Method of forming acoustic resonator using intervening seed layer

Patent metadata

Field	Value
Publication number	US-9608589-B2
Application number	US-91198610-A
Country	US
Kind code	B2
Filing date	Oct 26, 2010
Priority date	Oct 26, 2010
Publication date	Mar 28, 2017
Grant date	Mar 28, 2017

Abstract

A method of forming an acoustic resonator includes forming a seed layer on a first electrode layer, forming a piezoelectric layer directly on a surface of the seed layer, and forming a second electrode layer on the piezoelectric layer. The piezoelectric layer includes multiple crystals of piezoelectric material, and the seed layer causes crystal axis orientations of the crystals to be substantially perpendicular to the surface of the seed layer.

First claim

The invention claimed is:

1. A method of forming an acoustic resonator, the method comprising:
forming a seed layer on a first electrode layer;
forming a piezoelectric layer directly on a surface of the seed layer, the piezoelectric layer comprising a plurality of crystals, wherein the seed layer causes the plurality of crystals to grow with corresponding crystal axis orientations substantially perpendicular to and in a direction away from the surface of the seed layer, and each said crystal axis orientation is substantially aligned with one another; and
forming a second electrode layer on the piezoelectric layer.

2. The method of claim 1 , wherein the substantially perpendicular crystal axis orientations of the plurality of crystals of the piezoelectric layer maximize a coupling coefficient of the acoustic resonator.

3. The method of claim 1 , wherein the seed layer comprises aluminum nitride (AlN).

4. The method of claim 3 , wherein the piezoelectric layer comprises zinc oxide (ZnO).

5. The method of claim 4 , wherein the seed layer is formed to a thickness of about 10 nm to about 100 nm.

6. The method of claim 4 , wherein the seed layer is formed to a thickness of about 10 nm to about 30 nm.

7. A method of forming an acoustic transducer device, the method comprising:
forming a first seed layer on a semiconductor substrate;
forming a first electrode layer directly on the first seed layer;
forming a second seed layer on the first electrode layer;
forming a piezoelectric layer directly on the second seed layer, the piezoelectric layer comprising a plurality of crystals of piezoelectric material, wherein the second seed layer comprises a material that causes of the plurality of crystals to grow with c-axis orientations substantially perpendicular to and in a direction away from a top surface of the second seed layer and each said c-axis orientation is substantially aligned with one another; and
forming a second electrode layer on the piezoelectric layer.

8. The method of claim 7 , further comprising:
forming an acoustic mirror on the semiconductor substrate, wherein the first seed layer is formed directly on a surface of the acoustic mirror.

9. The method of claim 8 , wherein the acoustic mirror comprises a Bragg reflector.

10. A method of forming an acoustic resonator, the method comprising:
forming a seed layer on a first electrode layer;
forming a piezoelectric layer directly on a surface of the seed layer, the piezoelectric layer comprising a piezoelectric material including a plurality of crystals, wherein the seed layer causes the plurality of crystals to grow with corresponding c-axes oriented substantially perpendicular to and in a direction away from the surface of the seed layer, and each said c-axis is substantially aligned with one another; and
forming a second electrode layer on the piezoelectric layer.

11. The method of claim 10 , wherein the substantially perpendicular crystal axis orientations of the plurality of crystals of the piezoelectric layer maximize a coupling coefficient of the acoustic resonator.

12. The method of claim 10 , wherein the piezoelectric layer comprises zinc oxide (ZnO).

13. The method of claim 12 , wherein the seed layer comprises aluminum nitride (AlN).

14. The method of claim 13 , wherein the seed layer is formed to a thickness of about 10 nm to about 100 nm.

15. The method of claim 13 , wherein the seed layer is formed to a thickness of about 10 nm to about 30 nm.

Assignees

• Grannen Kevin J
• Feng Chris
• Nikkel Phil
• Choy John
• Avago Technologies General Ip

Inventors

• Grannen Kevin J
• Feng Chris
• Nikkel Phil
• Choy John

Classifications

• H03H9/175

  Acoustic mirrors · CPC title

• H03H2003/021

  the resonators or networks being of the air-gap type · CPC title

• H03H9/173

  Air-gaps · CPC title

• H03H2003/025

  the resonators or networks comprising an acoustic mirror · CPC title

• H03H3/02 Primary

  for the manufacture of piezoelectric or electrostrictive resonators or networks (H03H3/08 takes precedence) · CPC title