Resonator

Patent metadata

Field	Value
Publication number	US-9611139-B2
Application number	US-201514613402-A
Country	US
Kind code	B2
Filing date	Feb 4, 2015
Priority date	Jun 29, 2012
Publication date	Apr 4, 2017
Grant date	Apr 4, 2017

Abstract

A micro-electro-mechanical device with a closed feed-back damping loop is provided. Displacement in the mechanical resonator is opposed with a damping force determined by the closed feed-back loop that comprises a filter with a peaked frequency response, and associated phase adjustment. An oscillation-free configuration that allows high signal amplification is achieved.

First claim

The invention claimed is:

1. A micro-electro-mechanical device, comprising:
a resonator;
a feed-back loop, wherein the feed-back loop is adjusted to damp the resonator with an electrical force feed-back mechanism,
wherein the feed-back loop includes a filter with a peaked frequency response that peaks at a defined resonant frequency, and
wherein amplification of the peaked frequency in a pass band of frequencies is multifold to amplification of the peaked frequency response beyond the pass band of frequencies.

2. A micro-electro-mechanical device according to claim 1 , wherein a mechanical resonant frequency of the resonator is within the bass band of the peaked frequency response.

3. A micro-electro-mechanical device according to claim 1 , wherein the quality factor of the filter is above 1.

4. A micro-electro-mechanical device according to claim 1 , wherein the quality factor of the filter is in the range 3 to 10.

5. A micro-electro-mechanical device according to claim 1 , wherein a loop gain of the feed-back loop for frequencies below the resonant frequency is less than 1.

6. A micro-electro-mechanical device according to claim 1 , wherein a loop gain of the feed-back loop for frequencies below the resonant frequency is in the range 0.1 to 0.3.

7. A micro-electro-mechanical device according to claim 1 , wherein the filter is a low-pass filter and the sign of the feed-back amplification of the feed-back loop is positive.

8. A micro-electro-mechanical device according to claim 1 , wherein the filter is a high-pass filter and the sign of the feed-back amplification of the feed-back loop is negative.

9. A micro-electro-mechanical device according to claim 1 , wherein the filter is a combination of a band-pass filter, and an all-pass filter and the sign of the of the feed-back amplification of the feed-back loop is positive.

10. A micro-electro-mechanical device according to claim 1 , wherein the micro-electro-mechanical device is a sensing device.

11. A micro-electro-mechanical device according to claim 1 , wherein the micro-electro-mechanical device is a sensor of angular motion.

12. A micro-electro-mechanical device according to claim 11 , wherein the micro-electro-mechanical device is configured to detect displacement by means of motion, stress or strain based on capacitive effect, piezoelectric effect, electromagnetic effect or piezoresistive effect.

13. A micro-electro-mechanical device according to claim 1 , wherein the micro-electro-mechanical device is a sensor of linear motion.

14. A micro-electro-mechanical device according to claim 13 , wherein the micro-electro-mechanical device is configured to detect displacement by means of motion, stress or strain based on capacitive effect, piezoelectric effect, electromagnetic effect or piezoresistive effect.

15. A micro-electro-mechanical device according to claim 1 , wherein the feed-back loop is configured to induce damping by means of force, torque, stress or strain based on electrostatic effect, piezoelectric effect, electromagnetic effect, thermoelastic effect, electrostriction or magnetostriction.

16. A method for operating a micro-electro-mechanical device, comprising a resonator and a feed-back loop, the method comprising:
damping the resonator with an electrical force feed-back mechanism of the feed-back loop;
controlling damping by the feed-back loop by a filter with a peaked frequency response that peaks at a defined resonant frequency; and
adjusting a mechanical resonant frequency of the resonator within a bass band of the peaked frequency response, wherein amplification of the peaked frequency response in the pass band of frequencies is multifold to amplification of the peaked frequency response beyond the pass band of frequencies.

Assignees

• Murata Manufacturing Co

Inventors

• Kuisma Heikki

Classifications

• G01P15/097 Primary

  by vibratory elements · CPC title

• H03H9/02338

  Suspension means · CPC title

• G01C19/56

  Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces · CPC title

• G01P2015/0882

  for providing damping of vibrations · CPC title

• G01P15/125

  by capacitive pick-up · CPC title