Method for depositing electrically insulating layers

Patent metadata

Field	Value
Publication number	US-9605338-B2
Application number	US-93707107-A
Country	US
Kind code	B2
Filing date	Nov 8, 2007
Priority date	Oct 11, 2006
Publication date	Mar 28, 2017
Grant date	Mar 28, 2017

Abstract

The invention relates to a method for operating an arc source, whereby an electric spark discharge is ignited and run on the surface of a target and the spark discharge is simultaneously fed a direct current with an associated constant voltage DV as well as a pulsed current generated by a periodically applied voltage signal. The voltage at the arc source is boosted over several microseconds and the shape of the voltage signal is in essence arbitrarily selectable.

First claim

The invention claimed is:

1. Method for operating an arc source, whereby an electric spark discharge is ignited and run on a surface of a target ( 5 ) to evaporate the target ( 5 ) to deposit onto a substrate, and the electric spark discharge is simultaneously fed a direct current with an associated constant voltage DV as well as a periodically applied pulsed current, characterized in that
a pulsed voltage signal ( 21 ) is generated by a pulsed voltage source delivering a desired shape of the pulsed voltage signal,
the pulsed current results from the pulsed voltage signal ( 21 ) and the pulsed voltage signal ( 21 ) is generated with a pulse length (T p ) of at least two microseconds, wherein the pulsed voltage signal and pulsed current each have ascending slopes, wherein the pulsed current reaches a pulsed current maximum after the pulsed voltage signal reaches a pulsed voltage maximum, and wherein the pulsed voltage signal remains constant at the used voltage maximum until the used current reaches the pulsed current maximum.

2. Method as in claim 1 , characterized in that a shape of the pulsed voltage signal is arbitrarily selectable.

3. Method as in claim 1 , characterized in that the frequency of the pulsed voltage signal is selected between 1 Hz and 200 kHz.

4. Method as in claim 2 , characterized in that the shape of the pulsed voltage signal is in the form of a sawtooth, a polygon, or a trapezoid.

5. Method as in claim 1 , characterized in that the pulsed voltage signal is applied in gapped succession.

6. Method as in claim 1 , characterized in that the pulsed voltage signal is turned off when a detected current threshold is exceeded.

7. Method as in claim 2 , characterized in that the shape of the pulsed voltage signal is constituted of the resultant ( 21 ) of a succession of spike pulses ( 22 ).

8. Method as in claim 7 , characterized in that the spike pulses ( 22 ) are generated by a time-controlled sequence of discharges of individual capacitors ( 19 ) or by a pulsed power supply ( 15 ).

9. Method as in claim 7 , characterized in that an edge steepness of an ascending slope ( 23 ) of each of the spike pulses ( 22 ) is at least 0.5 V/μs.

10. Method as in claim 7 , characterized in that the succession or duration of the spike pulses ( 22 ) is between 0.1 kHz and 1 MHz or, respectively, between 10 ms and 1 μs.

11. Method as in claim 7 , characterized in that a height of the spike pulses ( 22 ) exceeds that of the associated constant voltage DV by at least 10 percent.

12. Method as in claim 7 , characterized in that at least 3 spike pulses ( 22 ) are used for generating the pulsed voltage signal.

13. Method as in claim 1 , characterized in that the pulsed voltage signal is provided by a pulsed voltage supply ( 15 ) or generator unit ( 16 ) that is arbitrarily adjustable with regard to signal length, signal frequency, voltage amplitude, interpulse periods and/or shape of the signal.

14. Method as in claim 1 , characterized in that the pulsed voltage signal is provided by a pulsed voltage supply ( 15 ) or generator unit ( 16 ) that is arbitrarily adjustable with regard to the timed sequence, slope angle and/or height of the spike pulses ( 22 ).

15. Method as in claim 1 , characterized in that a steepness of the ascending slope ( 23 ) of the pulsed voltage signal is at least 0.5 V/μs.

16. Method as in claim 11 , characterized in that the pulsed voltage signal is applied over an entirety of the pulse length T p .

17. Method as in claim 1 , characterized in that insulating oxide-containing or oxidic layers are deposited.

18. Method as in claim 1 , characterized in that a material of the target ( 5 ) consists of carbon or of a material containing more than 20% carbon by volume.

19. Method for operating an arc source comprising:
igniting an electric spark discharge and running the electric spark discharge on a surface of a target to evaporate the target ( 5 ) to deposit onto a substrate;
using a voltage source to generate a pulsed voltage signal having a pulse length of at least two microseconds;
feeding the electric spark discharge a periodically applied pulsed current, wherein the pulsed current results from the pulsed voltage signal, and simultaneously feeding the electric spark discharge a direct current having a constant voltage; and wherein the pulsed voltage signal and pulsed current each have ascending slopes, wherein the pulsed current reaches a pulsed current maximum after the pulsed voltage signal reaches a pulsed voltage maximum, and wherein the pulsed voltage signal remains constant at the pulsed voltage maximum until the pulsed current reaches the pulsed current maximum.

Assignees

• Ramm Jürgen
• Wohlrab Christian
• Oerlikon Surface Solutions Ag Pfaffikon

Inventors

• Ramm Jürgen
• Wohlrab Christian

Classifications

• C23C14/08

  Oxides (C23C14/10 takes precedence) · CPC title

• C23C14/325 Primary

  Electric arc evaporation · CPC title

• C23C14/081

  of aluminium, magnesium or beryllium · CPC title

• H01J37/32064

  Circuits specially adapted for controlling the arc discharge (for plasma torches H01H1/36) · CPC title

• H01J37/32055

  Arc discharge · CPC title