Laser processing device

Patent metadata

Field	Value
Publication number	US-9608397-B2
Application number	US-201514791493-A
Country	US
Kind code	B2
Filing date	Jul 6, 2015
Priority date	Jul 31, 2014
Publication date	Mar 28, 2017
Grant date	Mar 28, 2017

Abstract

Provided is a laser processing device capable of performing high-power laser processing while preventing reduction of life duration of a light source for excitation light. By collecting the light emitted from single emitters of a plurality of single emitter LDs onto one end face of an optical fiber cable, high-power excitation light is transmitted to a marking head through the optical fiber cable. Excitation light emitted from the other end face of the optical fiber cable is separated into first excitation light and second excitation light. The first excitation light excites a first laser medium to generate laser light. The generated laser light enters a second laser medium. The second excitation light enters the second laser medium. With this, the second laser medium is excited, and the laser light that has entered the second laser medium from the first laser medium is amplified.

First claim

What is claimed is:

1. A laser processing device for processing an object by irradiating the object with laser light, the device comprising:
an excitation light generating unit configured to emit excitation light;
an excitation light transmission medium having one end and the other end, and configured to transmit the excitation light emitted from the excitation light generating unit from the one end to the other end;
a laser light output unit configured to emit laser light based on the excitation light transmitted through the excitation light transmission medium; and
a laser light scanning unit configured to scan the laser light emitted from the laser light output unit over a surface of the object, wherein
the excitation light generating unit includes:
a plurality of light sources each having a single light emitting spot for emitting excitation light; and
a light collection optical mechanism configured to collect the excitation light emitted from the light emitting spots of the plurality of light sources onto the one end of the excitation light transmission medium, and

the laser light output unit includes:
an excitation light separator configured to separate the excitation light emitted from the other end of the excitation light transmission medium into first excitation light and second excitation light;
an oscillator having a first laser medium excited by the first excitation light separated by the excitation light separator, a reflecting member disposed so as to reflect induced emission light emitted from a first end of the first laser medium toward the first end, and an output mirror disposed so as to reflect induced emission light emitted from a second end of the first laser medium toward the second end and emitting a part of induced emission light amplified by the first laser medium as the laser light, the oscillator configured to cause oscillation of the laser light by the reflecting member and the output mirror; and
an amplifier having a second laser medium excited by the second excitation light separated by the excitation light separator, the amplifier configured to amplify the laser light emitted from the output mirror of the oscillator by the second laser medium.

2. The laser processing device according to claim 1 , wherein
the plurality of light sources of the excitation light generating unit are connected in series.

3. The laser processing device according to claim 1 , wherein
the excitation light generating unit further includes: a casing for containing the plurality of light sources and the light collection optical mechanism, and
the plurality of light sources and the light collection optical mechanism are fixed within the casing.

4. The laser processing device according to claim 1 , wherein
the excitation light generating unit further includes: a plurality of volume bragg gratings provided for the respective light sources, and
the volume bragg gratings each function as an external resonator of corresponding one of the light sources by reflecting excitation light in a previously determined wavelength region.

5. The laser processing device according to claim 4 , wherein
the previously determined wavelength region is a wavelength region of a constant width and including 879 nm, and
the first laser medium generates laser light whose wavelength is 1064 nm based on excitation light whose wavelength is 879 nm.

6. The laser processing device according to claim 1 , further comprising:
a main body including the excitation light generating unit; and
a head provided separately from the main body, wherein
the head includes the laser light output unit and the laser light scanning unit, and
the excitation light transmission medium is an optical fiber cable connecting the main body and the head such that the excitation light generated by the excitation light generating unit is transmitted to the laser light output unit.

7. The laser processing device according to claim 1 , wherein
the oscillator further includes:
a Q switch disposed between the reflecting member and the output mirror.

8. The laser processing device according to claim 1 , wherein
the laser light emitted from the output mirror of the oscillator is transmitted from a third end of the second laser medium to a fourth end of the second laser medium in the amplifier, and
the laser light output unit further includes
a first optical element configured to reflect the second excitation light separated by the excitation light separator toward the fourth end of the second laser medium.

9. The laser processing device according to claim 8 , wherein
the laser light output unit further includes:
a third optical element configured to reflect the laser light emitted from the fourth end of the second laser medium toward the laser light scanning unit.

10. The laser processing device according to claim 1 , further comprising:
a focal position adjusting unit provided between the laser light output unit and the laser light scanning unit, wherein
the focal position adjusting unit includes:
a first lens and a second lens provided along a path of laser light from the laser light output unit to the laser light scanning unit; and
a lens moving unit configured to adjust a focal position of the laser light applied to the object by changing a relative distance between the first lens and the second lens.

11. The laser processing device according to claim 8 , wherein
the laser light output unit further includes a second optical element configured to reflect the laser light emitted from the output mirror of the oscillator toward the third end of the second laser medium.

Assignees

• Keyence Co Ltd

Inventors

• Sato Masao

Classifications

• H01S3/0071

  Beam steering, e.g. whereby a mirror outside the cavity is present to change the beam direction · CPC title

• H01S3/094053 Primary

  Fibre coupled pump, e.g. delivering pump light using a fibre or a fibre bundle · CPC title

• B23K26/352

  for surface treatment · CPC title

• H01S5/141

  using a wavelength selective device, e.g. a grating or etalon (H01S5/146 takes precedence) · CPC title

• H01S3/0941

  of a laser diode · CPC title