or different, correspond to one of the formulae (III-a), (III-b) and (III-c): 16. The compound according to claim 1 , wherein the divalent phenylenediamino strings —HN—Ar 3 —NH—, which are identical or different, correspond to either of the formulae (III-d) and (III-e): 17. A polyurea made using at least one sulfur-comprising polyaromatic polyamine compound according to claim 1 . 18. A process for the synthesis of a polyurea comprising the step of: polycondensating at least one sulfur-comprising polyaromatic polyamine compound according to claim 1 with a polyisocyanate compound. 19. A process for the synthesis of a polyurea comprising the step of: using a sulfur-comprising polyaromatic polyamine compound according to claim 1 .
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