Method for processing a semiconductor device with two closely spaced gates
US-2021391526-A1 · Dec 16, 2021 · US
US9608191B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9608191-B2 |
| Application number | US-201213814595-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 2, 2012 |
| Priority date | Jun 30, 2011 |
| Publication date | Mar 28, 2017 |
| Grant date | Mar 28, 2017 |
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A superconducting thin film having excellent critical current characteristics is provided. A substrate for a superconducting thin film includes a substrate body ( 10 A) having a main surface ( 10 B) in which the root mean square slope RΔq of a roughness curve is 0.4 or less.
Opening claim text (preview).
The invention claimed is: 1. A superconducting thin film, comprising: a substrate comprising a substrate body comprising a main surface in which a root mean square slope, RΔq, of a roughness curve is 0.12 or less, and wherein, in the substrate, an arithmetic mean roughness, Ra, of the roughness curve of the main surface is 2 nm or less; and a superconducting layer, on the main surface of the substrate, comprising an oxide superconductor. 2. The superconducting thin film of claim 1 , wherein the oxide superconductor comprises (RE)Ba 2 Cu 3 O 7−δ , where (RE) is a rare earth element. 3. The superconducting thin film of claim 2 , wherein (RE) is at least one element selected from the group consisting of Y, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb and Lu. 4. The superconducting thin film of claim 1 , further comprising: an intermediate layer between the substrate and the superconducting layer. 5. The superconducting thin film of claim 1 , wherein the root mean square slope, RΔq, of the roughness curve of the main surface is 0.01 to 0.12. 6. The superconducting thin film of claim 1 , wherein the superconducting layer comprises the oxide superconductor in an amount of 90% or more. 7. The superconducting thin film of claim 1 , wherein the oxide superconductor is a copper oxide superconductor. 8. The superconducting thin film of claim 1 , wherein the oxide superconductor comprises at least one copper oxide superconductor selected from the group consisting of: (RE)Ba 2 Cu 3 O 7−δ , where (RE) is a rare earth element; Bi 2 Sr 2 CaCu 2 O 8+δ , optionally doped with Pb at one or more Bi sites; Bi 2 Sr 2 Ca 2 Cu 3 O 10+δ , optionally doped with Pb at one or more Bi sites; (La, Ba) 2 CuO 4−δ ; (Ca, Sr)CuO 2−δ , optionally with one or more Ca sites replaced by Ba; (Nd, Ce) 2 CuO 4−δ ; (Cu, Mo)Sr 2 (Ce, Y) s Cu 2 O, wherein s is 1, 2, 3 or 4; Ba(Pb, Bi)O 3 ; and Tl 2 Ba 2 Ca n−1 Cu n O 2n +4 , wherein n is an integer of 2 or more. 9. The superconducting thin film of claim 1 , wherein the oxide superconductor comprises YBa 2 Cu 3 O 7−δ .
Continuous and nonuniform or irregular surface on layer or component [e.g., roofing, etc.] · CPC title
Films or wires on bases or cores · CPC title
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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