Controlled fabrication of nanopores in nanometric solid state materials

Patent metadata

Field	Value
Publication number	US-9611140-B2
Application number	US-201214004743-A
Country	US
Kind code	B2
Filing date	Mar 14, 2012
Priority date	Mar 15, 2011
Publication date	Apr 4, 2017
Grant date	Apr 4, 2017

Abstract

In a method of forming a nanopore in a nanometric material, a nanopore nucleation site is formed at a location that is interior to lateral edges of the nanometric material by directing a first energetic beam, selected from the group of ion beam and neutral atom beam, at the interior location for a first time duration that imposes a first beam dose which causes removal of no more than five interior atoms from the interior location to produce at the interior location a nanopore nucleation site having a plurality of edge atoms. A nanopore is then formed at the nanopore nucleation site by directing a second energetic beam, selected from the group consisting of electron beam, ion beam, and neutral atom beam, at the nanopore nucleation site with a beam energy that removes edge atoms at the nanopore nucleation site but does not remove bulk atoms from the nanometric material.

First claim

We claim:

1. A method of forming a nanopore in a nanometric material, the method comprising:
forming a nanopore nucleation site in a nanometric material, the nanometric material having a thickness that is less than about 5 nanometers, the nanopore nucleation site being formed at a location of the nanometric material that is interior to lateral edges of the nanometric material by directing a first energetic beam, selected from the group consisting of ion beam and neutral atom beam, at the interior location with a beam energy that is at least that beam energy which provides at the nanometric material a bulk atom displacement energy of E d bulk , that can remove bulk atoms from the nanometric material, for a first time duration that imposes a first beam dose which causes removal of no more than five interior bulk atoms from the interior location to produce at the interior location a nanopore nucleation site having a plurality of edge atoms; and
forming a nanopore at the nanopore nucleation site by directing a second energetic beam, selected from the group consisting of electron beam, ion beam, and neutral atom beam, at the nanopore nucleation site with a beam energy that is less than that beam energy which provides at: the nanometric material a bulk atom displacement energy of E d bulk , to thereby remove edge atoms at the nanopore nucleation site but not remove bulk nanometric material atoms that are not at the nanopore nucleation site.

2. The method of claim 1 wherein the second energetic beam is directed at the nanopore nucleation site for a second time duration that imposes a second beam dose which causes removal of a plurality of edge atoms to form a nanopore in the nanometric material having a diameter less than about 1000 Å.

3. The method of claim 1 wherein the nanometric material is selected from the group consisting of graphene, few-layer graphene, fluorographene, graphane, and graphene oxide.

4. The method of claim 1 , wherein the nanometric material is selected from the group consisting of hexagonal-BN, mono-atomic glasses, MoS 2 , WS 2 , MoSe 2 , MoTe 2 , TaSe 2 , NbSe 2 , NiTe 2 , and Bi 2 Te 3 .

5. The method of claim 1 further comprising first disposing on the nanometric material a patterned masking material that includes openings through which the energetic beams can be directed at the nanometric material.

6. The method of claim 1 wherein the first energetic beam comprises an ion beam selected from the group consisting of argon, gallium, neon, hydrogen/proton, and helium ion beams.

7. The method of claim 1 wherein the first energetic beam and the second energetic beam each are ion beams.

8. The method of claim 1 wherein the first energetic beam is an ion beam and the second energetic beam is an electron beam.

9. The method of claim 1 wherein forming a nanopore comprises forming a nanopore having an extent that is between about 3 Å and about 1000 Å.

10. The method of claim 1 further comprising detecting, during direction of the second energetic beam to the nanometric material, beam particles that are transmitted through a forming nanopore, and controlling the second energetic beam in response to the detection to form a nanopore of a selected extent.

11. The method of claim 1 further comprising maintaining the nanometric material at a temperature no greater than about 300 K when the first energetic beam is directed at the nanometric material.

12. The method of claim 11 further comprising maintaining the nanometric material at a temperature no greater than about 200 K when the first energetic beam is directed at the nanometric material.

13. The method of claim 1 further comprising maintaining the nanometric material at a temperature no greater than about 300 K when the second energetic beam is directed at the nanometric material.

14. The method of claim 13 , further comprising maintaining the nanometric material at a temperature no greater than about 200 K when the second energetic beam is directed at the nanometric material.

15. The method of claim 1 wherein forming a nanopore nucleation site comprises forming an array of nanopore nucleation sites, and wherein forming a nanopore at the nanopore nucleation site comprises forming a nanopore at each site in the array of nanopore nucleation sites.

16. The method of claim 15 wherein forming an array of nanopore nucleation sites comprises forming a nanopore nucleation site array having a density of at least about 1000 nanopore nucleation sites/cm 2 , and wherein forming a nanopore comprises forming a nanopore at each site in the array of nanopore nucleation sites.

17. The method of claim 1 further comprising a first step of disposing the nanometric material on a support structure for processing by the first and second energetic beams.

18. The method of claim 17 further comprising a first step of synthesizing the nanometric material and transferring the synthesized material to the support structure.

19. The method of claim 17 wherein the support structure includes an aperture across which the nanometric material extends.

20. The method of claim 19 wherein the support structure comprises a transmission electron microscopy grid.

Assignees

• Russo Christopher John
• Golovchenko Jene
• Branton Daniel
• Harvard College

Inventors

• Russo Christopher John
• Golovchenko Jene
• Branton Daniel

Classifications

• B32B3/266

  characterised by an apertured layer, the apertures going through the whole thickness of the layer, e.g. expanded metal, perforated layer, slit layer regular cells B32B3/12 · CPC title

• G01N33/48721

  Investigating individual macromolecules, e.g. by translocation through nanopores (Coulter counters in general G01N15/12; fabrication methods for nanoscale apertures B81B1/00; sequencing of nucleic acids C12Q1/68) · CPC title

• B81B2207/056

  of static structures · CPC title

• B81B2203/0127

  Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function · CPC title

• B81B2201/0214

  Biosensors; Chemical sensors · CPC title