Graphene structure, method for producing the same, electronic device element and electronic device

Patent metadata

Field	Value
Publication number	US-9607725-B2
Application number	US-64343409-A
Country	US
Kind code	B2
Filing date	Dec 21, 2009
Priority date	Dec 11, 2009
Publication date	Mar 28, 2017
Grant date	Mar 28, 2017

Abstract

Provided are a graphene structure and a method for producing the same in which graphene can be patterned with high precision, and thereby microfabrication of electronic device elements and electronic devices using graphene is possible and the manufacturing cost can be notably reduced. A resist film is precisely patterned on a substrate, hydrophilized films are formed in openings of the resist film, and then GO is selectively fixed on the portions of the hydrophilized films by a chemical bond utilizing the hydrophilicity of the GO, and the GO is reduced to obtain a graphene structure in which graphene is selectively fixed to only the portions of the hydrophilized films. Thus, the graphene structure is constituted by disposing graphene on a substrate and forming a bond, by hydrophilization treatment, between the hydrophilized portion of the substrate and the graphene and/or between the unhydrophobized portion of the substrate and the graphene.

First claim

What is claimed is:

1. A method for producing a graphene structure, the method comprising:
preparing a substrate;
conducting a hydrophilization treatment on a predetermined portion of the substrate by plasma treatment with oxygen (O 2 ) plasma;
conducting a base coating treatment comprising an adhesion agent on a surface of the substrate, wherein the adhesion agent is selectively disposed in a pattern at a predetermined portion of the substrate between the surface of the substrate and a hydrophobization treatment;
conducting the hydrophobization treatment by forming a resist or a halide having the pattern at the predetermined portion of the substrate;
disposing graphene on the surface of the substrate exposed from the pattern of the resist or halide;
removing the resist or the halide from the hydrophilized substrate;
reducing the graphene disposed on the surface of the substrate; and
forming an electrode connected to the graphene disposed on the surface of the substrate.

2. A method for producing a graphene structure, the method comprising:
preparing a substrate comprising silicon coated by silicon dioxide (SiO 2 );
subjecting a predetermined portion of the substrate to a base coating treatment comprising an adhesion agent and a hydrophobization treatment, wherein the adhesion agent is selectively disposed in a predetermined pattern between a surface of the substrate and the hydrophobization treatment; and
disposing graphene to an unhydrophobized portion of the substrate.

3. The method for producing the graphene structure according to claim 2 , wherein the hydrophobization treatment is performed by forming a film having hydrophobicity by applying or immobilizing a hydrophobization treatment agent to the predetermined portion the substrate.

4. The method for producing the graphene structure according to claim 3 , wherein the film having hydrophobicity is a silane coupling compound film, a self-assembled monolayer, a polymer compound film, or a halide film.

5. A method for producing a graphene structure, the method comprising:
preparing a substrate;
subjecting a predetermined portion of the substrate to a base coating treatment comprising an adhesion agent and a hydrophobization treatment, the hydrophobization treatment comprising forming a resist or a halide having a predetermined pattern on the substrate before hydrophilization treatment of the substrate, wherein the adhesion agent is selectively disposed based on the predetermined pattern between a surface of the substrate and the hydrophobization treatment;
subjecting the substrate to the hydrophilization treatment by plasma treatment with oxygen (O 2 ) plasma;
removing the resist or the halide from the hydrophilized substrate; and
disposing graphene to the hydrophilized portion of the substrate,
wherein the hydrophilization treatment is performed so as to hydrophilize the surface of the substrate exposed from the resist or the halide pattern.

6. The method for producing the graphene structure according to claim 2 , the method comprising:
reducing the graphene disposed to the substrate.

7. The method for producing the graphene structure according to claim 2 , the method comprising:
forming an electrode connected to the graphene disposed to the substrate.

8. The method for producing the graphene structure according to claim 3 , wherein the film having hydrophilicity contains an amino group serving as a group containing a nitrogen atom.

Assignees

• Sandhu Adarsh
• Empire Technology Dev Llc

Inventors

• Sandhu Adarsh

Classifications

• B82Y30/00

  Nanotechnology for materials or surface science, e.g. nanocomposites · CPC title

• B82Y40/00

  Manufacture or treatment of nanostructures · CPC title

• C01B31/0476

  Chemistry & Metallurgy · mapped topic

• H01L31/1884

  Electricity · mapped topic

• H01L31/022466

  Electricity · mapped topic