193 nm laser and an inspection system using a 193 nm laser

Patent metadata

Field	Value
Publication number	US-9608399-B2
Application number	US-201414210355-A
Country	US
Kind code	B2
Filing date	Mar 13, 2014
Priority date	Mar 18, 2013
Publication date	Mar 28, 2017
Grant date	Mar 28, 2017

Abstract

An improved laser uses a pump laser with a wavelength near 1109 nm and a fundamental wavelength near 1171 nm to generate light at a wavelength between approximately 189 nm and approximately 200 nm, e.g. 193 nm. The laser mixes the 1109 nm pump wavelength with the 5 th harmonic of the 1171 nm fundamental, which is at a wavelength of approximately 234.2 nm. By proper selection of non-linear media, such mixing can be achieved by nearly non-critical phase matching. This mixing results in high conversion efficiency, good stability, and high reliability.

First claim

The invention claimed is:

1. A laser for generating light, the laser comprising:
a pump laser configured to generate a pump frequency having a corresponding wavelength of between approximately 1105 nm and approximately 1130 nm;
a fundamental laser configured to generate a fundamental frequency from a portion of the pump frequency, the fundamental frequency having a corresponding wavelength of between approximately 1150 nm and approximately 1175 nm;
a fifth harmonic generator module configured to generate a fifth harmonic of the fundamental frequency; and
a frequency mixing module configured to combine the pump frequency and the fifth harmonic frequency to generate an output wavelength between approximately 189 nm and approximately 200 nm,
wherein the frequency mixing module further comprises an optical cavity configured to recirculate an unconsumed portion of the pump frequency.

2. The laser of claim 1 , wherein the fifth harmonic generator comprises a first stage configured to generate a second harmonic from a portion of the fundamental frequency.

3. The laser of claim 2 , wherein the first stage includes a Lithium triborate (LBO) crystal.

4. The laser of claim 2 , wherein the fifth harmonic generator further comprises:
a second stage configured to generate a fourth harmonic from the second harmonic; and
a third stage configured to generate the fifth harmonic by combining the fourth harmonic and a portion of the fundamental frequency.

5. The laser of claim 4 , wherein at least one of the second and third stages includes at least one of an annealed Cesium Lithium Borate (CLBO) crystal, an annealed LBO crystal, a hydrogen-annealed CLBO crystal and a hydrogen-annealed LBO crystal.

6. The laser of claim 2 , wherein the fifth harmonic generator further comprises:
a second stage configured to generate a third harmonic by combining a portion of the second harmonic and a portion of the fundamental frequency; and
a third stage configured to generate the fifth harmonic by combining the third harmonic and a portion of the second harmonic.

7. The laser of claim 6 , wherein the second stage includes an LBO crystal or an annealed LBO crystal.

8. The laser of claim 6 , wherein the third stage includes at least one of a Cesium Lithium Borate (CLBO) crystal, an annealed CLBO crystal, and a hydrogen-annealed CLBO crystal.

9. The laser of claim 1 , wherein the fundamental laser comprises one of a Raman shifter, a Raman oscillator, and a Raman amplifier.

10. The laser of claim 9 , wherein the Raman shifter, Raman oscillator or Raman amplifier includes one of a doped fused-silica optical fiber, a germania-doped fused-silica optical fiber, and an undoped fused-silica optical fiber.

11. The laser of claim 1 , wherein the pump laser includes one of an ytterbium (Yb)-doped fiber and an infra-red diode laser.

12. The laser of claim 11 , wherein the laser diode uses quantum dot technology.

13. The laser of claim 1 , wherein the frequency mixing module includes an annealed Cesium Lithium Borate (CLBO) crystal or a hydrogen-annealed CLBO crystal.

14. A method of generating light, the method comprising:
generating a pump frequency having a corresponding wavelength of between approximately 1105 nm and approximately 1130 nm;
generating a fundamental frequency from a portion of the pump frequency, the fundamental frequency corresponding to a wavelength between approximately 1150 nm and approximately 1175 nm;
generating a fifth harmonic from the fundamental frequency; and
combining the pump frequency and the fifth harmonic to generate an output wavelength between approximately 189 nm and approximately 200 nm,
wherein said combining the pump frequency and the fifth harmonic frequency includes recirculating an unconsumed portion of the pump frequency.

15. The method of claim 14 , wherein said generating the fundamental frequency includes Raman shifting the pump frequency.

16. The method of claim 14 , wherein said combining the pump frequency and the fifth harmonic frequency uses an annealed CLBO crystal or a hydrogen-annealed CLBO crystal.

17. The method of claim 14 , wherein said generating the fifth harmonic frequency from the fundamental frequency comprises:
generating a second harmonic from a portion of the fundamental frequency;
generating a fourth harmonic from the second harmonic; and
generating the fifth harmonic by combining the fourth harmonic and a portion of the fundamental frequency.

18. The method of claim 14 , wherein said generating the fifth harmonic frequency from the fundamental frequency comprises:
generating a second harmonic from a portion of the fundamental frequency;
generating a third harmonic by combining a portion of the second harmonic and a portion of the fundamental frequency; and
generating the fifth harmonic by combining the third harmonic and a portion of the second harmonic.

Assignees

• Kla Tencor Corp

Inventors

• Chuang Yung-Ho
• Armstrong J Joseph
• Liou Justin Dianhuan
• Dribinski Vladimir
• Fielden John

Classifications

• G01N21/8806

  Specially adapted optical and illumination features · CPC title

• H01S3/0078

  Frequency filtering · CPC title

• G01N21/9501

  Semiconductor wafers (manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20) · CPC title

• H01S3/0602

  Crystal lasers or glass lasers (H01S3/063 takes precedence) · CPC title

• H01S3/1618

  ytterbium · CPC title