Command data generation method, positioning apparatus, lithography apparatus, and article manufacturing method
US-2015378342-A1 · Dec 31, 2015 · US
US9606517B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-9606517-B2 |
| Application number | US-201214241366-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 10, 2012 |
| Priority date | Aug 29, 2011 |
| Publication date | Mar 28, 2017 |
| Grant date | Mar 28, 2017 |
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An actuator control method and an actuator control device that perform energy evaluation control that compares kinetic energy of a controlled object and work that can be done by braking and switches driving to braking at a point of time at which the kinetic energy of the controlled object and the work become equal, and also repeatedly makes a comparison between the kinetic energy of the controlled object and the work at each preset time, as a new control method that replaces PID control in mechanics for effectively utilizing vehicle energy to improve vehicle fuel consumption and control methods thereof, a control result is obtained by a simpler method.
Opening claim text (preview).
The invention claimed is: 1. An actuator control method of accelerating and decelerating a controlled object to reach a target position by controlling an output of a control force of an actuator, comprising: comparing a kinetic energy of the controlled object with an amount of a work that can be done by braking, which work is defined as the amount of work done by braking the controlled object in motion in a deceleration state until the controlled object reaches the target position from a present position, by a comparison unit of an actuator control device, switching from driving to braking when the kinetic energy of the controlled object and the amount of the work that can be done by braking become equal, by a switching unit of the actuator control device; repeatedly comparing the kinetic energy of the controlled object with the amount of the work that can be done by braking at each preset time, by the actuator control device; taking a sum of the kinetic energy of the controlled object and an absolute value of the amount of the work that can be done by braking, and setting the sum to a control evaluation value for ending control, by the actuator control device; and reducing an upper limit value of a control output in proportion to the control evaluation value, by the actuator control device. 2. The actuator control method according to claim 1 , further comprising: ending the control when the control evaluation value is zero. 3. The actuator control method according to claim 2 , further comprising: correcting the kinetic energy to “(kinetic energy)−(kinetic energy at target velocity)”, when the controlled object has a target velocity at a target position. 4. The actuator control method according to claim 2 , wherein, if a target value is taken to be Tr , a controlled value to be X, a mass to be m, and the kinetic energy is defined by “V=(½)×m×(dX/dt) 2 ” and the amount of the work that can be done by braking by “W=m×αb×(Tr−X)”, in a case where a deviation (Tr−X) between the target value Tr and the controlled value X is positive, an acceleration (αa) is set based on a maximum acceleration (αp) and a deceleration (αb) based on a maximum deceleration (αm) and, in a case where the deviation (Tr−X) is negative, the acceleration (αa) is set based on the maximum deceleration (αm) and the deceleration (αb) based on the maximum acceleration (αp), and further, in a case where the kinetic energy is smaller than the absolute value of the amount of the work that can be done by braking, output acceleration is set to the acceleration (αa) and, in a case where the kinetic energy is larger than the absolute value of the amount of the work that can be done by braking, the output acceleration is set to the deceleration (αb). 5. The actuator control method according to claim 2 , wherein, if a target value is taken to be Tr, a controlled value to be X, a mass to be m, a calculation period to be Δt, a present controlled value to be X 0 , a controlled value before one calculation period to be X −1 , and a controlled value before two calculation periods to be X −2 , and the kinetic energy is defined by “V=(½)×m×[(X 0 −X −1 )/Δt] 2 ” and the amount of the work that can be done by braking by “W=m×αb×(Tr−X)”, in a case where a deviation (Tr−X) between the target value Tr and the controlled value X is positive, an acceleration (αa) is set based on a maximum acceleration (αp) and a deceleration (αb) based on a maximum deceleration (αm) and, in a case where the deviation (Tr−X) is negative, the acceleration (αa) is set based on the maximum deceleration (αm) and the deceleration (αb) based on the maximum acceleration (αp), and further, in a case where the kinetic energy is smaller than the absolute value of the amount of the work that can be done by braking, output acceleration is set to the acceleration (αa) and, in a case where the kinetic energy is larger than the absolute value of the amount of the work that can be done by braking, the output acceleration is set to the deceleration (αb). 6. The actuator control method according to claim 1 further comprising: correcting the kinetic energy to “(kinetic energy)−(kinetic energy at target velocity)”, when the controlled object has a target velocity at a target position. 7. The actuator control method according to claim 6 , wherein, if a target value is taken to be Tr, a controlled value to be X, a mass to be m, and the kinetic energy is defined by “V=(½)×m×(dX/dt) 2 ” and the amount of the work that can be done by braking by “W=m×αb×(Tr−X)”, in a case where a deviation (Tr−X) between the target value Tr and the controlled value X is positive, an acceleration (αa) is set based on a maximum acceleration (αp) and a deceleration (αb) based on a maximum deceleration (αm) and, in a case where the deviation (Tr−X) is negative, the acceleration (αa) is set based on the maximum deceleration (αm) and the deceleration (αb) based on the maximum acceleration (αp), and further, in a case where the kinetic energy is smaller than the absolute value of the amount of the work that can be done by braking, output acceleration is set to the acceleration (αa) and, in a case where the kinetic energy is larger than the absolute value of the amount of the work that can be done by braking, the output acceleration is set to the deceleration (αb). 8. The actuator control method according to claim 6 , wherein, if a target value is taken to be Tr, a controlled value to be X, a mass to be m, a calculation period to be Δt, a present controlled value to be X 0 , a controlled value before one calculation period to be X −1 , and a controlled value before two calculation periods to be X −2 , and the kinetic energy is defined by “V=(½)×m×[(X 0 −X −1 )/Δt] 2 ” and the amount of the work that can be done by braking by “W=m×αb×(Tr−X)”, in a case where a deviation (Tr−X) between the target value Tr and the controlled value X is positive, an acceleration (αa) is set based on a maximum acceleration (αp) and a deceleration (αb) based on a maximum deceleration (αm) and, in a case where the deviation (Tr−X) is negative, the acceleration (αa) is set based on the maximum deceleration (αm) and the deceleration (αb) based on the maximum acceleration (αp), and further, in a case where the kinetic energy is smaller than the absolute value of the amount of the work that can be done by braking, output acceleration is set to the acceleration (αa) and, in a case where the kinetic energy is larger than the absolute value of the amount of the work that can be done by braking, the output acceleration is set to the deceleration (αb). 9. The actuator control method according to claim 1 , wherein, if a target value is taken to be Tr, a controlled value to be X, a mass to be m, and the kinetic energy is defined by “V=(½)×m×(dX/dt) 2 ” and the amount of the work that can be done by braking by “W=m×αb×(Tr−X)”, in a case where a deviation (Tr−X) between the target value Tr and the controlled value X is positive, an acceleration (αa) is set based on a maximum acceleration (αp) and a deceleration (αb) based on a maximum deceleration (αm) and, in a case where the deviation (Tr−X) is negative, the acceleration (αa) is set based on the maximum deceleration (αm) and the deceleration (αb) based on the maximum acceleration (αp), and further, in a case where the kinetic energy is smaller than the absolute value of the amount of the work that can be done by braking, output acceleration is set to the acceleration (αa) and, in a case where the kinetic energy is larger than the absolute value of the amount of the work that can be done by braking, the output acceleration is set to the deceleration (αb). 10. The actuator control method according to claim 1 , wherein, if a target value is ta
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