Magnetically tunable microstructured surfaces

Patent metadata

Field	Value
Publication number	US-9610580-B2
Application number	US-201414294829-A
Country	US
Kind code	B2
Filing date	Jun 3, 2014
Priority date	Jun 3, 2013
Publication date	Apr 4, 2017
Grant date	Apr 4, 2017

Abstract

Provided in one embodiment is a dynamically tunable structure including an elastic layer, and a plurality of ferromagnetic micropillars disposed over the elastic layer. The elastic layer may have an elasticity that is greater than an elasticity of the micropillars.

First claim

What is claimed:

1. A structure comprising:
an elastic layer, and
a plurality of ferromagnetic micropillars disposed over the elastic layer,
wherein the elastic layer has an elasticity that is greater than an elasticity of the micropillars.

2. The structure of claim 1 , wherein the micropillars comprise at least one of nickel, cobalt and iron.

3. The structure of claim 1 , wherein the micropillars have at least one of
a diameter of less than or equal to about 100 microns, and
a height of less than or equal to about 100 microns.

4. The structure of claim 1 , wherein the micropillars have an aspect ratio of at least about 2.

5. The structure of claim 1 , wherein the micropillars are cylindrical.

6. The structure of claim 1 , wherein the micropillars are arranged in a periodic array.

7. The structure of claim 1 , wherein the micropillars have a homogeneous composition.

8. The structure of claim 1 , wherein the elastic layer comprises a polymer.

9. The structure of claim 1 , wherein the elastic layer comprises PDMS.

10. A method of producing a structure comprising:
patterning a photoresist disposed over a substrate to form a template,
disposing a ferromagnetic material over the substrate to form micropillars comprising the ferromagnetic material,
removing the photoresist,
bonding the micropillars to an elastic layer, and
removing the substrate,
wherein the elastic layer has an elasticity that is greater than an elasticity of the micropillars.

11. The method of claim 10 , further comprising:
disposing a seed layer over the substrate, and
removing the seed layer.

12. The method of claim 10 , further comprising thermally annealing the micropillars.

13. The method of claim 10 , further comprising disposing an adhesion layer over the substrate.

14. The method of claim 10 , further comprising disposing silica over the micropillars.

15. The method of claim 10 , further comprising forming the elastic layer.

16. The method of claim 10 , wherein disposing the ferromagnetic material comprises at least one of an electroplating process, a chemical vapor deposition process, a plasma vapor deposition process, and an electroless plating process.

17. A method comprising:
applying a magnetic field to a structure, wherein the structure comprises a plurality of ferromagnetic micropillars disposed over an elastic layer, to change a tilt angle of at least some of the micropillars relative to a normal of the elastic layer,
wherein the elastic layer has an elasticity that is greater than an elasticity of the micropillars.

18. The method of claim 17 , wherein the tilt angle of the at least some of the micropillars after the application of the magnetic field is in the range of about 0° to about 60° relative to the normal of the elastic layer.

19. The method of claim 17 , wherein the change in the tilt angle of the at least some of the micropillars produces a change in at least one of the surface drag, optical properties, spreading characteristics, wetting characteristics, heat transfer, surface adhesive properties and audio characteristics of the structure.

20. The method of claim 17 , wherein the tilt angles among the at least some of the micropillars relative to the normal of the elastic layer after the application of the magnetic field are uniform.

Assignees

• Wang Evelyn N
• Zhu Yangying
• Xiao Rong
• Massachusetts Inst Technology

Inventors

• Wang Evelyn N
• Zhu Yangying
• Xiao Rong

Classifications

• H10D64/011

  of electrodes ohmically coupled to a semiconductor · CPC title

• B41F5/24

  for flexographic printing · CPC title

• B01L2300/123

  Flexible; Elastomeric · CPC title

• C12M1/12

  with sterilisation, filtration or dialysis means · CPC title

• B01L3/502761 Primary

  specially adapted for handling suspended solids or molecules independently from the bulk fluid flow, e.g. for trapping or sorting beads or physically stretching molecules · CPC title