Semiconductor structure including optical device and method for manufacturing the same
US-2024230996-A1 · Jul 11, 2024 · US
US9614110B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9614110-B2 |
| Application number | US-201615072228-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 16, 2016 |
| Priority date | Apr 20, 2015 |
| Publication date | Apr 4, 2017 |
| Grant date | Apr 4, 2017 |
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Disclosed is a photo detector. The photo detector includes: a conductive substrate; an insulating layer formed on the conductive substrate; a single-layer graphene formed at one part of an upper end of the insulating layer and formed in one layer; a multi-layer graphene formed at the other part of the upper end of the insulating layer and formed in multiple layers; a first electrode formed at an end of the single-layer graphene; and a second electrode formed at an end of the multi-layer graphene.
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What is claimed is: 1. A photo detector, comprising: a conductive substrate; an insulating layer formed on the conductive substrate; a graphene structure formed on the insulating layer, the graphene structure including a single-layer graphene consisting of a single layer of graphene, a multi-layer graphene consisting of multiple layers of graphene, the multi-layer graphene being formed in an area different in plan view from an area in which the single-layer is formed, and a boundary surface in which the single-layer graphene contacts the multi-layer graphene; a first electrode formed at one end of the graphene structure; and a second electrode formed at an other end of the graphene structure. 2. The photo detector of claim 1 , wherein the graphene structure has an interdigitated structure in which the single-layer graphene and the multi-layer graphene interdigitate each other. 3. The photo detector of claim 2 , wherein each of the single-layer graphene and the multi-layer graphene is implemented in a form of quadrangular saw teeth. 4. The photo detector of claim 3 , wherein the single-layer graphene and the multi-layer graphene have a structure, in which the saw teeth portions formed based on a direction connecting the first electrode and the second electrode are sequentially and alternately and disposed. 5. The photo detector of claim 2 , wherein a photo current is increased by applying a voltage between the substrate and the first and second electrodes. 6. The photo detector of claim 1 , wherein in response to a radiation of a light to the boundary surface of the graphene structure, a photo current flows between the first electrode and the second electrode.
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