Piezoelectric element and piezoelectric vibrator having the same

Patent metadata

Field	Value
Publication number	US-9601684-B2
Application number	US-201414284168-A
Country	US
Kind code	B2
Filing date	May 21, 2014
Priority date	Mar 24, 2014
Publication date	Mar 21, 2017
Grant date	Mar 21, 2017

Abstract

Disclosed are a piezoelectric element and a piezoelectric vibrator having the same. The piezoelectric element and the piezoelectric vibrator having the same in accordance with an embodiment of the present invention include: a piezoelectric material formed by laminating a plurality of ceramic layers with one another; internal electrodes formed, respectively, on surfaces of the ceramic layers; and a pair of cover layers formed, respectively, above and below the piezoelectric material in order to protect the internal electrodes, and at least one of the cover layers includes: a plurality of crystal grains; and crack inhibiting particles disposed at boundaries between the plurality of crystal grains and configured to inhibit a crack from spreading in the cover layers.

First claim

What is claimed is:

1. A piezoelectric element comprising:
a piezoelectric material formed by laminating a plurality of ceramic layers with one another;
internal electrodes formed, respectively, on surfaces of the ceramic layers; and
a pair of cover layers formed, respectively, above and below the piezoelectric material in order to protect the internal electrodes,
wherein at least one of the cover layers comprises:
a plurality of crystal grains; and
crack inhibiting particles disposed at boundaries between the plurality of crystal grains and configured to inhibit a crack from spreading in the cover layers.

2. The piezoelectric element of claim 1 , wherein the crack inhibiting particles are disposed at points where at least three crystal grains of the plurality of crystal grains meet with one another.

3. The piezoelectric element of claim 1 , wherein the plurality of crystal grains are made of lead zirconate titanate (PZT), and
wherein the crack inhibiting particles include at least one of aluminum oxide (Al 2 O 3 ) and silicon carbide (SiC).

4. The piezoelectric element of claim 1 , wherein a sintering initiation temperature of the crack inhibiting particles is higher than a sintering initiation temperature of the crystal grains.

5. The piezoelectric element of claim 1 , wherein on a cross-sectional plane of the cover layers, a ratio of cross-sectional areas of the crack inhibiting particles to an entire cross-sectional area of the cover layers is greater than or equal to 0.3 and less than or equal to 3.

6. The piezoelectric element of claim 1 , further comprising a via penetrating the piezoelectric material so as to connect the internal electrodes formed, respectively, on the ceramic layers with one another.

7. The piezoelectric element of claim 1 , further comprising a terminal having one end thereof exposed so as to be connected with an external circuit and having the other end thereof electrically connected with the internal electrodes.

8. A piezoelectric vibrator comprising:
a piezoelectric material formed by laminating a plurality of ceramic layers with one another;
internal electrodes formed, respectively, on surfaces of the ceramic layers;
a pair of cover layers formed, respectively, above and below the piezoelectric material in order to protect the internal electrodes; and
a vibrating plate coupled with a cover layer of the pair of cover layers that is formed below the piezoelectric material and configured to vibrate as a result of expansion and contraction of the piezoelectric material when electric power is supplied through the internal electrodes,
wherein at least one of the cover layers comprises:
a plurality of crystal grains; and
crack inhibiting particles disposed at boundaries between the plurality of crystal grains and configured to inhibit a crack from spreading in the cover layers.

9. The piezoelectric vibrator of claim 8 , wherein the crack inhibiting particles are disposed at points where at least three crystal grains of the plurality of crystal grains meet with one another.

10. The piezoelectric vibrator of claim 8 , wherein the plurality of crystal grains are made of lead zirconate titanate (PZT), and
wherein the crack inhibiting particles include at least one of aluminum oxide (Al 2 O 3 ) and silicon carbide (SiC).

11. The piezoelectric vibrator of claim 8 , wherein a sintering initiation temperature of the crack inhibiting particles is higher than a sintering initiation temperature of the crystal grains.

12. The piezoelectric vibrator of claim 8 , wherein on a cross-sectional plane of the cover layers, a ratio of cross-sectional areas of the crack inhibiting particles to an entire cross-sectional area of the cover layers is greater than or equal to 0.3 and less than or equal to 3.

13. The piezoelectric vibrator of claim 8 , further comprising a via penetrating the piezoelectric material so as to connect the internal electrodes formed, respectively, on the ceramic layers with one another.

14. The piezoelectric vibrator of claim 8 , further comprising a terminal having one end thereof exposed so as to be connected with an external circuit and having the other end thereof electrically connected with the internal electrodes.

15. The piezoelectric vibrator of claim 8 , further comprising an adhesive material interposed between the vibrating plate and the cover layer of the pair of cover layers that is formed below the piezoelectric material.

Assignees

• Samsung Electro Mech

Inventors

• Kim Boum-Seock
• Kim Kyung-Mi
• Lee Seung Ho
• Kim Kyung-Lock
• Seo Jung-Wook

Classifications

• B06B1/0603 Primary

  using a piezoelectric bender, e.g. bimorph · CPC title

• H10N30/508 Primary

  adapted for alleviating internal stress, e.g. cracking control layers · CPC title

• H10N30/8554 Primary

  Lead-zirconium titanate [PZT] based · CPC title

• H01L41/0838 Primary

  Electricity · mapped topic

• H01L41/1876

  Electricity · mapped topic