Microphone with programmable frequency response

Patent metadata

Field	Value
Publication number	US-9602924-B2
Application number	US-201514859138-A
Country	US
Kind code	B2
Filing date	Sep 18, 2015
Priority date	Sep 25, 2012
Publication date	Mar 21, 2017
Grant date	Mar 21, 2017

Abstract

Methods and apparatus automatically cancel or attenuate an unwanted signal (such as low frequencies from wind buffets) from, and/or control frequency response of, a condenser microphone, or control the effective condenser microphone sensitivity before the signal reaches an ASIC or other processing circuit. As a result, the maximum amplitude signal seen by the processing circuit is limited, thereby preventing overloading the input of the processing circuit. Remaining (wanted) frequencies can be appropriately amplified to reduce the noise burden on further processing circuits. A corrective signal is applied to a bias terminal of the condenser microphone to cancel the unwanted signal. Optionally or alternatively, a controllable impedance is connected to a line that carries the signal generated by the MEMS microphone, so as to attenuate unwanted portions of the signal.

First claim

What is claimed is:

1. A MEMS microphone system comprising:
a MEMS microphone element operable to generate a MEMS microphone element signal and responsive to a bias signal with a voltage bias terminal, V bias terminal;
a processing circuit responsive to the MEMS microphone element signal and operable to generate a MEMS microphone system output, the MEMS microphone system output generally being an attenuated version of the MEMS microphone element signal;
a corrective signal generator responsive to one of either the MEMS microphone element signal or MEMS microphone element output and operable to generate a corrective signal;
a charge pump operable to generate a charge pump output; and
a filter responsive to the corrective signal and a charge pump output and operable to generate the bias signal, the filter having associated therewith a filter corner so as to substantially eliminate as much noise from a charge pump as possible, the corrective signal generally being in an audio frequency range thereby driving a terminal of the filter, the corrective signal essentially unattenuated or only marginally attenuated at the V bias terminal, the corrective signal being essentially subtracted from the MEMS microphone element signal.

2. The MEMS microphone system of claim 1 , wherein the filter is an RC filter or digital filter.

3. The MEMS microphone system of claim 1 , wherein the filter is a RC filter and further including a switch interposed between the corrective signal generator and a terminal of the capacitor of the RC filter.

4. The MEMS microphone system of claim 3 , wherein the switch is controlled by a circuit within the corrective signal generator.

5. The MEMS microphone system of claim 3 , wherein the switch is a circuit configured to monitor the MEMS microphone element signal.

6. The MEMS microphone system of claim 4 , wherein the switch is controlled by a circuit within the corrective signal generator.

7. A MEMS microphone system comprising:
a MEMS microphone element operable to generate a MEMS microphone element signal and responsive to a bias signal with a voltage bias terminal, V bias terminal;
a processing circuit responsive to the MEMS microphone element signal and operable to generate a MEMS microphone system output, the MEMS microphone system output generally being an attenuated version of the MEMS microphone element signal;
a charge pump operable to generate a charge pump output; and
a filter responsive to a charge pump output and operable to generate the bias signal, the filter having associated therewith a filter corner so as to substantially eliminate as much noise from a charge pump as possible;
a switch switchably coupling a corrective signal to the filter or the coupling the filter to ground, the corrective signal and ground being coupled to the switch at one end and the filter being coupled to the switch at an opposite end,
wherein when the switch is configured to couple the corrective signal to the filter, the corrective signal generally being in an audio frequency range thereby driving a terminal of the filter, the corrective signal essentially unattenuated or only marginally attenuated at the V bias terminal, the corrective signal being essentially subtracted from the MEMS microphone element signal.

8. The MEMS microphone system of claim 7 , further including a corrective signal generator responsive to either the MEMS microphone element signal or the MEMS microphone system output and operable to generate the corrective signal.

9. The MEMS microphone system of claim 7 , wherein when the switch is configured to couple the filter to ground, the corrective signal is unnecessary.

10. The MEMS microphone system of claim 7 , wherein the filter is a RC filter or a digital filter.

11. A MEMS microphone system comprising:
a MEMS microphone element operable to generate a MEMS microphone element signal;
a divider network formed by the MEMS microphone element and a capacitor, the divider network operable to control an impedance of the MEMS microphone element,
the capacitor having a first terminal and a second terminal and coupled to the MEMS microphone element at the first terminal, the MEMS microphone element signal coupled onto the first terminal,
the divider network causing attenuation of the MEMS microphone element signal, the amount of attenuation being at least partially based on an effective value of a capacitance of the capacitor; and
a corrective signal generator operable to generate a corrective signal applied to the second terminal of the capacitor to control the effective value of the capacitance of the capacitor such that if equal voltages are applied to the first and second terminals of the capacitor, the capacitor is effectively removed from the divider network, and the MEMS microphone element signal is not attenuated, and if unequal voltages are applied to the first and second terminals of the capacitor, the effective value of the capacitor is at least partially based on an actual value of the capacitance of the capacitor and the corrective signal;
a charge pump operable to generate a charge pump output; and
a filter responsive to the corrective signal and the charge pump output and operable to generate the bias signal, the filter having associated therewith a filter corner so as to substantially eliminate as much noise from the charge pump as possible, the corrective signal generally being in an audio frequency range thereby driving a terminal of the filter, the corrective signal essentially unattenuated or only marginally attenuated at the V bias terminal, the corrective signal being essentially subtracted from the MEMS microphone element signal.

12. The MEMS microphone system of claim 11 , wherein the corrective signal is a buffered, high-pass filtered version of the MEMS microphone element signal.

13. The MEMS microphone system of claim 11 , wherein the corrective signal is amplified with a gain >1 and is an inverted version of the MEMS microphone element signal.

14. The MEMS microphone system of claim 11 , wherein the filter is automatically and dynamically controlled.

15. A MEMS microphone system comprising:
a MEMS microphone element operable to generate a MEMS microphone element signal;
a divider network formed by the MEMS microphone element and a capacitor, the voltage divider operable to control an impedance of the MEMS microphone element,
the capacitor having a first terminal and a second terminal and coupled to the MEMS microphone element at the first terminal, the MEMS microphone element signal coupled onto the first terminal,
the divider network causing attenuation of the MEMS microphone element signal, the amount of attenuation being at least partially based on an effective value of a capacitance of the capacitor; and

a corrective signal generator is operable to generate a corrective signal applied to the second terminal of the capacitor,
a charge pump operable to generate a charge pump output; and
a filter responsive to the corrective signal and the charge pump output and operable to generate the bias signal, the filter having associated therewith a filter corner so as to substantially eliminate as much noise from the charge pump as possible, the corrective signal generally being in an audio frequency range thereby driving a terminal of the filter, the corrective signal essentially unattenuated or only marginally attenuated at the V bias terminal, the corrective signal being essentially subtracted from the MEMS microphone element signal
wherein the corrective signal is influenced by a version of the MEMS microphone element signal such that when only low

Assignees

• Invensense Inc

Inventors

• Jósefsson Ólafur Mar

Classifications

• H04R19/005

  using semiconductor materials · CPC title

• H04R19/04

  Microphones (H04R19/01 takes precedence) · CPC title

• H04R19/016

  for microphones · CPC title

• H04R3/06 Primary

  of electrostatic transducers · CPC title

• H04R2201/003

  Mems transducers or their use · CPC title