Methods of manufacturing pellicles having graphite layers

Patent metadata

Field	Value
Publication number	US-9612528-B2
Application number	US-201514736706-A
Country	US
Kind code	B2
Filing date	Jun 11, 2015
Priority date	Nov 13, 2014
Publication date	Apr 4, 2017
Grant date	Apr 4, 2017

Abstract

Provided is a method of manufacturing a pellicle. The method includes preparing a substrate, forming a membrane on the substrate by performing a chemical vapor deposition (CVD) process, separating the membrane from the substrate in a first solvent, rinsing the separated membrane in a second solvent, and transferring the separated membrane to a frame in a third solvent.

First claim

What is claimed is:

1. A method of manufacturing a pellicle, the method comprising:
preparing a substrate;
forming a membrane on the substrate by performing a chemical vapor deposition (CVD) process;
separating the membrane from the substrate in a first solvent;
rinsing the separated membrane in a second solvent; and
transferring the separated membrane onto a frame in a third solvent.

2. The method as claimed in claim 1 , wherein the substrate comprises copper (Cu).

3. The method as claimed in claim 1 , wherein the membrane comprises a graphite layer.

4. The method as claimed in claim 1 , wherein the first solvent selectively comprises at least one of hydrogen peroxide, phosphoric acid, nitric acid, acetic acid, a cyclic amine compound, iron fluoride (FeCl 3 ), eerie ammonium nitrate (CAN), de-ionized water, and any combination thereof.

5. The method as claimed in claim 1 , wherein the second solvent comprises de-ionized water, or a rinse solution including de-ionized water with nitric acid or hydrochloric acid.

6. The method as claimed in claim 1 , wherein the third solvent comprises de-ionized water, alcohol, or a mixture thereof.

7. The method as claimed in claim 6 , wherein the third solvent further comprises aminopropyltriethoxysilane (ATS) or octadecyltrichlorosilane (OTS).

8. The method as claimed in claim 1 , further comprising forming a straining layer on a surface of the membrane.

9. The method as claimed in claim 8 , wherein the straining layer comprises polymethylmethacrylate (PMMA) or polydimethylsiloxane (PDMS).

10. The method as claimed in claim 1 , further comprising forming a capping layer on a surface of the membrane.

11. The method as claimed in claim 10 , wherein the capping layer comprises ruthenium (Ru) or silicon nitride (SiN).

12. The method as claimed in claim 1 , wherein a surface of the frame is coated with a carbon layer or a carbide layer.

13. A method of manufacturing a pellicle, the method comprising:
forming a graphite layer on a substrate by performing a chemical vapor deposition (CVD) process;
forming a straining layer including polymethylmethacrylate (PMMA) or polydimethylsiloxane (PDMS) on the graphite layer;
separating the graphite layer on which the straining layer is formed from the substrate;
transferring the separated graphite layer onto a frame; and
removing the straining layer.

14. The method as claimed in claim 13 , further comprising forming a capping layer between the graphite layer and the straining layer,
wherein the capping layer is not removed and remains on the graphite layer.

15. The method as claimed in claim 13 , further comprising forming a ruthenium (Ru) layer between the substrate and the graphite layer.

16. A method of manufacturing a pellicle, the method comprising:
loading a substrate into a vacuum chamber;
forming a membrane on the substrate by performing a deposition process;
unloading the substrate on which the membrane is formed from the vacuum chamber;
separating the membrane from the substrate by performing a separation process;
rinsing the separated membrane by performing a rinsing process; and
transferring the separated membrane onto a frame by performing a transfer process.

17. The method as claimed in claim 16 , wherein the deposition process comprises a chemical vapor deposition (CVD) process using carbon (C) or source gas including a carbon compound.

18. The method as claimed in claim 16 , wherein the separation process is performed in a solvent selectively including one or more among hydrogen peroxide, phosphoric acid, nitric acid, acetic acid, a cyclic amine compound, iron fluoride (FeCl 3 ), eerie ammonium nitrate (CAN), and de-ionized water.

19. The method as claimed in claim 16 , wherein the rinsing process is performed in a solvent including de-ionized water or a rinse solution.

20. The method as claimed in claim 16 , wherein the transfer process is performed in a solvent including de-ionized water, alcohol, or a mixture thereof.

Assignees

• Samsung Electronics Co Ltd

Inventors

• Kim Munja
• Kim Byunggook
• Choi Jaehyuck

Classifications

• G03F1/62 Primary

  Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof · CPC title

• G03F1/64 Primary

  characterised by the frames, e.g. structure or material, including bonding means therefor · CPC title

• H10P76/2041 Primary

  Photolithographic processes · CPC title