Super-oscillatory lens device

Patent metadata

Field	Value
Publication number	US-9606415-B2
Application number	US-201314376470-A
Country	US
Kind code	B2
Filing date	Jan 18, 2013
Priority date	Feb 3, 2012
Publication date	Mar 28, 2017
Grant date	Mar 28, 2017

Abstract

A super-oscillatory lens ( 10 ) having a pre-defined pattern to spatially modulate the light beam in amplitude and/or phase which has a blocking element ( 6 ) formed integrally with the lens, or as a separate component adjacent to the lens, which is opaque to the light beam to cause diffraction of the light beam around the blocking element and formation of a shadow region ( 20 ). The lens and blocking element focus the light beam to form an elongate needle-shaped focus ( 15 ) in the shadow region ( 20 ). In any application in which it is necessary to scan a small spot over a surface, compared with a conventional objective lens focus the elongate shape of the focus relaxes the requirement on a feedback loop to maintain a constant separation between a scan head and a surface being scanned. The elongate shape is also ideal shape for materials processing applications.

First claim

The invention claimed is:

1. An optical device comprising:
a super-oscillatory lens arranged to receive a light beam having one or more wavelength components, the lens having a pre-defined pattern to spatially modulate the light beam in amplitude and/or phase; and
a blocking element formed integrally with the lens in the plane of the lens, or as a separate component adjacent to the lens, which is opaque to the light beam to cause diffraction of the light beam around the blocking element and formation of a shadow region,
wherein the super-oscillatory lens is structured and the blocking element dimensioned so that in combination they focus the light beam to form an elongate needle-shaped focus in the shadow region.

2. The device of claim 1 , wherein the needle-shaped focus extends over a distance of at least ‘n’ wavelengths of at least one of the wavelength components, wherein ‘n’ is at least 3, 4, 5, 10 or 20.

3. The device of claim 1 , wherein the needle-shaped focus has a full width half maximum perpendicular to the optical axis of less than half the wavelength of said at least one of the wavelength components, preferably over its full length.

4. The device of claim 1 , further comprising a light source operable to generate the light beam.

5. The device of claim 1 , wherein the super-oscillatory lens is formed at least in part from a binary mask which is generally opaque but is structured with a pre-defined pattern of optically transparent apertures to spatially modulate the light beam in amplitude.

6. The device of claim 5 , wherein the optically transparent apertures comprise a plurality of concentric rings.

7. The device of claim 5 , wherein the optically transparent apertures comprise a plurality of holes.

8. The device of claim 5 , wherein the super-oscillatory lens additionally includes a spatial light modulator arranged adjacent to the binary mask and operable to spatially modulate the light beam in phase and/or amplitude.

9. The device of claim 1 , wherein the super-oscillatory lens is formed at least in part from a spatial light modulator which is programmable to provide a pre-defined spatial modulation of the light beam in phase and/or amplitude.

10. The device of claim 1 , further comprising a detector arranged in a dark part of the shadow region behind the blocking element and facing the needle-shaped focus to collect back-scattered light.

11. The device of claim 1 , further comprising a detector arranged downstream of the needle-shaped focus.

12. An optical beam lithography/machining/welding apparatus comprising
a sample platform on which an object for processing can be arranged;
a head incorporating an optical device according to claim 1 ; and
a positioning apparatus operable to move the sample platform and head relative to each other to align the needle-shaped focus with any specified location on the sample so that activation of the light beam can be used to process the object locally.

13. The apparatus of claim 12 , wherein the positioning apparatus is operable to scan the needle-shaped focus in a continuous way over the object such that a part of the needle-shaped focus is maintained in intersection with a surface or buried interface of the object.

14. A materials processing method comprising:
providing an object to be processed;
positioning an optical device according to claim 1 at a location adjacent to a surface of the object such that the needle-shaped focus extends at that location into the object; and
activating the light beam to use the needle-shaped focus to process the object locally.

15. The method of claim 14 , further comprising: scanning the optical device over the object to process the object at a plurality of locations.

16. The method of claim 14 , wherein the processing achieves machining of the object by removal of material from the object.

17. The method of claim 14 , wherein the processing achieves local melting and refreezing of material from the object.

18. An imaging apparatus comprising:
a sample platform on which an object for imaging can be arranged;
a head incorporating an optical device according to claim 1 ; and
a positioning apparatus operable to move the sample platform and head relative to each other to align the needle-shaped focus with any specified location on the sample so that activation of the light beam can be used to image the object locally, the positioning apparatus being operable to scan the needle-shaped focus in a continuous way over the object such that a part of the needle-shaped focus is maintained in intersection with a surface or buried interface of the object.

19. An imaging method comprising:
providing an object to be imaged;
positioning an optical device according to claim 1 at a location adjacent to a surface of the object such that the needle-shaped focus coincides with the surface at that location;
activating the light beam to use the needle-shaped focus to probe the surface locally at said location;
detecting light from said location with the detector; and
scanning the optical device over the object to probe the surface at a plurality of locations.

Assignees

• Univ Southampton

Inventors

• Zheludev Nikolay Ivanovich
• Savo Salatore
• Roy Tapashree
• Savinov Vassili
• Dennis Mark Richard
• Rogers Edward Thomas Foss
• Lindberg Jari Juhani

Classifications

• G02B27/46

  Systems using spatial filters · CPC title

• G02B27/0988

  Diaphragms, spatial filters, masks for removing or filtering a part of the beam · CPC title

• G02B27/44

  Grating systems; Zone plate systems (G02B27/46 takes precedence) · CPC title

• G02F1/21 Primary

  by interference · CPC title

• G02B27/58

  Optics for apodization or superresolution; Optical synthetic aperture systems · CPC title