Scaled cross bar array with undercut electrode

Patent metadata

Field	Value
Publication number	US-9601546-B1
Application number	US-201615262722-A
Country	US
Kind code	B1
Filing date	Sep 12, 2016
Priority date	Sep 12, 2016
Publication date	Mar 21, 2017
Grant date	Mar 21, 2017

Abstract

A cross bar array device includes first electrodes arranged adjacent to each other and extending in a first direction, the first electrodes including a main electrode layer and a scalable electrode layer. Second electrodes are arranged transversely to the first electrodes, the second electrodes including a main electrode layer and a scalable electrode layer. An electrolyte layer is disposed between the scalable electrode layers of the first electrodes and the second electrodes. A scalable electrode is formed from a scalable electrode layer and includes an undercut having a side laterally recessed from a width of a corresponding main electrode.

First claim

The invention claimed is:

1. A cross bar array device, comprising:
first electrodes arranged adjacent to each other and extending in a first direction, the first electrodes including a main electrode layer and a scalable electrode layer;
second electrodes arranged transversely to the first electrodes, the second electrodes including a main electrode layer and a scalable electrode layer;
an electrolyte layer disposed between the scalable electrode layers of the first electrodes and the second electrodes; and
at least one scalable electrode formed from a scalable electrode layer including an undercut having a side laterally recessed from a width of a corresponding main electrode.

2. The device as recited in claim 1 , wherein the electrolyte layer forms a resistive element programmable to provide at least two resistive states.

3. The device as recited in claim 1 , wherein the electrolyte layer includes a metal oxide and the at least one scalable electrode includes an oxygen scavenging material.

4. The device as recited in claim 1 , wherein the undercut includes lateral recesses from the width of the corresponding main electrode on two sides of the at least one scalable electrode.

5. The device as recited in claim 1 , wherein the undercut includes a width set in accordance with a desired resistive property.

6. The device as recited in claim 1 , wherein each scalable electrode layer includes a scalable electrode forming an undercut.

7. The device as recited in claim 1 , further comprising a cross-point device formed at intersections of the first and second electrodes.

8. The device as recited in claim 7 , wherein the cross-point device includes at least two resistive states based on electric fields generated by the first and second electrodes.

9. The device as recited in claim 1 , wherein the device forms a neural network.

10. A cross bar array device, comprising:
first electrodes arranged adjacent to each other and extending in a first direction, the first electrodes including a main electrode layer and a scalable electrode layer;
second electrodes arranged transversely to the first electrodes, the second electrodes including a main electrode layer and a scalable electrode layer;
an electrolyte formed on the scalable electrode layer of the second electrodes and in contact with the scalable electrode layer of the first electrodes such that at intersection points between the first and second electrodes a resistive element is formed through the electrolyte; and an undercut formed in a scalable electrode of the scalable electrode layer of the second electrode to adjust a contact area while maintaining contact resistance with the main electrode layer of the second electrode.

11. The device as recited in claim 10 , wherein the resistive element is programmable to provide at least two resistive states.

12. The device as recited in claim 10 , wherein the electrolyte layer includes a metal oxide and the scalable electrode includes an oxygen scavenging material.

13. The device as recited in claim 10 , wherein the undercut includes lateral recesses from a width of a corresponding main electrode on two sides of the scalable electrode.

14. The device as recited in claim 10 , wherein the undercut includes a width set in accordance with a desired resistive property.

15. The device as recited in claim 10 , wherein the first electrodes include a scalable electrode layer having an undercut.

16. The device as recited in claim 10 , further comprising a cross-point device formed at intersections of the first and second electrodes, wherein the cross-point device includes at least two resistive states based on electric fields generated by the first and second electrodes.

17. The device as recited in claim 10 , wherein the device forms a neural network.

18. A method for forming a cross bar array device, comprising:
patterning first electrodes arranged adjacent to each other and extending in a first direction, the first electrodes including a main electrode layer and a scalable electrode layer;
planarizing a first dielectric layer over the first electrodes to expose the first electrodes;
forming an electrolyte over the first electrodes;
forming second electrodes over the electrolyte, the second electrodes including a main electrode layer and a scalable electrode layer; and
etching the scalable electrode layer of at least one of the first and second electrodes to form an uncut.

19. The method as recited in claim 18 , wherein intersections of the first electrodes and the second electrodes form a resistive element from the electrolyte with a contact area controlled by the undercut.

20. The method as recited in claim 19 , wherein the resistive element includes at least two resistive states set using voltages on the first and/or second electrodes.

Assignees

• IBM

Inventors

• Ando Takashi
• Khater Marwan H
• Kim Seyoung
• Miyazoe Hiroyuki

Classifications

• H01L27/2463 Primary

  Electricity · mapped topic

• H01L45/1253

  Electricity · mapped topic

• H01L45/08

  Electricity · mapped topic

• H01L45/1233

  Electricity · mapped topic

• H01L45/146

  Electricity · mapped topic